Integrated silicon optoelectronics: with 18 tables
Gespeichert in:
1. Verfasser: | |
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Format: | Buch |
Sprache: | English |
Veröffentlicht: |
Berlin [u.a.]
Springer
2000
|
Schriftenreihe: | Springer series in photonics
3 |
Schlagworte: | |
Online-Zugang: | Inhaltsverzeichnis |
Beschreibung: | XVII, 329 S. graph. Darst. |
ISBN: | 3540666621 |
Internformat
MARC
LEADER | 00000nam a22000008cb4500 | ||
---|---|---|---|
001 | BV013010763 | ||
003 | DE-604 | ||
005 | 20151214 | ||
007 | t | ||
008 | 000125s2000 gw d||| |||| 00||| eng d | ||
016 | 7 | |a 957871813 |2 DE-101 | |
020 | |a 3540666621 |9 3-540-66662-1 | ||
035 | |a (OCoLC)633030352 | ||
035 | |a (DE-599)BVBBV013010763 | ||
040 | |a DE-604 |b ger |e rakddb | ||
041 | 0 | |a eng | |
044 | |a gw |c DE | ||
049 | |a DE-29T |a DE-703 |a DE-1050 |a DE-355 |a DE-384 |a DE-522 |a DE-634 |a DE-11 |a DE-83 | ||
084 | |a UH 5500 |0 (DE-625)145663: |2 rvk | ||
084 | |a UH 5765 |0 (DE-625)145708: |2 rvk | ||
084 | |a ZN 4970 |0 (DE-625)157427: |2 rvk | ||
100 | 1 | |a Zimmermann, Horst |e Verfasser |4 aut | |
245 | 1 | 0 | |a Integrated silicon optoelectronics |b with 18 tables |c Horst Zimmermann |
264 | 1 | |a Berlin [u.a.] |b Springer |c 2000 | |
300 | |a XVII, 329 S. |b graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 1 | |a Springer series in photonics |v 3 | |
650 | 0 | 7 | |a SOI-Technik |0 (DE-588)4128029-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a BICMOS |0 (DE-588)4234781-6 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Optoelektronisches Bauelement |0 (DE-588)4043689-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Photodetektor |0 (DE-588)4136941-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Integrierte Optoelektronik |0 (DE-588)4223876-6 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a CMOS-Schaltung |0 (DE-588)4148111-2 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Siliciumbauelement |0 (DE-588)4181368-6 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a Integrierte Optoelektronik |0 (DE-588)4223876-6 |D s |
689 | 0 | 1 | |a Photodetektor |0 (DE-588)4136941-5 |D s |
689 | 0 | 2 | |a Siliciumbauelement |0 (DE-588)4181368-6 |D s |
689 | 0 | 3 | |a BICMOS |0 (DE-588)4234781-6 |D s |
689 | 0 | |5 DE-604 | |
689 | 1 | 0 | |a Integrierte Optoelektronik |0 (DE-588)4223876-6 |D s |
689 | 1 | 1 | |a Optoelektronisches Bauelement |0 (DE-588)4043689-5 |D s |
689 | 1 | 2 | |a SOI-Technik |0 (DE-588)4128029-5 |D s |
689 | 1 | 3 | |a BICMOS |0 (DE-588)4234781-6 |D s |
689 | 1 | |5 DE-604 | |
689 | 2 | 0 | |a Integrierte Optoelektronik |0 (DE-588)4223876-6 |D s |
689 | 2 | 1 | |a Optoelektronisches Bauelement |0 (DE-588)4043689-5 |D s |
689 | 2 | 2 | |a Siliciumbauelement |0 (DE-588)4181368-6 |D s |
689 | 2 | 3 | |a CMOS-Schaltung |0 (DE-588)4148111-2 |D s |
689 | 2 | |5 DE-604 | |
830 | 0 | |a Springer series in photonics |v 3 |w (DE-604)BV012408642 |9 3 | |
856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008866860&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
999 | |a oai:aleph.bib-bvb.de:BVB01-008866860 |
Datensatz im Suchindex
_version_ | 1804127711425200128 |
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adam_text | HORST ZIMMERMANN
INTEGRATED
SILICON
OPTOELECTRONICS
WITH 257 FIGURES AND 18 TABLES
SPRINGER
CONTENTS
LIST OF SYMBOLS XIII
1. BASICS OF OPTICAL EMISSION AND ABSORPTION 1
1.1 PROPERTIES OF LIGHT 1
1.2 ENERGY BANDS OF SEMICONDUCTOR MATERIALS 2
1.3 OPTICAL ABSORPTION OF SEMICONDUCTOR MATERIALS : 4
1.4 PHOTOGENERATION 6
1.5 . EXTERNAL QUANTUM EFFICIENCY AND RESPONSIVITY 7
2. THEORY 11
2.1 SEMICONDUCTOR EQUATIONS 11
2.2 IMPORTANT MODELS FOR PHOTODETECTORS 15
2.2.1 CARRIER DRIFT 15
2.2.2 CARRIER DIFFUSION 19
2.2.3 INTERNAL QUANTUM EFFICIENCY :. 22
2.2.4 EQUIVALENT CIRCUIT OF A PHOTODIODE 24
3. SILICON TECHNOLOGIES AND INTEGRATED PHOTODETECTORS 29
3.1 BIPOLAR PROCESSES 29
3.2 INTEGRATED DETECTORS IN STANDARD BIPOLAR TECHNOLOGY 32
3.2.1 PHOTODIODES 32
3.2.2 PHOTOTRANSISTORS 34
3.3 INTEGRATED DETECTORS IN MODIFIED BIPOLAR TECHNOLOGY 35
3.3.1 UV SENSOR 35
3.3.2 PIN PHOTODIODE INTEGRATION 36
3.3.3 COLOR SENSOR 39
3.4 CMOS PROCESSES 41
3.4.1 ONE-WELL PROCESSES 41
3.4.2 TWIN-WELL PROCESSES 41
3.5 CMOS-INTEGRATED DETECTORS 43
3.5.1 INTEGRATED DETECTORS IN STANDARD CMOS PROCESSES ... 43
3.5.2 PIN PHOTODIODE INTEGRATION 48
3.5.3 FINGER PHOTODIODES *71
3.5.4 PARTICLE DETECTOR 75
X CONTENTS
3.5.5 CHARGE-COUPLED-DEVICE IMAGE SENSORS 76
3.5.6 ACTIVE-PIXEL SENSORS 81
3.5.7 SCHOTTKY PHOTODIODES 86
3.5.8 MSM-PHOTODETECTORS 95
3.5.9 AMORPHOUS-SILICON DETECTORS 99
3.5.10 BIPOLAR PHOTOTRANSISTORS 105
3.5.11 FIELD-EFFECT PHOTOTRANSISTORS 109
3.6 BICMOS PROCESSES 113
3.7 BICMOS-INTEGRATED DETECTORS 119
4. OPTOELECTRONIC DEVICES IN SILICON-ON-INSULATOR 129
4.1 PHOTODIODES IN SOI 129
4.2 PHOTOTRANSISTORS IN SOI 136
4.3 OPTICAL MODULATORS IN SOI 137
5. SILICON POWER DEVICES 139
5.1 LIGHT-ACTIVATED THYRISTORS 139
5.2 LIGHT-ACTIVATED TRIAC 142
6. SIGE PHOTODETECTORS 145
6.1 HETEROEPITAXIAL GROWTH 145
6.2 ABSORPTION COEFFICIENT OF SIGE ALLOYS 146
6.3 SIGE IR PHOTODETECTOR 147
6.4 SIGEC 149
6.5 SIGE WAVEGUIDE PHOTODETECTOR 150
6.6 LONG-WAVELENGTH INFRARED SIGE PHOTOCONDUCTOR.
L
153
6.7 SIGE/SI PIN HETERO-BIPOLAR-TRANSISTOR INTEGRATION 157
7. DETECTORS BASED ON A RESONANT CAVITY 161
7.1 PRINCIPLE OF RESONANT CAVITY ENHANCED DETECTORS 161
7.2 EXAMPLE OF A RESONANT CAVITY ENHANCED SILICON DETECTOR ... 164
8. III-V SEMICONDUCTOR MATERIALS ON SILICON 167
8.1 HETEROEPITAXIAL GROWTH 167
8.2 FLIP-CHIP HYBRIDIZATION TECHNIQUE ^ 173
8.3 WAFER BONDING .179
8.3.1 WAFER BONDED PHOTODETECTORS . 181
8.3.2 WAFER BONDED LIGHT EMITTERS 182
9. SILICON LIGHT EMITTERS 187
9.1 QUANTUM-SIZE SILICON 187
9.2 SIGE AND SIGEC 193
9.3 ERBIUM-DOPED SILICON.;.... 194
CONTENTS XI
9.4 SEMICONDUCTING SILICIDES 197
9.5 ORGANIC POLYMERS ON SILICON 198
9.6 LIQUID CRYSTALS 199
10. INTEGRATED OPTICS 203
10.1 WAVEGUIDES 203
10.1.1 TOTAL REFLECTION 203
10.1.2 LOSSES 204
10.1.3 WAVEGUIDES FOR VISIBLE AND INFRARED LIGHT 204
10.1.4 WAVEGUIDES FOR INFRARED LIGHT 209
10.2 PHOTONIC BANDGAP FILTER 212
10.3 OPTICAL AMPLIFIER 215
10.4 EXAMPLES OF INTEGRATED OPTICAL SYSTEMS 217
10.4.1 OPTICAL INTERCONNECTS 217
10.4.2 OPTICAL TRANSCEIVER 221
10.4.3 MICRO-SPECTROMETER 222
10.4.4 OPTICAL PRESSURE SENSOR 224
10.4.5 OPTICAL DISTANCE SENSOR 225
10.4.6 OPTICAL PICKUP DEVICES 225
11. DESIGN OF INTEGRATED CIRCUITS 229
11.1 CIRCUIT SIMULATORS AND TRANSISTOR MODELS 229
11.2 LAYOUT AND VERIFICATION TOOLS 234
11.3 DESIGN OF OEICS 235
11.4 TRANSIMPEDANCE AMPLIFIER 238
12. EXAMPLES OF OPTOELECTRONIC INTEGRATED CIRCUITS 249
12.1 DIGITAL CMOS CIRCUITS 249
12.1.1 SYNCHRONOUS CIRCUITS 249
12.1.2 ASYNCHRONOUS CIRCUITS 253
12.2 DIGITAL BICMOS CIRCUITS 255
12.3 LASER DRIVER CIRCUITS 256
12.4 ANALOG CIRCUITS 259
12.4.1 BIPOLAR CIRCUITS 259
12.4.2 CMOS IMAGERS 262
12.4.3 CMOS CIRCUITS FOR OPTICAL STORAGE SYSTEMS 266
12.4.4 BICMOS CIRCUITS FOR OPTICAL STORAGE SYSTEMS 272
12.4.5 FIBER RECEIVERS 280
12.5 SUMMARY 294
REFERENCES 297
INDEX 325
|
any_adam_object | 1 |
author | Zimmermann, Horst |
author_facet | Zimmermann, Horst |
author_role | aut |
author_sort | Zimmermann, Horst |
author_variant | h z hz |
building | Verbundindex |
bvnumber | BV013010763 |
classification_rvk | UH 5500 UH 5765 ZN 4970 |
ctrlnum | (OCoLC)633030352 (DE-599)BVBBV013010763 |
discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02583nam a22006138cb4500</leader><controlfield tag="001">BV013010763</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20151214 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">000125s2000 gw d||| |||| 00||| eng d</controlfield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">957871813</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3540666621</subfield><subfield code="9">3-540-66662-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)633030352</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013010763</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-1050</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-384</subfield><subfield code="a">DE-522</subfield><subfield code="a">DE-634</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 5500</subfield><subfield code="0">(DE-625)145663:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 5765</subfield><subfield code="0">(DE-625)145708:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4970</subfield><subfield code="0">(DE-625)157427:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Zimmermann, Horst</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Integrated silicon optoelectronics</subfield><subfield code="b">with 18 tables</subfield><subfield code="c">Horst Zimmermann</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">2000</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVII, 329 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Springer series in photonics</subfield><subfield code="v">3</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">SOI-Technik</subfield><subfield code="0">(DE-588)4128029-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">BICMOS</subfield><subfield code="0">(DE-588)4234781-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Optoelektronisches Bauelement</subfield><subfield code="0">(DE-588)4043689-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Photodetektor</subfield><subfield code="0">(DE-588)4136941-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Integrierte Optoelektronik</subfield><subfield code="0">(DE-588)4223876-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">CMOS-Schaltung</subfield><subfield code="0">(DE-588)4148111-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Siliciumbauelement</subfield><subfield code="0">(DE-588)4181368-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Integrierte Optoelektronik</subfield><subfield code="0">(DE-588)4223876-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Photodetektor</subfield><subfield code="0">(DE-588)4136941-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Siliciumbauelement</subfield><subfield code="0">(DE-588)4181368-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">BICMOS</subfield><subfield code="0">(DE-588)4234781-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Integrierte Optoelektronik</subfield><subfield code="0">(DE-588)4223876-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Optoelektronisches Bauelement</subfield><subfield code="0">(DE-588)4043689-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="2"><subfield code="a">SOI-Technik</subfield><subfield code="0">(DE-588)4128029-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="3"><subfield code="a">BICMOS</subfield><subfield code="0">(DE-588)4234781-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Integrierte Optoelektronik</subfield><subfield code="0">(DE-588)4223876-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="1"><subfield code="a">Optoelektronisches Bauelement</subfield><subfield code="0">(DE-588)4043689-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="2"><subfield code="a">Siliciumbauelement</subfield><subfield code="0">(DE-588)4181368-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="3"><subfield code="a">CMOS-Schaltung</subfield><subfield code="0">(DE-588)4148111-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Springer series in photonics</subfield><subfield code="v">3</subfield><subfield code="w">(DE-604)BV012408642</subfield><subfield code="9">3</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008866860&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008866860</subfield></datafield></record></collection> |
id | DE-604.BV013010763 |
illustrated | Illustrated |
indexdate | 2024-07-09T18:37:41Z |
institution | BVB |
isbn | 3540666621 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008866860 |
oclc_num | 633030352 |
open_access_boolean | |
owner | DE-29T DE-703 DE-1050 DE-355 DE-BY-UBR DE-384 DE-522 DE-634 DE-11 DE-83 |
owner_facet | DE-29T DE-703 DE-1050 DE-355 DE-BY-UBR DE-384 DE-522 DE-634 DE-11 DE-83 |
physical | XVII, 329 S. graph. Darst. |
publishDate | 2000 |
publishDateSearch | 2000 |
publishDateSort | 2000 |
publisher | Springer |
record_format | marc |
series | Springer series in photonics |
series2 | Springer series in photonics |
spelling | Zimmermann, Horst Verfasser aut Integrated silicon optoelectronics with 18 tables Horst Zimmermann Berlin [u.a.] Springer 2000 XVII, 329 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer series in photonics 3 SOI-Technik (DE-588)4128029-5 gnd rswk-swf BICMOS (DE-588)4234781-6 gnd rswk-swf Optoelektronisches Bauelement (DE-588)4043689-5 gnd rswk-swf Photodetektor (DE-588)4136941-5 gnd rswk-swf Integrierte Optoelektronik (DE-588)4223876-6 gnd rswk-swf CMOS-Schaltung (DE-588)4148111-2 gnd rswk-swf Siliciumbauelement (DE-588)4181368-6 gnd rswk-swf Integrierte Optoelektronik (DE-588)4223876-6 s Photodetektor (DE-588)4136941-5 s Siliciumbauelement (DE-588)4181368-6 s BICMOS (DE-588)4234781-6 s DE-604 Optoelektronisches Bauelement (DE-588)4043689-5 s SOI-Technik (DE-588)4128029-5 s CMOS-Schaltung (DE-588)4148111-2 s Springer series in photonics 3 (DE-604)BV012408642 3 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008866860&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
spellingShingle | Zimmermann, Horst Integrated silicon optoelectronics with 18 tables Springer series in photonics SOI-Technik (DE-588)4128029-5 gnd BICMOS (DE-588)4234781-6 gnd Optoelektronisches Bauelement (DE-588)4043689-5 gnd Photodetektor (DE-588)4136941-5 gnd Integrierte Optoelektronik (DE-588)4223876-6 gnd CMOS-Schaltung (DE-588)4148111-2 gnd Siliciumbauelement (DE-588)4181368-6 gnd |
subject_GND | (DE-588)4128029-5 (DE-588)4234781-6 (DE-588)4043689-5 (DE-588)4136941-5 (DE-588)4223876-6 (DE-588)4148111-2 (DE-588)4181368-6 |
title | Integrated silicon optoelectronics with 18 tables |
title_auth | Integrated silicon optoelectronics with 18 tables |
title_exact_search | Integrated silicon optoelectronics with 18 tables |
title_full | Integrated silicon optoelectronics with 18 tables Horst Zimmermann |
title_fullStr | Integrated silicon optoelectronics with 18 tables Horst Zimmermann |
title_full_unstemmed | Integrated silicon optoelectronics with 18 tables Horst Zimmermann |
title_short | Integrated silicon optoelectronics |
title_sort | integrated silicon optoelectronics with 18 tables |
title_sub | with 18 tables |
topic | SOI-Technik (DE-588)4128029-5 gnd BICMOS (DE-588)4234781-6 gnd Optoelektronisches Bauelement (DE-588)4043689-5 gnd Photodetektor (DE-588)4136941-5 gnd Integrierte Optoelektronik (DE-588)4223876-6 gnd CMOS-Schaltung (DE-588)4148111-2 gnd Siliciumbauelement (DE-588)4181368-6 gnd |
topic_facet | SOI-Technik BICMOS Optoelektronisches Bauelement Photodetektor Integrierte Optoelektronik CMOS-Schaltung Siliciumbauelement |
url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008866860&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
volume_link | (DE-604)BV012408642 |
work_keys_str_mv | AT zimmermannhorst integratedsiliconoptoelectronicswith18tables |