Techniques and challenges for 300 mm silicon: processing, characterization, modelling and equipment ; proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference ; Strasbourg, France, 16 - 19 June 1998
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Amsterdam [u.a.]
Elsevier
1999
|
| Schriftenreihe: | European Materials Research Society: European Materials Research Society symposia proceedings
81 |
| Schlagworte: | |
| Beschreibung: | Aus: Microelectronic engineering ; 45,2-3 |
| Beschreibung: | VI, S. 85 - 297 Ill., graph. Darst. |
| ISBN: | 0080436099 |
Internformat
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| 264 | 1 | |a Amsterdam [u.a.] |b Elsevier |c 1999 | |
| 300 | |a VI, S. 85 - 297 |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 490 | 1 | |a European Materials Research Society: European Materials Research Society symposia proceedings |v 81 | |
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Datensatz im Suchindex
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| id | DE-604.BV013071466 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:38:37Z |
| institution | BVB |
| institution_GND | (DE-588)5341647-8 |
| isbn | 0080436099 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008905902 |
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| physical | VI, S. 85 - 297 Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
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| publisher | Elsevier |
| record_format | marc |
| series | European Materials Research Society: European Materials Research Society symposia proceedings |
| series2 | European Materials Research Society: European Materials Research Society symposia proceedings |
| spelling | Techniques and challenges for 300 mm silicon processing, characterization, modelling and equipment ; proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference ; Strasbourg, France, 16 - 19 June 1998 ed. by H. Richter ... Amsterdam [u.a.] Elsevier 1999 VI, S. 85 - 297 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier European Materials Research Society: European Materials Research Society symposia proceedings 81 Aus: Microelectronic engineering ; 45,2-3 Semiconductor wafers Congresses Wafer (DE-588)4294605-0 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1998 Straßburg gnd-content Silicium (DE-588)4077445-4 s Wafer (DE-588)4294605-0 s DE-604 Richter, H. Sonstige oth Conference on Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modeling and Equipment 1998 Straßburg Sonstige (DE-588)5341647-8 oth European Materials Research Society: European Materials Research Society symposia proceedings 81 (DE-604)BV004201591 81 |
| spellingShingle | Techniques and challenges for 300 mm silicon processing, characterization, modelling and equipment ; proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference ; Strasbourg, France, 16 - 19 June 1998 European Materials Research Society: European Materials Research Society symposia proceedings Semiconductor wafers Congresses Wafer (DE-588)4294605-0 gnd Silicium (DE-588)4077445-4 gnd |
| subject_GND | (DE-588)4294605-0 (DE-588)4077445-4 (DE-588)1071861417 |
| title | Techniques and challenges for 300 mm silicon processing, characterization, modelling and equipment ; proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference ; Strasbourg, France, 16 - 19 June 1998 |
| title_auth | Techniques and challenges for 300 mm silicon processing, characterization, modelling and equipment ; proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference ; Strasbourg, France, 16 - 19 June 1998 |
| title_exact_search | Techniques and challenges for 300 mm silicon processing, characterization, modelling and equipment ; proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference ; Strasbourg, France, 16 - 19 June 1998 |
| title_full | Techniques and challenges for 300 mm silicon processing, characterization, modelling and equipment ; proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference ; Strasbourg, France, 16 - 19 June 1998 ed. by H. Richter ... |
| title_fullStr | Techniques and challenges for 300 mm silicon processing, characterization, modelling and equipment ; proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference ; Strasbourg, France, 16 - 19 June 1998 ed. by H. Richter ... |
| title_full_unstemmed | Techniques and challenges for 300 mm silicon processing, characterization, modelling and equipment ; proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference ; Strasbourg, France, 16 - 19 June 1998 ed. by H. Richter ... |
| title_short | Techniques and challenges for 300 mm silicon |
| title_sort | techniques and challenges for 300 mm silicon processing characterization modelling and equipment proceedings of symposium f on techniques and challenges for 300 mm silicon of the e mrs 1998 spring conference strasbourg france 16 19 june 1998 |
| title_sub | processing, characterization, modelling and equipment ; proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference ; Strasbourg, France, 16 - 19 June 1998 |
| topic | Semiconductor wafers Congresses Wafer (DE-588)4294605-0 gnd Silicium (DE-588)4077445-4 gnd |
| topic_facet | Semiconductor wafers Congresses Wafer Silicium Konferenzschrift 1998 Straßburg |
| volume_link | (DE-604)BV004201591 |
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