Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | German |
| Veröffentlicht: |
1999
|
| Schlagworte: | |
| Beschreibung: | 129 S. Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV012878714 | ||
| 003 | DE-604 | ||
| 005 | 20030304 | ||
| 007 | t | ||
| 008 | 991129s1999 ad|| m||| 00||| gerod | ||
| 035 | |a (OCoLC)247747395 | ||
| 035 | |a (DE-599)BVBBV012878714 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a ger | |
| 049 | |a DE-91 |a DE-29T |a DE-634 |a DE-83 | ||
| 084 | |a MSR 345d |2 stub | ||
| 100 | 1 | |a Krupka, Kay |d 1967- |e Verfasser |0 (DE-588)121616983 |4 aut | |
| 245 | 1 | 0 | |a Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse |c vorgelegt von Kay Krupka |
| 264 | 1 | |c 1999 | |
| 300 | |a 129 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 502 | |a Berlin, Techn. Univ., Diss., 1999 | ||
| 650 | 0 | 7 | |a Spannungsanalyse |0 (DE-588)4055995-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Wafer |0 (DE-588)4294605-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Bonden |0 (DE-588)4232594-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrosensor |0 (DE-588)4561097-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Siliciumsensor |0 (DE-588)4193160-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiterdrucksensor |0 (DE-588)4158797-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleiterdrucksensor |0 (DE-588)4158797-2 |D s |
| 689 | 0 | 1 | |a Spannungsanalyse |0 (DE-588)4055995-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Mikrosensor |0 (DE-588)4561097-6 |D s |
| 689 | 1 | 1 | |a Halbleiterdrucksensor |0 (DE-588)4158797-2 |D s |
| 689 | 1 | 2 | |a Siliciumsensor |0 (DE-588)4193160-9 |D s |
| 689 | 1 | 3 | |a Wafer |0 (DE-588)4294605-0 |D s |
| 689 | 1 | 4 | |a Bonden |0 (DE-588)4232594-8 |D s |
| 689 | 1 | 5 | |a Spannungsanalyse |0 (DE-588)4055995-6 |D s |
| 689 | 1 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008766478 | ||
Datensatz im Suchindex
| _version_ | 1804127564755632128 |
|---|---|
| any_adam_object | |
| author | Krupka, Kay 1967- |
| author_GND | (DE-588)121616983 |
| author_facet | Krupka, Kay 1967- |
| author_role | aut |
| author_sort | Krupka, Kay 1967- |
| author_variant | k k kk |
| building | Verbundindex |
| bvnumber | BV012878714 |
| classification_tum | MSR 345d |
| ctrlnum | (OCoLC)247747395 (DE-599)BVBBV012878714 |
| discipline | Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01717nam a2200469 c 4500</leader><controlfield tag="001">BV012878714</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20030304 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">991129s1999 ad|| m||| 00||| gerod</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)247747395</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV012878714</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">ger</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-634</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">MSR 345d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Krupka, Kay</subfield><subfield code="d">1967-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)121616983</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse</subfield><subfield code="c">vorgelegt von Kay Krupka</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1999</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">129 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Berlin, Techn. Univ., Diss., 1999</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Spannungsanalyse</subfield><subfield code="0">(DE-588)4055995-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Wafer</subfield><subfield code="0">(DE-588)4294605-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Bonden</subfield><subfield code="0">(DE-588)4232594-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosensor</subfield><subfield code="0">(DE-588)4561097-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Siliciumsensor</subfield><subfield code="0">(DE-588)4193160-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiterdrucksensor</subfield><subfield code="0">(DE-588)4158797-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiterdrucksensor</subfield><subfield code="0">(DE-588)4158797-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Spannungsanalyse</subfield><subfield code="0">(DE-588)4055995-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Mikrosensor</subfield><subfield code="0">(DE-588)4561097-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Halbleiterdrucksensor</subfield><subfield code="0">(DE-588)4158797-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="2"><subfield code="a">Siliciumsensor</subfield><subfield code="0">(DE-588)4193160-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="3"><subfield code="a">Wafer</subfield><subfield code="0">(DE-588)4294605-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="4"><subfield code="a">Bonden</subfield><subfield code="0">(DE-588)4232594-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="5"><subfield code="a">Spannungsanalyse</subfield><subfield code="0">(DE-588)4055995-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008766478</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV012878714 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:35:21Z |
| institution | BVB |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008766478 |
| oclc_num | 247747395 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-29T DE-634 DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-29T DE-634 DE-83 |
| physical | 129 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| record_format | marc |
| spelling | Krupka, Kay 1967- Verfasser (DE-588)121616983 aut Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse vorgelegt von Kay Krupka 1999 129 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Berlin, Techn. Univ., Diss., 1999 Spannungsanalyse (DE-588)4055995-6 gnd rswk-swf Wafer (DE-588)4294605-0 gnd rswk-swf Bonden (DE-588)4232594-8 gnd rswk-swf Mikrosensor (DE-588)4561097-6 gnd rswk-swf Siliciumsensor (DE-588)4193160-9 gnd rswk-swf Halbleiterdrucksensor (DE-588)4158797-2 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Halbleiterdrucksensor (DE-588)4158797-2 s Spannungsanalyse (DE-588)4055995-6 s DE-604 Mikrosensor (DE-588)4561097-6 s Siliciumsensor (DE-588)4193160-9 s Wafer (DE-588)4294605-0 s Bonden (DE-588)4232594-8 s |
| spellingShingle | Krupka, Kay 1967- Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse Spannungsanalyse (DE-588)4055995-6 gnd Wafer (DE-588)4294605-0 gnd Bonden (DE-588)4232594-8 gnd Mikrosensor (DE-588)4561097-6 gnd Siliciumsensor (DE-588)4193160-9 gnd Halbleiterdrucksensor (DE-588)4158797-2 gnd |
| subject_GND | (DE-588)4055995-6 (DE-588)4294605-0 (DE-588)4232594-8 (DE-588)4561097-6 (DE-588)4193160-9 (DE-588)4158797-2 (DE-588)4113937-9 |
| title | Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse |
| title_auth | Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse |
| title_exact_search | Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse |
| title_full | Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse vorgelegt von Kay Krupka |
| title_fullStr | Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse vorgelegt von Kay Krupka |
| title_full_unstemmed | Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse vorgelegt von Kay Krupka |
| title_short | Piezoresistiver Silicium-Streß-Mikrosensor zur Spannungsanalyse |
| title_sort | piezoresistiver silicium streß mikrosensor zur spannungsanalyse |
| topic | Spannungsanalyse (DE-588)4055995-6 gnd Wafer (DE-588)4294605-0 gnd Bonden (DE-588)4232594-8 gnd Mikrosensor (DE-588)4561097-6 gnd Siliciumsensor (DE-588)4193160-9 gnd Halbleiterdrucksensor (DE-588)4158797-2 gnd |
| topic_facet | Spannungsanalyse Wafer Bonden Mikrosensor Siliciumsensor Halbleiterdrucksensor Hochschulschrift |
| work_keys_str_mv | AT krupkakay piezoresistiversiliciumstreßmikrosensorzurspannungsanalyse |