Ionized physical vapor deposition:
Gespeichert in:
Format: | Buch |
---|---|
Sprache: | English |
Veröffentlicht: |
San Diego [u.a.]
Academic Press
1999
|
Schriftenreihe: | Thin films
27 |
Schlagworte: | |
Beschreibung: | XII, 253 S. Ill., graph. Darst. |
Internformat
MARC
LEADER | 00000nam a2200000 cb4500 | ||
---|---|---|---|
001 | BV012903933 | ||
003 | DE-604 | ||
005 | 20020222 | ||
007 | t | ||
008 | 991209s1999 ad|| |||| 00||| eng d | ||
035 | |a (OCoLC)247446704 | ||
035 | |a (DE-599)BVBBV012903933 | ||
040 | |a DE-604 |b ger |e rakwb | ||
041 | 0 | |a eng | |
049 | |a DE-19 | ||
084 | |a UP 7550 |0 (DE-625)146434: |2 rvk | ||
084 | |a ZM 7680 |0 (DE-625)160562: |2 rvk | ||
245 | 1 | 0 | |a Ionized physical vapor deposition |c ed. by Jeffrey A. Hopwood |
264 | 1 | |a San Diego [u.a.] |b Academic Press |c 1999 | |
300 | |a XII, 253 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 1 | |a Thin films |v 27 | |
650 | 0 | 7 | |a PVD-Verfahren |0 (DE-588)4115673-0 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
689 | 0 | 0 | |a PVD-Verfahren |0 (DE-588)4115673-0 |D s |
689 | 0 | |5 DE-604 | |
700 | 1 | |a Hopwood, Jeffrey A. |e Sonstige |4 oth | |
830 | 0 | |a Thin films |v 27 |w (DE-604)BV010579552 |9 27 | |
999 | |a oai:aleph.bib-bvb.de:BVB01-008782649 |
Datensatz im Suchindex
_version_ | 1804127589478957056 |
---|---|
any_adam_object | |
building | Verbundindex |
bvnumber | BV012903933 |
classification_rvk | UP 7550 ZM 7680 |
ctrlnum | (OCoLC)247446704 (DE-599)BVBBV012903933 |
discipline | Physik Werkstoffwissenschaften / Fertigungstechnik |
format | Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01072nam a2200337 cb4500</leader><controlfield tag="001">BV012903933</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20020222 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">991209s1999 ad|| |||| 00||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)247446704</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV012903933</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-19</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7550</subfield><subfield code="0">(DE-625)146434:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZM 7680</subfield><subfield code="0">(DE-625)160562:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Ionized physical vapor deposition</subfield><subfield code="c">ed. by Jeffrey A. Hopwood</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">San Diego [u.a.]</subfield><subfield code="b">Academic Press</subfield><subfield code="c">1999</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XII, 253 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Thin films</subfield><subfield code="v">27</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">PVD-Verfahren</subfield><subfield code="0">(DE-588)4115673-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">PVD-Verfahren</subfield><subfield code="0">(DE-588)4115673-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hopwood, Jeffrey A.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Thin films</subfield><subfield code="v">27</subfield><subfield code="w">(DE-604)BV010579552</subfield><subfield code="9">27</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008782649</subfield></datafield></record></collection> |
genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
genre_facet | Aufsatzsammlung |
id | DE-604.BV012903933 |
illustrated | Illustrated |
indexdate | 2024-07-09T18:35:45Z |
institution | BVB |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008782649 |
oclc_num | 247446704 |
open_access_boolean | |
owner | DE-19 DE-BY-UBM |
owner_facet | DE-19 DE-BY-UBM |
physical | XII, 253 S. Ill., graph. Darst. |
publishDate | 1999 |
publishDateSearch | 1999 |
publishDateSort | 1999 |
publisher | Academic Press |
record_format | marc |
series | Thin films |
series2 | Thin films |
spelling | Ionized physical vapor deposition ed. by Jeffrey A. Hopwood San Diego [u.a.] Academic Press 1999 XII, 253 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Thin films 27 PVD-Verfahren (DE-588)4115673-0 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content PVD-Verfahren (DE-588)4115673-0 s DE-604 Hopwood, Jeffrey A. Sonstige oth Thin films 27 (DE-604)BV010579552 27 |
spellingShingle | Ionized physical vapor deposition Thin films PVD-Verfahren (DE-588)4115673-0 gnd |
subject_GND | (DE-588)4115673-0 (DE-588)4143413-4 |
title | Ionized physical vapor deposition |
title_auth | Ionized physical vapor deposition |
title_exact_search | Ionized physical vapor deposition |
title_full | Ionized physical vapor deposition ed. by Jeffrey A. Hopwood |
title_fullStr | Ionized physical vapor deposition ed. by Jeffrey A. Hopwood |
title_full_unstemmed | Ionized physical vapor deposition ed. by Jeffrey A. Hopwood |
title_short | Ionized physical vapor deposition |
title_sort | ionized physical vapor deposition |
topic | PVD-Verfahren (DE-588)4115673-0 gnd |
topic_facet | PVD-Verfahren Aufsatzsammlung |
volume_link | (DE-604)BV010579552 |
work_keys_str_mv | AT hopwoodjeffreya ionizedphysicalvapordeposition |