APA (7th ed.) Citation

Jaeger, R. C. (1998). Introduction to microelectronic fabrication (Reprinted with corr. 1993, [Nachdr.].). Addison-Wesley.

Chicago Style (17th ed.) Citation

Jaeger, Richard C. Introduction to Microelectronic Fabrication. Reprinted with corr. 1993, [Nachdr.]. Reading, Mass. [u.a.]: Addison-Wesley, 1998.

MLA (9th ed.) Citation

Jaeger, Richard C. Introduction to Microelectronic Fabrication. Reprinted with corr. 1993, [Nachdr.]. Addison-Wesley, 1998.