Si front end processing - physics and technology of dopant defect interactions: symposium held April 6 - 9, 1999, San Francisco, California, U.S.A.
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
MRS, Materials Research Society
1999
|
| Schriftenreihe: | Materials Research Society symposia proceedings
568 |
| Schlagworte: | |
| Beschreibung: | XI, 298 S. Ill., zahlr. graph. Darst. |
| ISBN: | 1558994750 |
Internformat
MARC
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| 300 | |a XI, 298 S. |b Ill., zahlr. graph. Darst. | ||
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Datensatz im Suchindex
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| genre | (DE-588)1071861417 Konferenzschrift 1999 San Francisco Calif. gnd-content |
| genre_facet | Konferenzschrift 1999 San Francisco Calif. |
| id | DE-604.BV012896957 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:35:39Z |
| institution | BVB |
| isbn | 1558994750 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008778415 |
| oclc_num | 41612296 |
| open_access_boolean | |
| owner | DE-29T DE-706 |
| owner_facet | DE-29T DE-706 |
| physical | XI, 298 S. Ill., zahlr. graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | MRS, Materials Research Society |
| record_format | marc |
| series | Materials Research Society symposia proceedings |
| series2 | Materials Research Society symposia proceedings |
| spelling | Si front end processing - physics and technology of dopant defect interactions symposium held April 6 - 9, 1999, San Francisco, California, U.S.A. ed.: Hans-Joachim L. Gossmann ... Si front-end processing - physics and technology of dopant-defect interactions Warrendale, Pa. MRS, Materials Research Society 1999 XI, 298 S. Ill., zahlr. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposia proceedings 568 Semiconductor doping Congresses Semiconductors Defects Congresses Semiconductors Design and construction Congresses Silicon Congresses Siliciumhalbleiter (DE-588)4274465-9 gnd rswk-swf Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 San Francisco Calif. gnd-content Siliciumhalbleiter (DE-588)4274465-9 s Gitterbaufehler (DE-588)4125030-8 s DE-604 Gossmann, Hans-Joachim L. Sonstige oth Materials Research Society symposia proceedings 568 (DE-604)BV001899105 568 |
| spellingShingle | Si front end processing - physics and technology of dopant defect interactions symposium held April 6 - 9, 1999, San Francisco, California, U.S.A. Materials Research Society symposia proceedings Semiconductor doping Congresses Semiconductors Defects Congresses Semiconductors Design and construction Congresses Silicon Congresses Siliciumhalbleiter (DE-588)4274465-9 gnd Gitterbaufehler (DE-588)4125030-8 gnd |
| subject_GND | (DE-588)4274465-9 (DE-588)4125030-8 (DE-588)1071861417 |
| title | Si front end processing - physics and technology of dopant defect interactions symposium held April 6 - 9, 1999, San Francisco, California, U.S.A. |
| title_alt | Si front-end processing - physics and technology of dopant-defect interactions |
| title_auth | Si front end processing - physics and technology of dopant defect interactions symposium held April 6 - 9, 1999, San Francisco, California, U.S.A. |
| title_exact_search | Si front end processing - physics and technology of dopant defect interactions symposium held April 6 - 9, 1999, San Francisco, California, U.S.A. |
| title_full | Si front end processing - physics and technology of dopant defect interactions symposium held April 6 - 9, 1999, San Francisco, California, U.S.A. ed.: Hans-Joachim L. Gossmann ... |
| title_fullStr | Si front end processing - physics and technology of dopant defect interactions symposium held April 6 - 9, 1999, San Francisco, California, U.S.A. ed.: Hans-Joachim L. Gossmann ... |
| title_full_unstemmed | Si front end processing - physics and technology of dopant defect interactions symposium held April 6 - 9, 1999, San Francisco, California, U.S.A. ed.: Hans-Joachim L. Gossmann ... |
| title_short | Si front end processing - physics and technology of dopant defect interactions |
| title_sort | si front end processing physics and technology of dopant defect interactions symposium held april 6 9 1999 san francisco california u s a |
| title_sub | symposium held April 6 - 9, 1999, San Francisco, California, U.S.A. |
| topic | Semiconductor doping Congresses Semiconductors Defects Congresses Semiconductors Design and construction Congresses Silicon Congresses Siliciumhalbleiter (DE-588)4274465-9 gnd Gitterbaufehler (DE-588)4125030-8 gnd |
| topic_facet | Semiconductor doping Congresses Semiconductors Defects Congresses Semiconductors Design and construction Congresses Silicon Congresses Siliciumhalbleiter Gitterbaufehler Konferenzschrift 1999 San Francisco Calif. |
| volume_link | (DE-604)BV001899105 |
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