Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Pennington, NJ
Electrochemical Soc.
1994
|
| Schriftenreihe: | Electrochemical Society: Proceedings
1994,3 |
| Schlagworte: | |
| Beschreibung: | IX, 353 S. graph. Darst. |
| ISBN: | 1566770653 |
Internformat
MARC
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| 245 | 1 | 0 | |a Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II |c ed. by R. Novak ... |
| 246 | 1 | 3 | |a Contamination control and defect reduction in semiconductor manufacturing II |
| 264 | 1 | |a Pennington, NJ |b Electrochemical Soc. |c 1994 | |
| 300 | |a IX, 353 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Electrochemical Society: Proceedings |v 1994,3 | |
| 650 | 7 | |a Semiconducteurs - Conception et construction |2 ram | |
| 650 | 7 | |a Semiconducteurs - Défauts |2 ram | |
| 650 | 7 | |a Semiconducteurs - Qualité - Contrôle |2 ram | |
| 650 | 4 | |a Semiconductors |x Defects |v Congresses | |
| 650 | 4 | |a Semiconductors |x Design and construction |v Congresses | |
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Datensatz im Suchindex
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| author_corporate_role | aut |
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| author_sort | Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing Honolulu, Hawaii |
| building | Verbundindex |
| bvnumber | BV013176193 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UP 3100 |
| ctrlnum | (OCoLC)30639494 (DE-599)BVBBV013176193 |
| dewey-full | 621.3 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3 |
| dewey-search | 621.3 |
| dewey-sort | 3621.3 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1993 Honolulu Hawaii gnd-content |
| genre_facet | Konferenzschrift 1993 Honolulu Hawaii |
| id | DE-604.BV013176193 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:40:19Z |
| institution | BVB |
| institution_GND | (DE-588)5163302-4 |
| isbn | 1566770653 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008977502 |
| oclc_num | 30639494 |
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| owner | DE-703 |
| owner_facet | DE-703 |
| physical | IX, 353 S. graph. Darst. |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | Electrochemical Soc. |
| record_format | marc |
| series | Electrochemical Society: Proceedings |
| series2 | Electrochemical Society: Proceedings |
| spelling | Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing 2 1993 Honolulu, Hawaii Verfasser (DE-588)5163302-4 aut Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II ed. by R. Novak ... Contamination control and defect reduction in semiconductor manufacturing II Pennington, NJ Electrochemical Soc. 1994 IX, 353 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings 1994,3 Semiconducteurs - Conception et construction ram Semiconducteurs - Défauts ram Semiconducteurs - Qualité - Contrôle ram Semiconductors Defects Congresses Semiconductors Design and construction Congresses Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf Wafer (DE-588)4294605-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1993 Honolulu Hawaii gnd-content Wafer (DE-588)4294605-0 s Gitterbaufehler (DE-588)4125030-8 s DE-604 Novak, R. Sonstige oth Electrochemical Society: Proceedings 1994,3 (DE-604)BV001900941 1994,3 |
| spellingShingle | Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II Electrochemical Society: Proceedings Semiconducteurs - Conception et construction ram Semiconducteurs - Défauts ram Semiconducteurs - Qualité - Contrôle ram Semiconductors Defects Congresses Semiconductors Design and construction Congresses Gitterbaufehler (DE-588)4125030-8 gnd Wafer (DE-588)4294605-0 gnd |
| subject_GND | (DE-588)4125030-8 (DE-588)4294605-0 (DE-588)1071861417 |
| title | Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II |
| title_alt | Contamination control and defect reduction in semiconductor manufacturing II |
| title_auth | Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II |
| title_exact_search | Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II |
| title_full | Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II ed. by R. Novak ... |
| title_fullStr | Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II ed. by R. Novak ... |
| title_full_unstemmed | Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II ed. by R. Novak ... |
| title_short | Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II |
| title_sort | proceedings of the symposium on contamination control and defect reduction in semiconductor manufacturing ii |
| topic | Semiconducteurs - Conception et construction ram Semiconducteurs - Défauts ram Semiconducteurs - Qualité - Contrôle ram Semiconductors Defects Congresses Semiconductors Design and construction Congresses Gitterbaufehler (DE-588)4125030-8 gnd Wafer (DE-588)4294605-0 gnd |
| topic_facet | Semiconducteurs - Conception et construction Semiconducteurs - Défauts Semiconducteurs - Qualité - Contrôle Semiconductors Defects Congresses Semiconductors Design and construction Congresses Gitterbaufehler Wafer Konferenzschrift 1993 Honolulu Hawaii |
| volume_link | (DE-604)BV001900941 |
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