Precision motion control: design and implementation
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
London [u.a.]
Springer
2001
|
| Schriftenreihe: | Advances in industrial control
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XVIII, 232 S. Ill., graph. Darst. |
| ISBN: | 1852333286 |
Internformat
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Datensatz im Suchindex
| _version_ | 1804127816261828608 |
|---|---|
| adam_text | IMAGE 1
TAN KOK KIONG, LEE TONG HENG,
DOU HUIFANG AND HUANG SUNAN
PRECISION MOTION
CONTROL
DESIGN AND IMPLEMENTATION
WITH 175 FIGURES
IMAGE 2
CONTENTS
1. OVERVIEW OF NANOTECHNOLOGY 1
1.1 EVOLUTION OF NANOTECHNOLOGY 1
1.2 EXAMPLES OF NANOTECHNOLOGY PROCESSES 2
1.2.1 NANOFABRICATION 3
1.2.2 ULTRA-PRECISION MACHINING 4
1.2.3 BIOMEDICAL PROCESSES 5
1.2.4 MICRO-ASSEMBLY 6
1.2.5 PRECISION METROLOGY AND TEST 7
1.3 PRECISION MACHINES AND TOOLS 8
1.4 APPLICATIONS OF PRECISION MOTION CONTROL SYSTEMS 9
1.4.1 SEMICONDUCTOR 9
1.4.2 MAGNETIC AND OPTICAL MEMORY MANUFACTURING 10
1.4.3 OPTICAL MANUFACTURING 10
1.4.4 HIGH-RESOLUTION IMAGING 10
1.4.5 PRECISION METROLOGY 10
1.5 SCOPE OF THE BOOK 11
2. PRECISION TRACKING MOTION CONTROL 13
2.1 PERMANENT MAGNET LINEAR MOTORS (PMLM) 13
2.1.1 TYPES OF PMLM 14
IMAGE 3
XIV CONTENTS
2.1.2 FORCER-PLATEN LINEAR MOTORS 14
2.1.3 U-SHAPED LINEAR MOTORS 15
2.1.4 TUBULAR LINEAR MOTORS 16
2.1.5 MATHEMATICAL MODEL 17
2.1.6 FORCE RIPPLES 18
2.1.7 FRICTION 21
2.2 COMPOSITE CONTROL 22
2.2.1 FEEDFORWARD CONTROL 24
2.2.2 PID FEEDBACK CONTROL 24
2.2.3 RBF COMPENSATION 26
2.2.4 PARAMETER ESTIMATION OF NOMINAL SYSTEM 27
2.2.5 STABILITY ANALYSIS 28
2.2.6 EXPERIMENTS 31
2.3 CONTROL ENHANCEMENT WITH ACCELEROMETERS 32
2.3.1 ACCELERATION SENSOR 34
2.3.2 FULL-STATE FEEDBACK CONTROL 38
2.4 RIPPLE COMPENSATION 40
2.4.1 ADAPTIVE FEEDFORWARD COMPONENT 41
2.4.2 SIMULATION RESULTS 43
2.4.3 EXPERIMENTS 43
2.5 DISTURBANCE OBSERVATION AND CANCELLATION 44
2.5.1 OVERALL SYSTEM MODEL (PWM+PMLM) 46
2.5.2 DESIGN OF THE DISTURBANCE OBSERVER 52
2.5.3 EXPERIMENTS 55
2.6 ROBUST ADAPTIVE CONTROL 56
2.6.1 CONTROL DESIGN 57
IMAGE 4
CONTENTS XV
2.6.2 CONVERGENCE ANALYSIS 60
2.6.3 EXPERIMENTS 63
2.7 ITERATIVE LEARNING CONTROL 63
2.7.1 PRELIMINARIES AND PROBLEM FORMULATION 65
2.7.2 ROBUST CONVERGENCE ANALYSIS 70
2.7.3 ADDITIONAL ISSUES 73
2.7.4 EXPERIMENTS 73
3. AUTOMATIC TUNING OF CONTROL PARAMETERS 75
3.1 RELAY AUTO-TUNING 76
3.1.1 RELAY WITH DELAY 78
3.1.2 TWO-CHANNEL RELAY TUNING 79
3.2 FRICTION MODELLING USING RELAY FEEDBACK 80
3.2.1 FRICTION IDENTIFICATION METHOD 82
3.2.2 SIMULATION 85
3.2.3 INITIALISATION OF ADAPTIVE CONTROL 86
3.3 OPTIMAL FEATURES EXTRACTION FROM RELAY OSCILLATIONS 87
3.4 EXPERIMENTS 90
4. CO-ORDINATED MOTION CONTROL OF GANTRY SYSTEMS 95
4.1 CO-ORDINATED CONTROL SCHEMES 97
4.1.1 CLASSICAL MASTER/SLAVE APPROACH 97
4.1.2 SET-POINT CO-ORDINATED CONTROL 98
4.1.3 FULLY CO-ORDINATED CONTROL 98
4.2 SIMULATION STUDY 99
4.2.1 CONTROL TASK 100
4.2.2 RESULTS 101
IMAGE 5
XVI CONTENTS
4.3 EXPERIMENTS 103
4.3.1 XY TABLE-CONFIGURATION I 105
4.3.2 XY TABLE-CONFIGURATION II 108
5. GEOMETRICAL ERROR COMPENSATION 113
5.1 OVERVIEW OF THE LASER MEASUREMENT SYSTEM 114
5.2 COMPONENTS OF THE LASER MEASUREMENT SYSTEM 115
5.2.1 LASER HEAD 116
5.2.2 INTERFEROMETER AND REFLECTOR 116
5.2.3 MEASUREMENT RECEIVER 117
5.2.4 MEASUREMENT AND CONTROL ELECTRONICS 118
5.3 OVERVIEW OF LASER CALIBRATION 119
5.3.1 LINEAR MEASUREMENT 120
5.3.2 ANGULAR MEASUREMENT 121
5.3.3 STRAIGHTNESS MEASUREMENT 121
5.3.4 SQUARENESS MEASUREMENT 122
5.4 ROLL MEASUREMENT USING A LEVEL-SENSITIVE DEVICE 123
5.5 ACCURACY ASSESSMENT 124
5.6 FACTORS AFFECTING MEASUREMENT ACCURACY 126
5.6.1 LINEAR MEASUREMENT ERRORS 126
5.6.2 ANGULAR MEASUREMENT ERRORS 128
5.6.3 STRAIGHTNESS MEASUREMENT ERRORS 128
5.6.4 ENVIRONMENTAL CONDITIONS 129
5.7 OVERALL ERROR MODEL 129
5.8 LOOK-UP TABLE FOR GEOMETRICAL ERRORS 131
5.9 PARAMETRIC MODEL FOR GEOMETRICAL ERRORS 133
5.9.1 ERROR MODELLING WITH RADIAL BASIS FUNCTIONS 134
IMAGE 6
CONTENTS XVII
5.9.2 PARAMETER ERROR APPROXIMATIONS 135
5.9.3 EXPERIMENTS 140
5.9.4 ERROR MODELLING WITH MULTI-LAYER NEURAL NETWORKS . . .. 144
5.10 GEOMETRIE ERROR COMPENSATION OF MACHINES WITH SIGNIFICANT
RANDOM ERRORS 147
5.10.1 PROBABILISTIC METHODOLOGY 148
5.10.2 EXPERIMENTS 150
6. ELECTRONIC INTERPOLATION ERRORS 157
6.1 HEYDEMANN INTERPOLATION METHOD 158
6.1.1 INTERPOLATION BOUNDS 161
6.1.2 CALIBRATION AND COMPENSATION 161
6.2 ENHANCED INTERPOLATION METHOD 162
6.2.1 PRINCIPLE OF ENHANCED INTERPOLATION METHOD 162
6.2.2 CONSTRUCTION OF A LOOK-UP TABLE 163
6.2.3 EXPERIMENTS 169
7. VIBRATION MONITORING AND CONTROL 173
7.1 ADAPTIVE NOTCH FILTER 173
7.1.1 FAST FOURIER TRANSFORM 176
7.1.2 SIMULATION 176
7.1.3 EXPERIMENTS 177
7.2 REAL-TIME VIBRATION ANALYSER 178
7.2.1 LEARNING MODE 181
7.2.2 MONITORING MODE 182
7.2.3 DIAGNOSTIC MODE 185
7.2.4 EXPERIMENTS 186
7.2.5 REMOTE MONITORING 190
IMAGE 7
XVIII CONTENTS
7.2.6 IMPLEMENTATION 193
8. OTHER ENGINEERING ASPECTS 201
8.1 SPECIFICATIONS 202
8.2 SELECTION OF MOTORS AND DRIVES 202
8.3 SELECTION OF ENCODERS 202
8.4 CONTROL PLATFORM 203
8.4.1 HARDWARE ARCHITECTURE 203
8.4.2 SOFTWARE DEVELOPMENT PLATFORM 206
8.4.3 USER INTERFACE 207
8.5 ACCURACY ASSESSMENT 209
A. LASER CALIBRATION OPTICS, ACCESSORIES AND SET-UP 213
REFERENCES 221
INDEX 231
|
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| spelling | Precision motion control design and implementation Tan Kok Kiong ... London [u.a.] Springer 2001 XVIII, 232 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Advances in industrial control Motion control devices Reglerentwurf (DE-588)4177447-4 gnd rswk-swf Kompensation (DE-588)4031980-5 gnd rswk-swf Geometrischer Fehler (DE-588)4279736-6 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Positionierung (DE-588)4140478-6 gnd rswk-swf Bahnplanung (DE-588)4267628-9 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s Geometrischer Fehler (DE-588)4279736-6 s Kompensation (DE-588)4031980-5 s Reglerentwurf (DE-588)4177447-4 s Bahnplanung (DE-588)4267628-9 s Positionierung (DE-588)4140478-6 s DE-604 Tan, Kok Kiong Sonstige oth GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008936784&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Precision motion control design and implementation Motion control devices Reglerentwurf (DE-588)4177447-4 gnd Kompensation (DE-588)4031980-5 gnd Geometrischer Fehler (DE-588)4279736-6 gnd Nanotechnologie (DE-588)4327470-5 gnd Positionierung (DE-588)4140478-6 gnd Bahnplanung (DE-588)4267628-9 gnd |
| subject_GND | (DE-588)4177447-4 (DE-588)4031980-5 (DE-588)4279736-6 (DE-588)4327470-5 (DE-588)4140478-6 (DE-588)4267628-9 |
| title | Precision motion control design and implementation |
| title_auth | Precision motion control design and implementation |
| title_exact_search | Precision motion control design and implementation |
| title_full | Precision motion control design and implementation Tan Kok Kiong ... |
| title_fullStr | Precision motion control design and implementation Tan Kok Kiong ... |
| title_full_unstemmed | Precision motion control design and implementation Tan Kok Kiong ... |
| title_short | Precision motion control |
| title_sort | precision motion control design and implementation |
| title_sub | design and implementation |
| topic | Motion control devices Reglerentwurf (DE-588)4177447-4 gnd Kompensation (DE-588)4031980-5 gnd Geometrischer Fehler (DE-588)4279736-6 gnd Nanotechnologie (DE-588)4327470-5 gnd Positionierung (DE-588)4140478-6 gnd Bahnplanung (DE-588)4267628-9 gnd |
| topic_facet | Motion control devices Reglerentwurf Kompensation Geometrischer Fehler Nanotechnologie Positionierung Bahnplanung |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008936784&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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