Digest of papers XEL '97: July 13 - 15, 1997 Pacifico Yokohama, Yokohama
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
[Tokyo]
1997
|
| Schlagworte: | |
| Beschreibung: | Getr. Zählung graph. Darst. |
Internformat
MARC
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Datensatz im Suchindex
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| indexdate | 2024-07-09T18:37:27Z |
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| physical | Getr. Zählung graph. Darst. |
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| spelling | International Workshop on X-Ray and Extreme Ultraviolet Lithography 1997 Yokohama Verfasser (DE-588)5279191-9 aut Digest of papers XEL '97 July 13 - 15, 1997 Pacifico Yokohama, Yokohama 1997 International Workshop on X-ray and Extreme Ultraviolet Lithography. Sponsored by Japan Society for the Promotion of Science, Number 145 Committee ... [Tokyo] 1997 Getr. Zählung graph. Darst. txt rdacontent n rdamedia nc rdacarrier Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Röntgenlithografie (DE-588)4178314-1 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1997 Yokohama gnd-content Röntgenlithografie (DE-588)4178314-1 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 |
| spellingShingle | Digest of papers XEL '97 July 13 - 15, 1997 Pacifico Yokohama, Yokohama Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Röntgenlithografie (DE-588)4178314-1 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)4178314-1 (DE-588)1071861417 |
| title | Digest of papers XEL '97 July 13 - 15, 1997 Pacifico Yokohama, Yokohama |
| title_auth | Digest of papers XEL '97 July 13 - 15, 1997 Pacifico Yokohama, Yokohama |
| title_exact_search | Digest of papers XEL '97 July 13 - 15, 1997 Pacifico Yokohama, Yokohama |
| title_full | Digest of papers XEL '97 July 13 - 15, 1997 Pacifico Yokohama, Yokohama 1997 International Workshop on X-ray and Extreme Ultraviolet Lithography. Sponsored by Japan Society for the Promotion of Science, Number 145 Committee ... |
| title_fullStr | Digest of papers XEL '97 July 13 - 15, 1997 Pacifico Yokohama, Yokohama 1997 International Workshop on X-ray and Extreme Ultraviolet Lithography. Sponsored by Japan Society for the Promotion of Science, Number 145 Committee ... |
| title_full_unstemmed | Digest of papers XEL '97 July 13 - 15, 1997 Pacifico Yokohama, Yokohama 1997 International Workshop on X-ray and Extreme Ultraviolet Lithography. Sponsored by Japan Society for the Promotion of Science, Number 145 Committee ... |
| title_short | Digest of papers XEL '97 |
| title_sort | digest of papers xel 97 july 13 15 1997 pacifico yokohama yokohama |
| title_sub | July 13 - 15, 1997 Pacifico Yokohama, Yokohama |
| topic | Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Röntgenlithografie (DE-588)4178314-1 gnd |
| topic_facet | Lithografie Halbleitertechnologie Röntgenlithografie Konferenzschrift 1997 Yokohama |
| work_keys_str_mv | AT internationalworkshoponxrayandextremeultravioletlithographyyokohama digestofpapersxel97july13151997pacificoyokohamayokohama |