Papers from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors: 28 - 31 March 1999, Research Triangle Park, North Carolina
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | German |
| Veröffentlicht: |
New York
American Inst. of Physics
2000
|
| Schriftenreihe: | Journal of vacuum science & technology / B
18,1 |
| Schlagworte: | |
| Beschreibung: | Einzelaufn. eines Zeitschr.-Heftes |
| Beschreibung: | S. 337 - 606 Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV013101898 | ||
| 003 | DE-604 | ||
| 005 | 20000529 | ||
| 007 | t | ||
| 008 | 000411s2000 ad|| |||| 10||| ger d | ||
| 035 | |a (OCoLC)633786233 | ||
| 035 | |a (DE-599)BVBBV013101898 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a ger | |
| 049 | |a DE-384 |a DE-91G | ||
| 111 | 2 | |a International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors |n 5 |d 1999 |c Research Triangle Park, NC |j Verfasser |0 (DE-588)6023093-9 |4 aut | |
| 245 | 1 | 0 | |a Papers from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors |b 28 - 31 March 1999, Research Triangle Park, North Carolina |c ed. for the conf.: Lawrence A. Larson |
| 246 | 1 | 3 | |a Papres from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors |
| 264 | 1 | |a New York |b American Inst. of Physics |c 2000 | |
| 300 | |a S. 337 - 606 |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science & technology / B |v 18,1 | |
| 500 | |a Einzelaufn. eines Zeitschr.-Heftes | ||
| 650 | 0 | 7 | |a Dotierungsprofil |0 (DE-588)4150495-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiterphysik |0 (DE-588)4113829-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1999 |z Research Triangle Park NC |2 gnd-content | |
| 689 | 0 | 0 | |a Dotierungsprofil |0 (DE-588)4150495-1 |D s |
| 689 | 0 | 1 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Halbleiterphysik |0 (DE-588)4113829-6 |D s |
| 689 | 1 | |8 1\p |5 DE-604 | |
| 700 | 1 | |a Larson, Lawrence A. |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008925024 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Datensatz im Suchindex
| _version_ | 1804127798740123648 |
|---|---|
| any_adam_object | |
| author_corporate | International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors Research Triangle Park, NC |
| author_corporate_role | aut |
| author_facet | International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors Research Triangle Park, NC |
| author_sort | International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors Research Triangle Park, NC |
| building | Verbundindex |
| bvnumber | BV013101898 |
| ctrlnum | (OCoLC)633786233 (DE-599)BVBBV013101898 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01970nam a2200409 cb4500</leader><controlfield tag="001">BV013101898</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20000529 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">000411s2000 ad|| |||| 10||| ger d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)633786233</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013101898</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">ger</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-384</subfield><subfield code="a">DE-91G</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors</subfield><subfield code="n">5</subfield><subfield code="d">1999</subfield><subfield code="c">Research Triangle Park, NC</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)6023093-9</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Papers from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors</subfield><subfield code="b">28 - 31 March 1999, Research Triangle Park, North Carolina</subfield><subfield code="c">ed. for the conf.: Lawrence A. Larson</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Papres from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">American Inst. of Physics</subfield><subfield code="c">2000</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">S. 337 - 606</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Journal of vacuum science & technology / B</subfield><subfield code="v">18,1</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufn. eines Zeitschr.-Heftes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dotierungsprofil</subfield><subfield code="0">(DE-588)4150495-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiterphysik</subfield><subfield code="0">(DE-588)4113829-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1999</subfield><subfield code="z">Research Triangle Park NC</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dotierungsprofil</subfield><subfield code="0">(DE-588)4150495-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Halbleiterphysik</subfield><subfield code="0">(DE-588)4113829-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Larson, Lawrence A.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008925024</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1999 Research Triangle Park NC gnd-content |
| genre_facet | Konferenzschrift 1999 Research Triangle Park NC |
| id | DE-604.BV013101898 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:39:05Z |
| institution | BVB |
| institution_GND | (DE-588)6023093-9 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008925024 |
| oclc_num | 633786233 |
| open_access_boolean | |
| owner | DE-384 DE-91G DE-BY-TUM |
| owner_facet | DE-384 DE-91G DE-BY-TUM |
| physical | S. 337 - 606 Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology / B |
| spelling | International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors 5 1999 Research Triangle Park, NC Verfasser (DE-588)6023093-9 aut Papers from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors 28 - 31 March 1999, Research Triangle Park, North Carolina ed. for the conf.: Lawrence A. Larson Papres from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors New York American Inst. of Physics 2000 S. 337 - 606 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology / B 18,1 Einzelaufn. eines Zeitschr.-Heftes Dotierungsprofil (DE-588)4150495-1 gnd rswk-swf Halbleiterphysik (DE-588)4113829-6 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 Research Triangle Park NC gnd-content Dotierungsprofil (DE-588)4150495-1 s Halbleiter (DE-588)4022993-2 s DE-604 Halbleiterphysik (DE-588)4113829-6 s 1\p DE-604 Larson, Lawrence A. Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Papers from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors 28 - 31 March 1999, Research Triangle Park, North Carolina Dotierungsprofil (DE-588)4150495-1 gnd Halbleiterphysik (DE-588)4113829-6 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4150495-1 (DE-588)4113829-6 (DE-588)4022993-2 (DE-588)1071861417 |
| title | Papers from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors 28 - 31 March 1999, Research Triangle Park, North Carolina |
| title_alt | Papres from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors |
| title_auth | Papers from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors 28 - 31 March 1999, Research Triangle Park, North Carolina |
| title_exact_search | Papers from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors 28 - 31 March 1999, Research Triangle Park, North Carolina |
| title_full | Papers from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors 28 - 31 March 1999, Research Triangle Park, North Carolina ed. for the conf.: Lawrence A. Larson |
| title_fullStr | Papers from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors 28 - 31 March 1999, Research Triangle Park, North Carolina ed. for the conf.: Lawrence A. Larson |
| title_full_unstemmed | Papers from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors 28 - 31 March 1999, Research Triangle Park, North Carolina ed. for the conf.: Lawrence A. Larson |
| title_short | Papers from the fifth International Workshop on the Measurement, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors |
| title_sort | papers from the fifth international workshop on the measurement characterization and modeling of ultra shallow doping profiles in semiconductors 28 31 march 1999 research triangle park north carolina |
| title_sub | 28 - 31 March 1999, Research Triangle Park, North Carolina |
| topic | Dotierungsprofil (DE-588)4150495-1 gnd Halbleiterphysik (DE-588)4113829-6 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Dotierungsprofil Halbleiterphysik Halbleiter Konferenzschrift 1999 Research Triangle Park NC |
| work_keys_str_mv | AT internationalworkshoponthemeasurementcharacterizationandmodelingofultrashallowdopingprofilesinsemiconductorsresearchtriangleparknc papersfromthefifthinternationalworkshoponthemeasurementcharacterizationandmodelingofultrashallowdopingprofilesinsemiconductors2831march1999researchtriangleparknorthcarolina AT larsonlawrencea papersfromthefifthinternationalworkshoponthemeasurementcharacterizationandmodelingofultrashallowdopingprofilesinsemiconductors2831march1999researchtriangleparknorthcarolina AT internationalworkshoponthemeasurementcharacterizationandmodelingofultrashallowdopingprofilesinsemiconductorsresearchtriangleparknc papresfromthefifthinternationalworkshoponthemeasurementcharacterizationandmodelingofultrashallowdopingprofilesinsemiconductors AT larsonlawrencea papresfromthefifthinternationalworkshoponthemeasurementcharacterizationandmodelingofultrashallowdopingprofilesinsemiconductors |