Photomask Japan '99: digest of papers ; 13 - 13 April 1999, Yokohama, Japan
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Tokyo
Photomask Japan [u.a.]
1999
|
| Schlagworte: | |
| Beschreibung: | XIV, 158 S. Ill., graph. Darst. |
Internformat
MARC
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Datensatz im Suchindex
| _version_ | 1804127988932935680 |
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| bvnumber | BV013228571 |
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| ctrlnum | (OCoLC)634943744 (DE-599)BVBBV013228571 |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1999 Kawasaki gnd-content |
| genre_facet | Konferenzschrift 1999 Kawasaki |
| id | DE-604.BV013228571 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:42:06Z |
| institution | BVB |
| institution_GND | (DE-588)5350142-1 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009015543 |
| oclc_num | 634943744 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | XIV, 158 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Photomask Japan [u.a.] |
| record_format | marc |
| spelling | Photomask Japan '99 digest of papers ; 13 - 13 April 1999, Yokohama, Japan Symposium on Photomask and X-Ray Mask Technology VI Digest of papers Tokyo Photomask Japan [u.a.] 1999 XIV, 158 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Maskentechnik (DE-588)4125845-9 gnd rswk-swf Fotolithografie (DE-588)4274823-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 Kawasaki gnd-content Fotolithografie (DE-588)4274823-9 s Maskentechnik (DE-588)4125845-9 s DE-604 Symposium on Photomask and X-Ray Mask Technology 6 1999 Yokohama Sonstige (DE-588)5350142-1 oth |
| spellingShingle | Photomask Japan '99 digest of papers ; 13 - 13 April 1999, Yokohama, Japan Maskentechnik (DE-588)4125845-9 gnd Fotolithografie (DE-588)4274823-9 gnd |
| subject_GND | (DE-588)4125845-9 (DE-588)4274823-9 (DE-588)1071861417 |
| title | Photomask Japan '99 digest of papers ; 13 - 13 April 1999, Yokohama, Japan |
| title_alt | Digest of papers |
| title_auth | Photomask Japan '99 digest of papers ; 13 - 13 April 1999, Yokohama, Japan |
| title_exact_search | Photomask Japan '99 digest of papers ; 13 - 13 April 1999, Yokohama, Japan |
| title_full | Photomask Japan '99 digest of papers ; 13 - 13 April 1999, Yokohama, Japan Symposium on Photomask and X-Ray Mask Technology VI |
| title_fullStr | Photomask Japan '99 digest of papers ; 13 - 13 April 1999, Yokohama, Japan Symposium on Photomask and X-Ray Mask Technology VI |
| title_full_unstemmed | Photomask Japan '99 digest of papers ; 13 - 13 April 1999, Yokohama, Japan Symposium on Photomask and X-Ray Mask Technology VI |
| title_short | Photomask Japan '99 |
| title_sort | photomask japan 99 digest of papers 13 13 april 1999 yokohama japan |
| title_sub | digest of papers ; 13 - 13 April 1999, Yokohama, Japan |
| topic | Maskentechnik (DE-588)4125845-9 gnd Fotolithografie (DE-588)4274823-9 gnd |
| topic_facet | Maskentechnik Fotolithografie Konferenzschrift 1999 Kawasaki |
| work_keys_str_mv | AT symposiumonphotomaskandxraymasktechnologyyokohama photomaskjapan99digestofpapers1313april1999yokohamajapan AT symposiumonphotomaskandxraymasktechnologyyokohama digestofpapers |