Semiconductor fabrication: technology and metrology
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Philadelphia, PA
ASTM
1989
|
| Schriftenreihe: | American Society for Testing and Materials: ASTM special technical publication
990 |
| Schlagworte: | |
| Beschreibung: | 476 S. Ill., graph. Darst. |
| ISBN: | 0803112734 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV012973499 | ||
| 003 | DE-604 | ||
| 005 | 20000810 | ||
| 007 | t | ||
| 008 | 000207s1989 ad|| |||| 10||| eng d | ||
| 020 | |a 0803112734 |9 0-8031-1273-4 | ||
| 035 | |a (OCoLC)19723356 | ||
| 035 | |a (DE-599)BVBBV012973499 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-83 | ||
| 050 | 0 | |a TK7871.85 | |
| 082 | 0 | |a 621.381/52 |2 20 | |
| 084 | |a ZN 4100 |0 (DE-625)157351: |2 rvk | ||
| 245 | 1 | 0 | |a Semiconductor fabrication |b technology and metrology |c Dinesh C. Gupta, ed. |
| 264 | 1 | |a Philadelphia, PA |b ASTM |c 1989 | |
| 300 | |a 476 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a American Society for Testing and Materials: ASTM special technical publication |v 990 | |
| 650 | 4 | |a Semiconductors |x Design and construction |v Congresses | |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fertigung |0 (DE-588)4016899-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1988 |z Santa Clara Calif. |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Fertigung |0 (DE-588)4016899-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Gupta, Dinesh C. |e Sonstige |4 oth | |
| 830 | 0 | |a American Society for Testing and Materials: ASTM special technical publication |v 990 |w (DE-604)BV035417629 |9 990 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008838294 | ||
Datensatz im Suchindex
| _version_ | 1804127669778907136 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV012973499 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4100 |
| ctrlnum | (OCoLC)19723356 (DE-599)BVBBV012973499 |
| dewey-full | 621.381/52 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/52 |
| dewey-search | 621.381/52 |
| dewey-sort | 3621.381 252 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01456nam a2200397 cb4500</leader><controlfield tag="001">BV012973499</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20000810 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">000207s1989 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0803112734</subfield><subfield code="9">0-8031-1273-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)19723356</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV012973499</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381/52</subfield><subfield code="2">20</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4100</subfield><subfield code="0">(DE-625)157351:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Semiconductor fabrication</subfield><subfield code="b">technology and metrology</subfield><subfield code="c">Dinesh C. Gupta, ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Philadelphia, PA</subfield><subfield code="b">ASTM</subfield><subfield code="c">1989</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">476 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">American Society for Testing and Materials: ASTM special technical publication</subfield><subfield code="v">990</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Design and construction</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fertigung</subfield><subfield code="0">(DE-588)4016899-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1988</subfield><subfield code="z">Santa Clara Calif.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Fertigung</subfield><subfield code="0">(DE-588)4016899-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Gupta, Dinesh C.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">American Society for Testing and Materials: ASTM special technical publication</subfield><subfield code="v">990</subfield><subfield code="w">(DE-604)BV035417629</subfield><subfield code="9">990</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008838294</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1988 Santa Clara Calif. gnd-content |
| genre_facet | Konferenzschrift 1988 Santa Clara Calif. |
| id | DE-604.BV012973499 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:37:02Z |
| institution | BVB |
| isbn | 0803112734 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008838294 |
| oclc_num | 19723356 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | 476 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | ASTM |
| record_format | marc |
| series | American Society for Testing and Materials: ASTM special technical publication |
| series2 | American Society for Testing and Materials: ASTM special technical publication |
| spelling | Semiconductor fabrication technology and metrology Dinesh C. Gupta, ed. Philadelphia, PA ASTM 1989 476 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier American Society for Testing and Materials: ASTM special technical publication 990 Semiconductors Design and construction Congresses Halbleiter (DE-588)4022993-2 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1988 Santa Clara Calif. gnd-content Halbleiter (DE-588)4022993-2 s Fertigung (DE-588)4016899-2 s DE-604 Gupta, Dinesh C. Sonstige oth American Society for Testing and Materials: ASTM special technical publication 990 (DE-604)BV035417629 990 |
| spellingShingle | Semiconductor fabrication technology and metrology American Society for Testing and Materials: ASTM special technical publication Semiconductors Design and construction Congresses Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4016899-2 (DE-588)1071861417 |
| title | Semiconductor fabrication technology and metrology |
| title_auth | Semiconductor fabrication technology and metrology |
| title_exact_search | Semiconductor fabrication technology and metrology |
| title_full | Semiconductor fabrication technology and metrology Dinesh C. Gupta, ed. |
| title_fullStr | Semiconductor fabrication technology and metrology Dinesh C. Gupta, ed. |
| title_full_unstemmed | Semiconductor fabrication technology and metrology Dinesh C. Gupta, ed. |
| title_short | Semiconductor fabrication |
| title_sort | semiconductor fabrication technology and metrology |
| title_sub | technology and metrology |
| topic | Semiconductors Design and construction Congresses Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd |
| topic_facet | Semiconductors Design and construction Congresses Halbleiter Fertigung Konferenzschrift 1988 Santa Clara Calif. |
| volume_link | (DE-604)BV035417629 |
| work_keys_str_mv | AT guptadineshc semiconductorfabricationtechnologyandmetrology |