Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | German |
| Published: |
1999
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| Subjects: | |
| Physical Description: | 129 S. Ill., graph. Darst. |
Staff View
MARC
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| 502 | |a Berlin, Techn. Univ., Diss., 1999 | ||
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Record in the Search Index
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| any_adam_object | |
| author | Krupka, Kay 1967- |
| author_GND | (DE-588)121616983 |
| author_facet | Krupka, Kay 1967- |
| author_role | aut |
| author_sort | Krupka, Kay 1967- |
| author_variant | k k kk |
| building | Verbundindex |
| bvnumber | BV012878714 |
| classification_tum | MSR 345d |
| ctrlnum | (OCoLC)247747395 (DE-599)BVBBV012878714 |
| discipline | Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik |
| format | Thesis Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV012878714 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:35:21Z |
| institution | BVB |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008766478 |
| oclc_num | 247747395 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-29T DE-634 DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-29T DE-634 DE-83 |
| physical | 129 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| record_format | marc |
| spelling | Krupka, Kay 1967- Verfasser (DE-588)121616983 aut Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse vorgelegt von Kay Krupka 1999 129 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Berlin, Techn. Univ., Diss., 1999 Spannungsanalyse (DE-588)4055995-6 gnd rswk-swf Wafer (DE-588)4294605-0 gnd rswk-swf Bonden (DE-588)4232594-8 gnd rswk-swf Mikrosensor (DE-588)4561097-6 gnd rswk-swf Siliciumsensor (DE-588)4193160-9 gnd rswk-swf Halbleiterdrucksensor (DE-588)4158797-2 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Halbleiterdrucksensor (DE-588)4158797-2 s Spannungsanalyse (DE-588)4055995-6 s DE-604 Mikrosensor (DE-588)4561097-6 s Siliciumsensor (DE-588)4193160-9 s Wafer (DE-588)4294605-0 s Bonden (DE-588)4232594-8 s |
| spellingShingle | Krupka, Kay 1967- Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse Spannungsanalyse (DE-588)4055995-6 gnd Wafer (DE-588)4294605-0 gnd Bonden (DE-588)4232594-8 gnd Mikrosensor (DE-588)4561097-6 gnd Siliciumsensor (DE-588)4193160-9 gnd Halbleiterdrucksensor (DE-588)4158797-2 gnd |
| subject_GND | (DE-588)4055995-6 (DE-588)4294605-0 (DE-588)4232594-8 (DE-588)4561097-6 (DE-588)4193160-9 (DE-588)4158797-2 (DE-588)4113937-9 |
| title | Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse |
| title_auth | Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse |
| title_exact_search | Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse |
| title_full | Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse vorgelegt von Kay Krupka |
| title_fullStr | Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse vorgelegt von Kay Krupka |
| title_full_unstemmed | Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse vorgelegt von Kay Krupka |
| title_short | Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse |
| title_sort | piezoresistiver silicium streß mikrosensor zur spannungsanalyse |
| topic | Spannungsanalyse (DE-588)4055995-6 gnd Wafer (DE-588)4294605-0 gnd Bonden (DE-588)4232594-8 gnd Mikrosensor (DE-588)4561097-6 gnd Siliciumsensor (DE-588)4193160-9 gnd Halbleiterdrucksensor (DE-588)4158797-2 gnd |
| topic_facet | Spannungsanalyse Wafer Bonden Mikrosensor Siliciumsensor Halbleiterdrucksensor Hochschulschrift |
| work_keys_str_mv | AT krupkakay piezoresistiversiliciumstreßmikrosensorzurspannungsanalyse |