International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors Research Triangle Park, NC. (2000). Papers from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors: 28 - 31 March 1999, Research Triangle Park, North Carolina. American Inst. of Physics.
Chicago-Zitierstil (17. Ausg.)International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors Research Triangle Park, NC. Papers from the Fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors: 28 - 31 March 1999, Research Triangle Park, North Carolina. New York: American Inst. of Physics, 2000.
MLA-Zitierstil (9. Ausg.)International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors Research Triangle Park, NC. Papers from the Fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors: 28 - 31 March 1999, Research Triangle Park, North Carolina. American Inst. of Physics, 2000.