International Symposium on Process Physics and Modeling in Semiconductor Technology Seattle, Wash. (1999). Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology. Electrochemical Soc.
Chicago Style (17th ed.) CitationInternational Symposium on Process Physics and Modeling in Semiconductor Technology Seattle, Wash. Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology. Pennington, NJ: Electrochemical Soc, 1999.
MLA (9th ed.) CitationInternational Symposium on Process Physics and Modeling in Semiconductor Technology Seattle, Wash. Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology. Electrochemical Soc, 1999.