Development of an ultraviolet photodetector and a compact ozone absorption photometer:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Aachen
Shaker
2000
|
| Ausgabe: | Als Ms. gedr. |
| Schriftenreihe: | Erlanger Berichte Mikroelektronik
2000,2 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Zugl.: Erlangen-Nürnberg, Univ., Diss., 2000. - Parallelsacht.: Entwicklung eines Ultraviolett-Photodetektors und eines kompakten Ozonabsorptionsphotometers |
| Beschreibung: | IV, 129 S. Ill., graph. Darst. |
| ISBN: | 3826571312 |
Internformat
MARC
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| 100 | 1 | |a Qian, Feng |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Development of an ultraviolet photodetector and a compact ozone absorption photometer |c Feng Qian |
| 250 | |a Als Ms. gedr. | ||
| 264 | 1 | |a Aachen |b Shaker |c 2000 | |
| 300 | |a IV, 129 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Erlanger Berichte Mikroelektronik |v 2000,2 | |
| 500 | |a Zugl.: Erlangen-Nürnberg, Univ., Diss., 2000. - Parallelsacht.: Entwicklung eines Ultraviolett-Photodetektors und eines kompakten Ozonabsorptionsphotometers | ||
| 650 | 4 | |a Atmospheric ozone |x Measurement | |
| 650 | 4 | |a Optical detectors | |
| 650 | 4 | |a Ultraviolet detectors | |
| 650 | 0 | 7 | |a Photodetektor |0 (DE-588)4136941-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ultraviolett |0 (DE-588)4186733-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ozon |0 (DE-588)4173038-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fotometer |0 (DE-588)4174523-1 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Photodetektor |0 (DE-588)4136941-5 |D s |
| 689 | 0 | 1 | |a Ultraviolett |0 (DE-588)4186733-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Fotometer |0 (DE-588)4174523-1 |D s |
| 689 | 1 | 1 | |a Ozon |0 (DE-588)4173038-0 |D s |
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| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-008910609 | |
Datensatz im Suchindex
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| adam_text |
CONTENTS
ABSTRACT
III
ZUSAMMENFASSUNG
IV
CHAPTER
1
INTRODUCTION
1
CHAPTER
2
OZONE
MEASUREMENT
AND
UV
PHOTODETECTOR
5
2.1
OZONE
AND
OZONE
MEASUREMENT
5
2.1.1
OZONE
AND
ITS
PROPERTIES
5
2.1.2
OZONE
MEASUREMENT
METHODS
6
2.1.3
OZONE
ABSORPTION
AND
THEORETICAL
ANALYSIS
9
2.2
ULTRAVIOLET
PHOTODETECTOR
12
2.2.1
ULTRAVIOLET
RADIATION
MEASUREMENT
12
2.2.2
SEMICONDUCTOR
MATERIALS
FOR
UV
PHOTODETECTORS
16
2.2.3
PHOTODIODE
AND
PHOTOTRANSISTOR
18
2.2.4
INDIRECT-COUPLING
PHOTODETECTOR
22
2.2.5
DIFFERENT
DARK
CURRENT
MECHANISMS
26
2.3
CHARACTERISTICS
OF
PHOTODETECTOR
28
CHAPTER
3
DEVICE
DESIGN
AND
NUMERICAL
SIMULATION
31
3.1
PHOTODETECTOR
DESIGN
31
3.1.1
SHALLOW
P-N
JUNCTION
31
3.1.2
LATERAL
P-I-N
PHOTODIODE
36
3.1.3
P-N-P-N
JUNCTION
37
3.1.4
INDIRECT-COUPLING
PHOTODETECTOR
AND
PHOTOTRANSISTOR
38
3.2
DESIGN
OF
THE
UV-BAND
PASS
FILTER
41
3.2.1
TRANSFER
MATRIX
41
3.2.2
UV-BAND
PASS
INTERFERENCE
FILTER
45
3.3
LAYOUT
DESIGN
48
CHAPTER
4
UV-BAND
PASS
INTERFERENCE
FILTER
51
4.1
SILICON
NITRIDE
FILMS
PREPARATION
BY
REACTIVE
SPUTTERING
51
4.1.1
EXPERIMENTAL
SYSTEM
AND
CONDITIONS
52
4.1.2
DEPOSITION
RATE
AND
REACTION
MECHANISMS
54
4.2
CHARACTERIZATION
OF
THE
FILMS
57
4.2.1
MORPHOLOGY
AND
ROUGHNESS
57
4.2.2
CHEMICAL
STOICHIOMETRY
AND
IMPURITY
57
4.2.3
OPTICAL
PROPERTIES
61
4.3
MANUFACTURING
OF
THE
UV-BAND
PASS
INTERFERENCE
FILTER
64
CHAPTER
5
FABRICATION
AND
CHARACTERIZATION
OF
PHOTODETECTORS
70
5.1
DEVICE
FABRICATION
70
5.1.1
FABRICATION
PROCESS
OF
P-N-P-N
JUNCTION
PHOTODETECTOR
71
5.1.2
FABRICATION
PROCESS
OF
THE
INDIRECT-COUPLING
PHOTODETECTOR
73
5.2
ELECTRICAL
CHARACTERISTICS
75
5.2.1
1-V
CHARACTERISTICS
OF
THE
PHOTODETECTORS
76
5.2.2
PHOTOELECTRIC
RESPONSE
78
5.2.3
TEMPERATURE
DEPENDENCE
OF
THE
PHOTO
RESPONSE
81
5.3
OPTICAL
CHARACTERISTICS
84
5.3.1
SPECTRAL
RESPONSIVITY
OF
THE
PHOTODETECTOR
84
5.3.2
RESPONSE
TIME
AND
LINEAR
RESPONSE
91
CHAPTER
6
OZONE
CONCENTRATION
MEASUREMENT
96
6.1
EXPERIMENTAL
SET-UP
OF
OZONE
PHOTOMETER
96
6.1.1
EXPERIMENTAL
SET-UP
96
6.1.2
AMPLIFICATION
CIRCUIT
DESIGN
AND
PROGRAMMING
OF
LABVIEW
99
6.2
RESULTS
AND
DISCUSSIONS
103
6.2.1
ONE
WAY
MODE
AND
REFLECTION
MODE
103
6.2.2
COMPENSATION
OF
THE
SECOND
UV
PHOTODETECTOR
105
6.2.3
CALIBRATION
AND
OUTPUT
DRIFT
108
6.2.4
COMPACT
SET-UP
WITH
28
CM
ABSORPTION
CELL
110
CHAPTER
7
SUMMARY
AND
OUTLOOK
115
REFERENCES
118
SYMBOLS
AND
ABBREVIATION
125
CURRICULUM
VITAE
129
II |
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| id | DE-604.BV013078887 |
| illustrated | Illustrated |
| indexdate | 2024-08-14T00:15:52Z |
| institution | BVB |
| isbn | 3826571312 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008910609 |
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| physical | IV, 129 S. Ill., graph. Darst. |
| publishDate | 2000 |
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| series | Erlanger Berichte Mikroelektronik |
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| spelling | Qian, Feng Verfasser aut Development of an ultraviolet photodetector and a compact ozone absorption photometer Feng Qian Als Ms. gedr. Aachen Shaker 2000 IV, 129 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Erlanger Berichte Mikroelektronik 2000,2 Zugl.: Erlangen-Nürnberg, Univ., Diss., 2000. - Parallelsacht.: Entwicklung eines Ultraviolett-Photodetektors und eines kompakten Ozonabsorptionsphotometers Atmospheric ozone Measurement Optical detectors Ultraviolet detectors Photodetektor (DE-588)4136941-5 gnd rswk-swf Ultraviolett (DE-588)4186733-6 gnd rswk-swf Ozon (DE-588)4173038-0 gnd rswk-swf Fotometer (DE-588)4174523-1 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Photodetektor (DE-588)4136941-5 s Ultraviolett (DE-588)4186733-6 s DE-604 Fotometer (DE-588)4174523-1 s Ozon (DE-588)4173038-0 s Erlanger Berichte Mikroelektronik 2000,2 (DE-604)BV010300264 2000,2 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008910609&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Qian, Feng Development of an ultraviolet photodetector and a compact ozone absorption photometer Erlanger Berichte Mikroelektronik Atmospheric ozone Measurement Optical detectors Ultraviolet detectors Photodetektor (DE-588)4136941-5 gnd Ultraviolett (DE-588)4186733-6 gnd Ozon (DE-588)4173038-0 gnd Fotometer (DE-588)4174523-1 gnd |
| subject_GND | (DE-588)4136941-5 (DE-588)4186733-6 (DE-588)4173038-0 (DE-588)4174523-1 (DE-588)4113937-9 |
| title | Development of an ultraviolet photodetector and a compact ozone absorption photometer |
| title_auth | Development of an ultraviolet photodetector and a compact ozone absorption photometer |
| title_exact_search | Development of an ultraviolet photodetector and a compact ozone absorption photometer |
| title_full | Development of an ultraviolet photodetector and a compact ozone absorption photometer Feng Qian |
| title_fullStr | Development of an ultraviolet photodetector and a compact ozone absorption photometer Feng Qian |
| title_full_unstemmed | Development of an ultraviolet photodetector and a compact ozone absorption photometer Feng Qian |
| title_short | Development of an ultraviolet photodetector and a compact ozone absorption photometer |
| title_sort | development of an ultraviolet photodetector and a compact ozone absorption photometer |
| topic | Atmospheric ozone Measurement Optical detectors Ultraviolet detectors Photodetektor (DE-588)4136941-5 gnd Ultraviolett (DE-588)4186733-6 gnd Ozon (DE-588)4173038-0 gnd Fotometer (DE-588)4174523-1 gnd |
| topic_facet | Atmospheric ozone Measurement Optical detectors Ultraviolet detectors Photodetektor Ultraviolett Ozon Fotometer Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008910609&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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