(1998). Flatness, roughness and discrete defects characterization for computer disks, wafers and flat panel displays II: 29 - 30 January 1998, San Jose, California. SPIE.
Chicago-Zitierstil (17. Ausg.)Flatness, Roughness and Discrete Defects Characterization for Computer Disks, Wafers and Flat Panel Displays II: 29 - 30 January 1998, San Jose, California. Bellingham, Wash: SPIE, 1998.
MLA-Zitierstil (9. Ausg.)Flatness, Roughness and Discrete Defects Characterization for Computer Disks, Wafers and Flat Panel Displays II: 29 - 30 January 1998, San Jose, California. SPIE, 1998.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.