APA (7th ed.) Citation

International Symposium on Process Physics and Modeling in Semiconductor Technology Seattle, Wash. (1999). Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology. Electrochemical Soc.

Chicago Style (17th ed.) Citation

International Symposium on Process Physics and Modeling in Semiconductor Technology Seattle, Wash. Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology. Pennington, NJ: Electrochemical Soc, 1999.

MLA (9th ed.) Citation

International Symposium on Process Physics and Modeling in Semiconductor Technology Seattle, Wash. Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology. Electrochemical Soc, 1999.

Warning: These citations may not always be 100% accurate.