Semiconductor fabrication: technology and metrology
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Philadelphia, PA
ASTM
1989
|
| Series: | American Society for Testing and Materials: ASTM special technical publication
990 |
| Subjects: | |
| Physical Description: | 476 S. Ill., graph. Darst. |
| ISBN: | 0803112734 |
Staff View
MARC
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Record in the Search Index
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| dewey-raw | 621.381/52 |
| dewey-search | 621.381/52 |
| dewey-sort | 3621.381 252 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1988 Santa Clara Calif. gnd-content |
| genre_facet | Konferenzschrift 1988 Santa Clara Calif. |
| id | DE-604.BV012973499 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:37:02Z |
| institution | BVB |
| isbn | 0803112734 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008838294 |
| oclc_num | 19723356 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | 476 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | ASTM |
| record_format | marc |
| series | American Society for Testing and Materials: ASTM special technical publication |
| series2 | American Society for Testing and Materials: ASTM special technical publication |
| spelling | Semiconductor fabrication technology and metrology Dinesh C. Gupta, ed. Philadelphia, PA ASTM 1989 476 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier American Society for Testing and Materials: ASTM special technical publication 990 Semiconductors Design and construction Congresses Halbleiter (DE-588)4022993-2 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1988 Santa Clara Calif. gnd-content Halbleiter (DE-588)4022993-2 s Fertigung (DE-588)4016899-2 s DE-604 Gupta, Dinesh C. Sonstige oth American Society for Testing and Materials: ASTM special technical publication 990 (DE-604)BV035417629 990 |
| spellingShingle | Semiconductor fabrication technology and metrology American Society for Testing and Materials: ASTM special technical publication Semiconductors Design and construction Congresses Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4016899-2 (DE-588)1071861417 |
| title | Semiconductor fabrication technology and metrology |
| title_auth | Semiconductor fabrication technology and metrology |
| title_exact_search | Semiconductor fabrication technology and metrology |
| title_full | Semiconductor fabrication technology and metrology Dinesh C. Gupta, ed. |
| title_fullStr | Semiconductor fabrication technology and metrology Dinesh C. Gupta, ed. |
| title_full_unstemmed | Semiconductor fabrication technology and metrology Dinesh C. Gupta, ed. |
| title_short | Semiconductor fabrication |
| title_sort | semiconductor fabrication technology and metrology |
| title_sub | technology and metrology |
| topic | Semiconductors Design and construction Congresses Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd |
| topic_facet | Semiconductors Design and construction Congresses Halbleiter Fertigung Konferenzschrift 1988 Santa Clara Calif. |
| volume_link | (DE-604)BV035417629 |
| work_keys_str_mv | AT guptadineshc semiconductorfabricationtechnologyandmetrology |