Papers from the Ninth Canadian Semiconductor Technology Conference: 10-13 August 1999, Ottawa, Canada
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
American Inst. of Physics
2000
|
| Schriftenreihe: | Journal of vacuum science & technology / A
18,2 |
| Schlagworte: | |
| Beschreibung: | Einzelaufn. eines Zeitschr.-Heftes |
| Beschreibung: | S. 571 - 792 Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
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| physical | S. 571 - 792 Ill., graph. Darst. |
| publishDate | 2000 |
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| publisher | American Inst. of Physics |
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| series2 | Journal of vacuum science & technology / A |
| spelling | Canadian Semiconductor Technology Conference 9 1999 Ottawa Verfasser (DE-588)6027927-8 aut Papers from the Ninth Canadian Semiconductor Technology Conference 10-13 August 1999, Ottawa, Canada spec. ed. for the proc.: Suhit Das ... New York, NY American Inst. of Physics 2000 S. 571 - 792 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology / A 18,2 Einzelaufn. eines Zeitschr.-Heftes Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 Ottawa gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 |
| spellingShingle | Papers from the Ninth Canadian Semiconductor Technology Conference 10-13 August 1999, Ottawa, Canada Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)1071861417 |
| title | Papers from the Ninth Canadian Semiconductor Technology Conference 10-13 August 1999, Ottawa, Canada |
| title_auth | Papers from the Ninth Canadian Semiconductor Technology Conference 10-13 August 1999, Ottawa, Canada |
| title_exact_search | Papers from the Ninth Canadian Semiconductor Technology Conference 10-13 August 1999, Ottawa, Canada |
| title_full | Papers from the Ninth Canadian Semiconductor Technology Conference 10-13 August 1999, Ottawa, Canada spec. ed. for the proc.: Suhit Das ... |
| title_fullStr | Papers from the Ninth Canadian Semiconductor Technology Conference 10-13 August 1999, Ottawa, Canada spec. ed. for the proc.: Suhit Das ... |
| title_full_unstemmed | Papers from the Ninth Canadian Semiconductor Technology Conference 10-13 August 1999, Ottawa, Canada spec. ed. for the proc.: Suhit Das ... |
| title_short | Papers from the Ninth Canadian Semiconductor Technology Conference |
| title_sort | papers from the ninth canadian semiconductor technology conference 10 13 august 1999 ottawa canada |
| title_sub | 10-13 August 1999, Ottawa, Canada |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Halbleitertechnologie Konferenzschrift 1999 Ottawa |
| work_keys_str_mv | AT canadiansemiconductortechnologyconferenceottawa papersfromtheninthcanadiansemiconductortechnologyconference1013august1999ottawacanada |