Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Pennington, NJ
Electrochemical Soc.
1999
|
| Schriftenreihe: | Electrochemical Society: Proceedings
1999,2 |
| Schlagworte: | |
| Beschreibung: | VIII, 230 S. Ill., graph. Darst. |
| ISBN: | 1566772249 |
Internformat
MARC
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| 245 | 1 | 0 | |a Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology |c ed. C. S. Murthy ... |
| 246 | 1 | 3 | |a Process physics and modeling in semiconductor technology |
| 264 | 1 | |a Pennington, NJ |b Electrochemical Soc. |c 1999 | |
| 300 | |a VIII, 230 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 490 | 1 | |a Electrochemical Society: Proceedings |v 1999,2 | |
| 650 | 7 | |a Ions - Implantation - Modèles mathématiques |2 ram | |
| 650 | 7 | |a Semiconducteurs - Défauts - Modèles mathématiques |2 ram | |
| 650 | 7 | |a Semiconducteurs - Modèles mathématiques |2 ram | |
| 650 | 4 | |a Mathematisches Modell | |
| 650 | 4 | |a Crystals |x Defects |x Mathematical models |v Congresses | |
| 650 | 4 | |a Ion implantation |x Mathematical models |v Congresses | |
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Datensatz im Suchindex
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| author_corporate | International Symposium on Process Physics and Modeling in Semiconductor Technology Seattle, Wash |
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| building | Verbundindex |
| bvnumber | BV013156262 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UP 3200 |
| ctrlnum | (OCoLC)42080404 (DE-599)BVBBV013156262 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1993 Seattle Wash. gnd-content |
| genre_facet | Konferenzschrift 1993 Seattle Wash. |
| id | DE-604.BV013156262 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:40:00Z |
| institution | BVB |
| institution_GND | (DE-588)5342567-4 |
| isbn | 1566772249 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008963842 |
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| physical | VIII, 230 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Electrochemical Soc. |
| record_format | marc |
| series | Electrochemical Society: Proceedings |
| series2 | Electrochemical Society: Proceedings |
| spelling | International Symposium on Process Physics and Modeling in Semiconductor Technology 5 1999 Seattle, Wash. Verfasser (DE-588)5342567-4 aut Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology ed. C. S. Murthy ... Process physics and modeling in semiconductor technology Pennington, NJ Electrochemical Soc. 1999 VIII, 230 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings 1999,2 Ions - Implantation - Modèles mathématiques ram Semiconducteurs - Défauts - Modèles mathématiques ram Semiconducteurs - Modèles mathématiques ram Mathematisches Modell Crystals Defects Mathematical models Congresses Ion implantation Mathematical models Congresses Semiconductors Mathematical models Congresses Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1993 Seattle Wash. gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 Murthy, C. S. Sonstige oth Electrochemical Society: Proceedings 1999,2 (DE-604)BV001900941 1999,2 |
| spellingShingle | Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology Electrochemical Society: Proceedings Ions - Implantation - Modèles mathématiques ram Semiconducteurs - Défauts - Modèles mathématiques ram Semiconducteurs - Modèles mathématiques ram Mathematisches Modell Crystals Defects Mathematical models Congresses Ion implantation Mathematical models Congresses Semiconductors Mathematical models Congresses Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)1071861417 |
| title | Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology |
| title_alt | Process physics and modeling in semiconductor technology |
| title_auth | Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology |
| title_exact_search | Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology |
| title_full | Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology ed. C. S. Murthy ... |
| title_fullStr | Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology ed. C. S. Murthy ... |
| title_full_unstemmed | Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology ed. C. S. Murthy ... |
| title_short | Proceedings of the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology |
| title_sort | proceedings of the fifth international symposium on process physics and modeling in semiconductor technology |
| topic | Ions - Implantation - Modèles mathématiques ram Semiconducteurs - Défauts - Modèles mathématiques ram Semiconducteurs - Modèles mathématiques ram Mathematisches Modell Crystals Defects Mathematical models Congresses Ion implantation Mathematical models Congresses Semiconductors Mathematical models Congresses Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Ions - Implantation - Modèles mathématiques Semiconducteurs - Défauts - Modèles mathématiques Semiconducteurs - Modèles mathématiques Mathematisches Modell Crystals Defects Mathematical models Congresses Ion implantation Mathematical models Congresses Semiconductors Mathematical models Congresses Halbleitertechnologie Konferenzschrift 1993 Seattle Wash. |
| volume_link | (DE-604)BV001900941 |
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