(1990). Handbook of plasma processing technology: Fundamentals, etching, deposition, and surface interactions (Reprint ed.). Noyes.
Chicago Style (17th ed.) CitationHandbook of Plasma Processing Technology: Fundamentals, Etching, Deposition, and Surface Interactions. Reprint ed. Westwood, NJ: Noyes, 1990.
MLA (9th ed.) CitationHandbook of Plasma Processing Technology: Fundamentals, Etching, Deposition, and Surface Interactions. Reprint ed. Noyes, 1990.
Warning: These citations may not always be 100% accurate.