Thin films: stresses and mechanical properties IV: symposium held April 12 - 16, 1993, San Francisco, California, U.S.A.
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Pittsburgh, Pa.
Materials Research Soc.
1993
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| Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings
308 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XVII, 778 S. Ill., graph. Darst. |
| ISBN: | 1558992049 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV013228071 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 000703s1993 ad|| |||| 10||| eng d | ||
| 020 | |a 1558992049 |9 1-55899-204-9 | ||
| 035 | |a (OCoLC)29332508 | ||
| 035 | |a (DE-599)BVBBV013228071 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 | ||
| 050 | 0 | |a TA418.9.T45 | |
| 082 | 0 | |a 621.38152 |b T3484 2 20 | |
| 084 | |a UD 8400 |0 (DE-625)145545: |2 rvk | ||
| 245 | 1 | 0 | |a Thin films: stresses and mechanical properties IV |b symposium held April 12 - 16, 1993, San Francisco, California, U.S.A. |c ed.: Paul H. Townsend ... |
| 264 | 1 | |a Pittsburgh, Pa. |b Materials Research Soc. |c 1993 | |
| 300 | |a XVII, 778 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings |v 308 | |
| 650 | 4 | |a Thin films |x Mechanical properties |v Congresses | |
| 650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mechanische Eigenschaft |0 (DE-588)4217961-0 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1993 |z San Francisco Calif. |2 gnd-content | |
| 689 | 0 | 0 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
| 689 | 0 | 1 | |a Mechanische Eigenschaft |0 (DE-588)4217961-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Townsend, Paul H. |e Sonstige |4 oth | |
| 830 | 0 | |a Materials Research Society: Materials Research Society symposia proceedings |v 308 |w (DE-604)BV001899105 |9 308 | |
| 856 | 4 | 2 | |m GBV Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009015089&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-009015089 | ||
Datensatz im Suchindex
| _version_ | 1804127988251361280 |
|---|---|
| adam_text | MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS VOLUME 308 THIN FILMS:
STRESSES AND MECHANICAL PROPERTIES IV 7 SYMPOSIUM HELD APRIL 12-16,
1993, SAN FRANCISCO, CALIFORNIA, U.S.A. EDITORS: PAUL H. TOWNSEND DOW
CHEMICAL COMPANY MIDLAND, MICHIGAN, U.S.A. TIMOTHY P. WEIHS LAWRENCE
LIVERMORE NATIONAL LABORATORY LIVERMORE, CALIFORNIA, U.S.A. JOHN E.
SANCHEZ, JR. ADVANCED MICRO DEVICES SUNNYVALE, CALIFORNIA, U.S.A. PETER
BORGESEN CORNELL UNIVERSITY ITHACA, NEW YORK, U.S.A. MATERIALS RESEARCH
SOCIETY PITTSBURGH, PENNSYLVANIA CONTENTS PREFACE XV ACKNOWLEDGMENTS
XVII MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS XVIII PART I:
STRESSES IN THIN FILMS »DETERMINATION OF THE MECHANICAL RESPONSE OF THIN
FILMS WITH X-RAYS 3 I.C. NOYAN AND G. SHEIKH STRESS MEASUREMENTS IN
MATERIALS FOR MAGNETIC RECORDING 15 V. RAMAN, K.R. COFFEY, R. URAPHRESS,
AND J.K. HOWARD REAL TIME STRESS MEASUREMENTS DURING GROWTH OF ALUMINUM
NITRIDE ON SI(LLL) AND SI(OOL) 21 W.J. MENG, J.A. SELL, GL. EESLEY, AND
T.A. PERRY GROWTH STRESS IN CVD-WGE X FILMS DEPOSITED BY REDUCTION OF
WR. BY GEH, 27 G.J. LEUSINK, T.G.M. OOSTERLAKEN, G.C.A.M. JANSSEN, AND
S. RADELAAR THE TRANSFORMATION CHARACTERISTICS IN THIN FILM SMA
HETEROSTRUCTURES*THE IMPORTANCE OF INTERFACIAL STRESS ACCOMMODATION 33
SUSAN Z. HUA, CM. SU, AND M. WUTTIG MECHANICAL STRESS MEASUREMENTS IN
WINDOW-PLATED PERMALLOY THIN FILM STRIPS 39 C.A. ROSS THE EFFECT OF
COLD-WORKING ON THE CRYSTALLIZATION TEMPERATURE OF THIN-FILM SHAPE
MEMORY EFFECT TINI 45 JOHN S. MADSEN AND A. PETER JARDINE TI-W-N
DEPOSITION STRESS AS A FUNCTION OF MICROSTRUCTURE 51 A. WITVROUW, W. DE
BOSSCHER, B. DEWEERDT, R. VERBEECK, F. LOOSEN, PH. ROUSSEL, AND K. MAEX
COMPRESSIVE STRESS INCREASE WITH REPEATED THERMAL CYCLING IN
TANTALUM(OXYGEN) THIN FILMS 57 C. CABRAL, JR., L.A. CLEVENGER, AND R.G.
SCHAD THERMAL STRESS IN DOPED SILICATE GLASSES (B,P) DEPOSITED BY PECVD
AND LPCVD 63 H. BOUCHARD, A. AZELMAD, J.F. CURRIE, M. MEUNIER, S. BLAIN,
AND T. DARWALL ISS OF TIO, TECHNIQUES 69 C. OTTERMANN, J. OTTO, U.
JESCHKOWSKI, O. ANDERSON, M. HEMING, AND K. BANGE »INVITED PAPER V
STRESS-TEMPERATURE BEHAVIOR OF 0,-TEOS SUB-ATMOSPHERIC CVD (SACVD) OXIDE
FILMS DEPOSITED ON VARIOUS OXIDE UNDERLAYERS 77 STUARDO A. ROBLES, ELLIE
YIEH, MARIA GALIANO, KURT KWOK, AND BANG C. NGUYEN STRESS RELAXATION
DURING DIFFUSIONAL PHASE TRANSFORMATION UNDER INDUCED THERMAL STRESS 85
E.C. ZINGU AND B.T. MOFOKENG STRESS IN THIN LAYERS APPLIED BY SUBSTRATE
BENDING; CALIBRATION AND POTENTIALITIES 91 J.A. CHROBOCZEK, M. STOEHR,
AND *.*. WHALL ELASTIC PROPERTIES OF SPUTTERED THIN FILMS: INFLUENCE OF
DIFFERENT PREPARATION CONDITIONS 95 C.E. BOTTANI, M. ELENA, M. BEGHI, G.
GHISLOTTI, L. GUZMAN, A. MIOTELLO, AND P.M. OSSI DEPENDENCE OF RESIDUAL
STRESS OF DIAMOND-LIKE CARBON FILMS ON PRECURSOR GASES AND PROCESS
PARAMETERS OF RF PACVD 101 KWANG-RYEOL LEE, YOUNG-JOON BAIK, AND KWANG
YONG EUN EFFECTS OF FILM THICKNESS AND ANNEALING TEMPERATURE ON THE
STRESS IN AMORPHOUS GD-FE ALLOY THIN FILMS 107 ZHI-FENG ZHOU AND YU-DIAN
FAN PART II: MEASURING STRESSES AND MECHANICAL PROPERTIES: NEW
TECHNIQUES AND DEVELOPMENTS MECHANICAL CHARACTERIZATION OF THIN FILMS
USING FULL-FIELD MEASUREMENT OF DIAPHRAGM DEFLECTION 115 R.I. PRATT AND
G.C. JOHNSON LOAD- AND DEPTH-SENSING INDENTATION TESTER FOR PROPERTIES
MEASUREMENT AT NON-AMBIENT TEMPERATURES 121 KARL B. YODER AND DONALD S.
STONE MECHANICS OF CONTACTS AT LESS THAN LOOA SCALE: INDENTATION AND AFM
127 S.P. JARVIS, T.P. WEIHS, A. ORAL, AND J.B. PETHICA MICRO-IMPACT
TECHNIQUE AND ITS APPLICATIONS 133 T.W. WU, C.-K. LEE, AND R.H. WANG
RESIDUAL STRESS EFFECTS IN THE SCRATCH ADHESION TESTING OF TANTALUM THIN
FILMS 141 RICHARD L. WHITE, JOHN NELSON, AND WILLIAM W. GERBERICH
LONG-TERM STABILITY OF NICKEL IN RESONANT MICRO- MECHANICAL DEVICES 147
G.L. POVIRK, J. BERNSTEIN, AND S.B. BROWN SILICON SURFACE MICROMACHINED
STRUCTURES FOR THE STRESS MEASUREMENT OF THIN FILMS 153 RISTO MUTIKAINEN
AND MARKKU ORPANA ACCURACY AND RELIABILITY OF BULGE TEST EXPERIMENTS 159
MARTHA K. SMALL, JOOST J. VLASSAK, STEPHEN F. POWELL, BRIAN J. DANIELS,
AND WILLIAM D. NIX VI MODELING OF THE BLISTER TEST TO EXPRESS ADHESIVE
STRENGTH IN TERMS OF MEASURABLE QUANTITIES 165 JIM SIZEMORE, DAVID A.
STEVENSON, AND JOHN STRINGER MECHANICAL PARAMETER EXTRACTION USING
RESONANT STRUCTURES 171 J. ELDERS, H.A.C. TILMANS, S. BOUWSTRA, AND M.
ELWENSPOEK A SIMPLE METHOD FOR DETERMINATION OF THE ELASTIC MODULUS OF
THIN FILMS ON A SUBSTRATE 177 M.V. SWAIN AND E.R. WEPPELMANN STUDY OF
BULK AND FILM-SUBSTRATE COMPOSITE MATERIALS BEHAVIOUR UNDER VICKERS
INDENTATION BY THREE-DIMENSIONAL FINITE ELEMENT SIMULATION 183 HAIFENG
WANG AND HERWIG BANGERT EFFECT OF THE SUBSTRATE ON MICROINDENTATION
BEHAVIOR 189 T.J. LARDNER, J.E. RITTER, AND H.B. KARAMUSTAFA THE
CALIBRATION OF THE NANOINDENTER 195 N.J. MCCORMICK, M.G. GEE, AND D.J.
HALL A QUANTITATIVE MODEL FOR INTERPRETING NANOMETER SCALE HARDNESS
MEASUREMENTS OF THIN FILMS 201 W.H. POISL, B.D. FABES, AND W.C. OLIVER
THE ANALYSIS OF DEPTH-SENSING INDENTATION DATA 209 SHEFFORD P. BAKER THE
ANALYSIS OF DEPTH-SENSING INDENTATION DATA: REVIEW OF THE SPECIAL
DISCUSSION SESSION 217 SHEFFORD P. BAKER AND T.P. WEIHS MICRO-WEAR
TECHNIQUE AND ITS APPLICATION TO ULTRA THIN FILM SYSTEMS 221 T.W. WU AND
C.-K. LEE VALIDITY OF ADHESION BETWEEN FILMS AND SUBSTRATE WITH
FRICTION-DETECTED SCRATCH TEST 227 RU WANG PART III: STRESS,
ELECTROMIGRATION, AND VOIDING IN FINE LINE STRUCTURES *STRESS-INDUCED
VOIDING VS TEMPERATURE AND PASSIVATION THICKNESS IN AL-0.5%CU-2%SI,
AL-0.5%CU AND AL-L%SI 237 T.D. SULLIVAN AND L.A. MILLER STRAIN
RELAXATION AND IN-SITU OBSERVATION OF VOIDING IN PASSIVATED ALUMINUM
ALLOY LINES 249 PAUL R. BESSER, THOMAS N. MARIEB, AND JOHN * BRAVMAN
*MICROSTRUCTURE BASED MODELLING OF STRESS MIGRATION AND ELECTROMIGRATION
INDUCED FAILURE DISTRIBUTIONS 255 P. B0RGESEN, M.A. KORHONEN, D.D.
BROWN, AND C.-Y. LI OBSERVATION AND MODELLING OF
ELECTROMIGRATION-INDUCED VOID GROWTH IN AL-BASED INTERCONNECTS 267 O.
KRAFT, S. BADER, J.E. SANCHEZ JR., AND E. ARZT *INVITED PAPER VII
MECHANICAL STRESS EFFECTS ON ELECTROMIGRATION VOIDING IN A MEANDERING
TEST STRIPE 273 LYNN E. LOWRY, BEVERLY H. TAI, J. MATTILA, AND L.H.
WALSH ANALYSIS OF STRESSES AT SINGULAR POINTS OF PATTERNED STRUCTURES
279 A. CHOUAF, G. LOPPIN, M. IGNAT, AND J.M. TERRIEZ X-RAY DETERMINATION
AND ANALYSIS OF RESIDUAL STRESSES IN UNIFORM FILMS AND PATTERNED LINES
OF TUNGSTEN 285 L. MANIGUET, M. IGNAT, M. DUPEUX, J.J. BACMANN, AND PH.
NORMANDON ANALYSIS OF THERMAL STRESS INDUCED VOID GROWTH DURING THERMAL
CYCLING 291 D.D. BROWN, M.A. KORHONEN, P. B0RGESEN, AND C.-Y. LI
NON-DESTRUCTIVE EVALUATION OF STRAINS AND VOIDING IN PASSIVATED COPPER
METALLIZATIONS 297 RICHARD P. VINCI, THOMAS N. MARIEB, AND JOHN C.
BRAVMAN PART IV: STRESS RELAXATION MECHANISMS AND THIN FILM MORPHOLOGY
GRAIN BOUNDARY SLIDING IN THIN SUBSTRATE-BONDED AL FILMS 305 M.
PRIELER, H.G. BOHN, W. SCHILLING, AND H. TRINKAUS DISPERSION
STRENGTHENING OF AL FILMS BY OXYGEN ION IMPLANTATION 317 S. BADER, P.A.
FLINN, E. ARZT, AND W.D. NIX STRESS GRADIENT AND RELAXATION MEASUREMENTS
IN AL AND OXYGEN-IMPLANTED AL FILMS 323 PAUL R. BESSER, STEFAN BADER,
RAMNATH VENKATRAMAN, AND JOHN C. BRAVMAN EFFECTS OF CONFINEMENT ON
PLASTIC DEFORMATION IN PASSIVATED AL FILMS 329 S.G.H. ANDERSON, I.-S.
YEO, P.S. HO, S. RAMASWAMI, AND R. CHEUNG STRESS IN COPPER THIN FILMS
WITH BARRIER LAYERS 337 RICHARD P. VINCI AND JOHN C. BRAVMAN STRESS
MAPPING NEAR SIMULATED DEFECTS IN THIN FILM WIRING USING X-RAY MICROBEAM
DIFFRACTION 343 PATRICK DEHAVEN, CHARLES GOLDSMITH, AND SUNDAR KAMATH
THE INFLUENCE OF MECHANICAL STRESS ON HOT-CARRIER DEGRADATION IN
MOSFET S 349 INGRID DE WOLF, RUDI BELLENS, GUIDO GROESENEKEN, AND HERMAN
E. MAES VARIATION OF LOCAL MECHANICAL STRESS DURING THE DIFFERENT
PROCESSING STEPS OF IC-ISOLATION: A MICRO-RAMAN SPECTROSCOPY STUDY 355
INGRID DE WOLF, HERMAN E. MAES, AND HANS NORSTROEM MICROSTRUCTURE OF
BURIED THIN ETCH STOP FILMS FORMED BY NITROGEN IMPLANTATION INTO SILICON
361 A. ROMANO-RODRIGUEZ, A. EL-HASSANI, A. PEREZ-RODRIGUEZ, J. SAMITIER,
J.R. MORANTE, J. ESTEVE, AND M.C. ACERO *INVITED PAPER PART V: MECHANICS
AND MICROSTRUCTURE IN EPITAXIAL LAYERS »THEORETICAL CONSIDERATIONS ON
GROWING UNIFORMLY THICK FILMS OF PERFECT CRYSTALLINITY 369 JAN H. VAN
DER MERWE CONTINUUM MODELING OF STRESS-DRIVEN SURFACE DIFFUSION IN
STRAINED ELASTIC MATERIALS 383 L.B. FREUND, G.E. BELTZ, AND F.
JONSDOTTIR DISLOCATION THREADING THROUGH AN EPITAXIAL FILM: AN ANALYSIS
BASED ON THE PEIERLS-NABARRO CONCEPT 395 G.E. BELTZ AND L.B. FREUND A
MISFIT DISLOCATION BLOCKING MECHANISM IN CONTINUOUS INGAAS LAYERS GROWN
ON PATTERNED GAAS 401 G. PATRICK WATSON, DIETER G. AST, TIMOTHY J.
ANDERSON, AND BALU PATHANGEY REORIENTATION OF MISFIT DISLOCATIONS DURING
ANNEALING IN INGAAS/GAAS(001) INTERFACES 405 Y. CHEN, Z.
LILIENTAL-WEBER, J. WASHBURN, J.F. KLEM, AND J.Y. TSAO STRESS DEPENDENCE
OF THE VELOCITY OF THREADING DISLOCATION SEGMENTS IN SI-GE
HETEROEPITAXIAL FILMS 411 VERONIQUE T. GILLARD, DAVID B. NOBLE, AND
WILLIAM D. NIX THREADING DISLOCATION DENSITIES IN GAAS GROWN ON REDUCED
AREA SI SUBSTRATES 417 J. KNALL, L.T. ROMANO, D.K. BIEGELSEN, AND R.D.
BRINGANS GROWTH OF STRAIN-FREE GAAS ON SI/SAPPHIRE 423 HYUNCHUL SOHN,
E.R. WEBER, JAY TU, AND J.S. SMITH DIFFUSION-INDUCED DISLOCATIONS IN
SILICON 427 X.J. NING AND P. PIROUZ SLIPLINE OFFSET OF IN , 5 GA 75
AS/GAAS (100) IMAGED BY ATOMIC FORCE MICROSCOPY 433 S.E. HARVEY, J.E.
ANGELO, AND W.W. GERBERICH MECHANICAL PROPERTIES OF THE GAAS/SI [001]
INTERFACE BY X-RAYS HYBRID MULTIPLE DIFFRACTION 439 S.L. MORELHAO, L.P.
CARDOSO, AND M.M.G. DE CARVALHO EFFECT OF STRESS ON THE CARRIER
CONTRIBUTION TO ELASTIC CONSTANTS IN THIN FILMS OF SMALL GAP COMPOUNDS
445 KAMAKHYA P. GHATAK AND SAMBHU NATH BISWAS BARRIERS TO STRAIN
RELAXATION IN EPITAXIAL FLUORIDES ON SI(LLL) 451 WEIDAN LI, STEVE HYMES,
SHYAM P. MURARKA, AND LEO J. SCHOWALTER STRAIN-INDUCED RECONSTRUCTION OF
IMPURITY STATES IN PBTE(GA) FILMS 455 BORIS A. AKIMOV, LUDMILA I.
RYABOVA, AND EVGENIY I. SLYNKO ELECTRONIC STRUCTURE OF SHORT-PERIOD
ZNSE/ZNTE SUPERLATTICES GROWN BY MOVPE AT 300C 461 N. BRIOT, T.
CLOITRE, O. BRIOT, P. BORING, B.E. PONGA, B. GIL, R.L. AULOMBARD, M.
GAILHANOU, J.M. SALLESE, AND A.C. JONES INVITED PAPER IX STABILITY OF
THE FULLERENES THIN FILM DEPOSITED ON THE SI(100) SURFACE H.
RAFII-TABAR, Y. KAWAZOE, AND H. KAMIYAMA 467 PART VI: MECHANICAL
BEHAVIOR OF POLYMER COATINGS »STRUCTURE DEVELOPMENT IN POLYIMIDE FILMS
475 JOHN C. COBURN, MICHAEL T. POTTIGER, AND CORALIE A. PRYDE
MICROINDENTATION ON GELATIN FILMS WITH A SPHERICAL INDENTER*A
VISCOELASTIC ANALYSIS 489 BETA Y. NI, GARY R. BISSON, AND ANDY H. TSOU
INDENTATION CREEP STUDIES OF CROSS-LINKED GLASSY POLYMER FILMS 495 KEVIN
O CONNOR AND PAMELA A. CLEVELAND ELASTIC PROPERTIES OF A POLYIMIDE FILM
DETERMINED BY BRILLOUIN SCATTERING AND MECHANICAL TECHNIQUES R. SAI
KUMAR, IVAN K. SHULLER, SUDHA S. KUMAR, A. FARTASH, AND M. GRIMSDITCH
503 GROWTH MECHANISM, LOCAL STRESSES, AND YOUNG S MODULI OF
MICRO-DEFORMATION ZONES IN GLASSY POLYMERS FILMS BY AFM 511 A.C.-M.
YANG, M.S. KUNZ, AND T.W. WU PLANARIZATION WITH CYCLOTENE* 3022 (BCB)
POLYMER COATINGS 517 T.M. STOKICH, JR., C.C. FULKS, M.T. BERNIUS, D.C.
BURDEAUX, P.E. GARROU, AND R.H. HEISTAND MODELING STRESSES IN POLYIMIDE
FILMS 527 MICHAEL T. POTTIGER AND JOHN C. COBURN EDGE DELAMINATION
TESTING: A METHOD FOR MEASURING THE ADHESION OF THIN-FILM COATINGS IN
MICROELECTRONIC APPLICATIONS. PART 1: NUMERICAL ANALYSIS AND PRELIMINARY
RESULTS 535 EDWARD O. SHAFFER II, FREDERICK J. MCGARRY, AND FRED TRUSELL
PART VII: MECHANICAL DEFORMATION OF THIN FILMS* THE EFFECTS OF
MICROSTRUCTURE AND PROCESSING CONTINUOUS MICROINDENTATION OF PASSIVATED
SURFACES IN SURFACE ACTIVE MEDIA 543 SHANKAR K. VENKATARAMAN, HE HUANG,
DAVID L. KOHLSTEDT, AND WILLIAM W. GERBERICH MECHANICAL PROPERTIES OF
EXCIMER LASER MODIFIED TITANIUM SURFACES 549 T.R. JERVIS, T.G. ZOCCO,
K.M. HUBBARD, AND M. NASTASI NANOINDENTATION STUDY OF THE MECHANICAL
PROPERTIES OF GRANULAR METAL THIN FILMS 555 M.R. SCANLON, M.K. FERBER,
AND R.C. CAMMARATA STUDIES OF SPUTTER DETOSITED CU BX TA ALLOYS 559 HONG
WANG, M.J. ZALUZEC, Y. LIU, J. MAZUMDER, AND J.M. RIGSBEE *INVITED PAPER
HREM STUDY OF FRACTURE AND DEFORMATION BEHAVIOR OF NANOSTRUCTURED THIN
FILMS 565 MING KE, WALTER W. MILLIGAN, STEPHEN A. HACKNEY, JOHN E.
CARSLEY, AND ELIAS *. AIFANTIS MECHANICAL PROPERTY CHARACTERISATION OF
CRYSTALLINE, ION IMPLANTATION AMORPHISED AND ANNEALED RELAXED SILICON
WITH SPHERICAL INDENTERS 571 J.W. WILLIAMS, J.S. FIELD, AND M.V. SWAIN
MECHANICAL PROPERTIES OF PYROLYTIC SIOCN THIN COATINGS 577 SANDRINE
BEE, ANDRE TONCK, AND JEAN-LUC LOUBET MECHANICAL AND OPTICAL PROPERTIES
OF THIN FILMS OF TANTALUM OXIDE DEPOSITED BY ION-ASSISTED DEPOSITION 583
P.J. MARTIN, A. BENDAVID, M.V. SWAIN, R.P. NETTERFIELD, T.J. KINDER,
W.G. SAINRY, AND D. DRAGE MECHANICAL TESTING IN ELECTROLESS NI MODIFIED
TIN COATING 589 J.G. DUH, J.* DOONG, AND C.T. HUANG STRESS, MECHANICAL
PROPERTIES AND COMPOSITION MEASUREMENTS IN SPUTTERED THICK ALUMINA FILMS
595 C.A. ROSS AND J.J. BARRESE MICROMECHANICAL CHARACTERIZATION OF
DIELECTRIC THIN FILMS 601 JAMES M. GROW INFLUENCE OF THE STRUCTURE ON
THE MECHANICAL PROPERTIES OF ELECTRODEPOSITED METALLIC THIN FILMS 607
J.-L. DELPLANCKE, R. WINAND, J. DILLE, AND J. CHARLIER THE ROLE OF
INDENTATION DEPTH ON THE MEASURED HARDNESS OF MATERIALS 613 MELISSA
SHELL DE GUZMAN, GABI NEUBAUER, PAUL FLINN, AND WILLIAM D. NIX PART
VIII: FRACTURE, ADHESION, AND WEAR OF THIN FILMS*THE EFFECTS OF
MICROSTRUCTURE AND PROCESSING ADHESION IN METAL-CERAMIC SYSTEMS 621
SHANKAR K. VENKATARAMAN, WILLIAM W. GERBERICH, AND DAVID L. KOHLSTEDT
ADHESION PROPERTIES OF METALLIC AND OXIDE THIN FILMS PRODUCED BY SEVERAL
METHODS 627 * OTTERMANN, N. TADOKORO, Y. TOMITA, AND K. BANGE
TRIBOMECHANICAL PROPERTIES OF ION-BEAM-DENSIFIED SOL-GEL ZIRCONIA THIN
FILMS ON CUBIC ZIRCONIA 635 TIMOTHY E. LEVINE, PETER REVERSZ, JAMES W.
MAYER, AND EMMANUEL P. GIANNELIS STRESS-CORROSION CRACKING AND
BLISTERING OF THIN POLYCRYSTALLINE SILICON FILMS IN HYDROFLUORIC ACID
641 D.J. MONK, P. KRULEVITCH, R.T. HOWE, AND G.C. JOHNSON FRACTURE
TOUGHNESS OF SILICON AND THIN FILM MICRO- STRUCTURES BY WEDGE
INDENTATION 647 M.P. DE BOER, HE HUANG, J.C NELSON, Z.P. JIANG, AND W.W.
GERBERICH XI MECHANICAL CHARACTERIZATION OF DIAMOND-LIKE CARBON (DLC)
COATED POLYCARBONATES 653 ALEX J. HSIEH, PAUL HUANG, SHANKAR K.
VENKATARAMAN, AND DAVID L. KOHLSTEDT EFFECT OF HEAT TREATMENT ON
ADHESION IN THE CT/AIP 3 SYSTEM 659 SRIRAM VISWANATHAN AND DAVID L.
KOHLSTEDT INTERFACE STRUCTURE AND ADHESION OF SPUTTERED TI-NI LAYERS ON
SILICON 665 ICHIHARU KONDO, TAKAO YONEYAMA, AND AKIRA KINBARA
MICROMECHANICAL BEHAVIOUR OF AMORPHOUS HYDROGENATED SILICON CARBIDE
FILMS 671 J. MENEVE, R. JACOBS, F. LOSTAK, L. EERSELS, E. DEKEMPENEER,
AND J. SMEETS INTERNAL STRESS MEASUREMENT ON CVD DIAMOND COATINGS BY
X-RAY DIFFRACTION AND RAMAN SPECTROSCOPY 677 K. VAN ACKER, H.
MOHRBACHER, B. BLANPAIN, P. VAN HOUTTE, AND J.P. CELIS PART IX: THE
MECHANICAL DEFORMATION OF MULTILAYER THIN FILMS *PHENOMENOLOGICAL
EXPLANATION OF ELASTIC ANOMALIES IN SUPERLATTICES 685 M. GRIMSDITCH,
ERIC E. FULLERTON, AND IVAN K. SCHULLER MECHANICAL PROPERTIES AND
RESIDUAL STRESSES IN OXIDE/ METAL MULTILAYER FILMS SYNTHESIZED BY ION
BEAM ASSISTED DEPOSITION 695 C.E. KALNAS, L.J. PARFITT, M.G. GOLDINER,
G.S. WAS, AND J.W. JONES THERMOMECHANICAL BEHAVIOUR OF AGNI MULTILAYERS
AND MAGNETOELASTIC EFFECTS 701 V. PELOSIN, B. RODMACQ, S.R. TEIXEIRA, J.
HILLAIRET, AND G. CARLOTTI X-RAY ANALYSIS OF NI/TI MULTILAYERS 707 J.
CHAUDHURI, S.M. ALYAN, AND A.F. JANKOWSKI RESIDUAL STRESS AND
MICROSTRUCTURE OF CUAV MULTILAYERS 713 PH. GOUDEAU, K.F. BADAWI, A.
NAUDON, AND N. DURAND THIN FILM STRESS IN METAL/CERAMIC MICROLAMINATES
719 R.B. INTURI, J.A. BARNARD, M. CHINMULGUND, AND J.D. JARRATT INTERNAL
STRAINS AND RELAXATIONS IN LAMELLAR TIAL 725 P.M. HAZZLEDINE, B.K. KAD,
AND M.G. MENDIRATTA CRACK-DISLOCATION MODELING OF DUCTILE-TO-BRITTLE
TRANSITIONS IN MULTILAYERED MATERIALS 731 PETER M. ANDERSON AND CANHAO
LI STUDYING STRUCTURE OF METALLIC SUPERLATTICES BY SYMMETRIC AND
ASYMMETRIC X-RAY DIFFRACTION 737 G. GLADYSZEWSKI, PH. GOUDEAU, K.F.
BADAWI, AND A. NAUDON MOLECULAR DYNAMICS MODELING OF THE MECHANICAL
BEHAVIOR OF METALLIC MULTILAYERS 743 JAMES BELAK AND DAVID B. BOERCKER
*INVITED PAPER XII THE STRUCTURE AND MECHANICAL PROPERTIES OF RU-CU AND
RU-TI NANOLAYER COMPOSITES 747 H. KUNG, M. NASTASI, T.R. JERVIS, K.M.
HUBBARD, R.M. MESSNER, *.*. MITCHELL, AND J.D. EMBURY USING THE RULE OF
MIXTURES TO EXAMINE THE HARDNESS OF CU/CU-ZR MULTILAYERS 753 T.P. WEIHS,
T.W. BARBEE, JR., AND M.A. WALL TAILORING OF MECHANICAL PROPERTIES IN
MICROLAMINATES 759 M. VILL, D.P. ADAMS, S.M. YALISOVE, AND J.C. BILELLO
USE OF MAGNETO-OPTIC KERR EFFECT MEASUREMENTS TO STUDY STRAIN AND MISFIT
ACCOMMODATION IN THIN FILMS OF NI/CU (100) 765 H.E. INGLEFIELD, C.A.
BALLENTINE, G. BOCHI, S.S. BOGOMOLOV, R.C. O HANDLEY, AND C.V. THOMPSON
AUTHOR INDEX 771 SUBJECT INDEX 775 XIII
|
| any_adam_object | 1 |
| building | Verbundindex |
| bvnumber | BV013228071 |
| callnumber-first | T - Technology |
| callnumber-label | TA418 |
| callnumber-raw | TA418.9.T45 |
| callnumber-search | TA418.9.T45 |
| callnumber-sort | TA 3418.9 T45 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | UD 8400 |
| ctrlnum | (OCoLC)29332508 (DE-599)BVBBV013228071 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01836nam a2200409 cb4500</leader><controlfield tag="001">BV013228071</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">000703s1993 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1558992049</subfield><subfield code="9">1-55899-204-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)29332508</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013228071</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TA418.9.T45</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.38152</subfield><subfield code="b">T3484 2 20</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UD 8400</subfield><subfield code="0">(DE-625)145545:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Thin films: stresses and mechanical properties IV</subfield><subfield code="b">symposium held April 12 - 16, 1993, San Francisco, California, U.S.A.</subfield><subfield code="c">ed.: Paul H. Townsend ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Pittsburgh, Pa.</subfield><subfield code="b">Materials Research Soc.</subfield><subfield code="c">1993</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVII, 778 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Materials Research Society: Materials Research Society symposia proceedings</subfield><subfield code="v">308</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Thin films</subfield><subfield code="x">Mechanical properties</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mechanische Eigenschaft</subfield><subfield code="0">(DE-588)4217961-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1993</subfield><subfield code="z">San Francisco Calif.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Mechanische Eigenschaft</subfield><subfield code="0">(DE-588)4217961-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Townsend, Paul H.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Materials Research Society: Materials Research Society symposia proceedings</subfield><subfield code="v">308</subfield><subfield code="w">(DE-604)BV001899105</subfield><subfield code="9">308</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">GBV Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009015089&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009015089</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1993 San Francisco Calif. gnd-content |
| genre_facet | Konferenzschrift 1993 San Francisco Calif. |
| id | DE-604.BV013228071 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:42:05Z |
| institution | BVB |
| isbn | 1558992049 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009015089 |
| oclc_num | 29332508 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | XVII, 778 S. Ill., graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Thin films: stresses and mechanical properties IV symposium held April 12 - 16, 1993, San Francisco, California, U.S.A. ed.: Paul H. Townsend ... Pittsburgh, Pa. Materials Research Soc. 1993 XVII, 778 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 308 Thin films Mechanical properties Congresses Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Mechanische Eigenschaft (DE-588)4217961-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1993 San Francisco Calif. gnd-content Dünne Schicht (DE-588)4136925-7 s Mechanische Eigenschaft (DE-588)4217961-0 s DE-604 Townsend, Paul H. Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 308 (DE-604)BV001899105 308 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009015089&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Thin films: stresses and mechanical properties IV symposium held April 12 - 16, 1993, San Francisco, California, U.S.A. Materials Research Society: Materials Research Society symposia proceedings Thin films Mechanical properties Congresses Dünne Schicht (DE-588)4136925-7 gnd Mechanische Eigenschaft (DE-588)4217961-0 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4217961-0 (DE-588)1071861417 |
| title | Thin films: stresses and mechanical properties IV symposium held April 12 - 16, 1993, San Francisco, California, U.S.A. |
| title_auth | Thin films: stresses and mechanical properties IV symposium held April 12 - 16, 1993, San Francisco, California, U.S.A. |
| title_exact_search | Thin films: stresses and mechanical properties IV symposium held April 12 - 16, 1993, San Francisco, California, U.S.A. |
| title_full | Thin films: stresses and mechanical properties IV symposium held April 12 - 16, 1993, San Francisco, California, U.S.A. ed.: Paul H. Townsend ... |
| title_fullStr | Thin films: stresses and mechanical properties IV symposium held April 12 - 16, 1993, San Francisco, California, U.S.A. ed.: Paul H. Townsend ... |
| title_full_unstemmed | Thin films: stresses and mechanical properties IV symposium held April 12 - 16, 1993, San Francisco, California, U.S.A. ed.: Paul H. Townsend ... |
| title_short | Thin films: stresses and mechanical properties IV |
| title_sort | thin films stresses and mechanical properties iv symposium held april 12 16 1993 san francisco california u s a |
| title_sub | symposium held April 12 - 16, 1993, San Francisco, California, U.S.A. |
| topic | Thin films Mechanical properties Congresses Dünne Schicht (DE-588)4136925-7 gnd Mechanische Eigenschaft (DE-588)4217961-0 gnd |
| topic_facet | Thin films Mechanical properties Congresses Dünne Schicht Mechanische Eigenschaft Konferenzschrift 1993 San Francisco Calif. |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009015089&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT townsendpaulh thinfilmsstressesandmechanicalpropertiesivsymposiumheldapril12161993sanfranciscocaliforniausa |