Flatness, roughness and discrete defects characterization for computer disks, wafers and flat panel displays II: 29 - 30 January 1998, San Jose, California
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1998
|
| Schriftenreihe: | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE
3275 |
| Schlagworte: | |
| Beschreibung: | VII, 186 S. Ill., graph. Darst. |
| ISBN: | 0819427144 |
Internformat
MARC
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| 245 | 1 | 0 | |a Flatness, roughness and discrete defects characterization for computer disks, wafers and flat panel displays II |b 29 - 30 January 1998, San Jose, California |c John C. Stover ed. |
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| id | DE-604.BV012788591 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:33:42Z |
| institution | BVB |
| isbn | 0819427144 |
| language | English |
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| physical | VII, 186 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | SPIE |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| spelling | Flatness, roughness and discrete defects characterization for computer disks, wafers and flat panel displays II 29 - 30 January 1998, San Jose, California John C. Stover ed. Bellingham, Wash. SPIE 1998 VII, 186 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 3275 Flatness measurement Congresses Semiconductor wafers Measurement Congresses Surface roughness Measurement Congresses (DE-588)1071861417 Konferenzschrift gnd-content Stover, John C. Sonstige oth Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 3275 (DE-604)BV000010887 3275 |
| spellingShingle | Flatness, roughness and discrete defects characterization for computer disks, wafers and flat panel displays II 29 - 30 January 1998, San Jose, California Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE Flatness measurement Congresses Semiconductor wafers Measurement Congresses Surface roughness Measurement Congresses |
| subject_GND | (DE-588)1071861417 |
| title | Flatness, roughness and discrete defects characterization for computer disks, wafers and flat panel displays II 29 - 30 January 1998, San Jose, California |
| title_auth | Flatness, roughness and discrete defects characterization for computer disks, wafers and flat panel displays II 29 - 30 January 1998, San Jose, California |
| title_exact_search | Flatness, roughness and discrete defects characterization for computer disks, wafers and flat panel displays II 29 - 30 January 1998, San Jose, California |
| title_full | Flatness, roughness and discrete defects characterization for computer disks, wafers and flat panel displays II 29 - 30 January 1998, San Jose, California John C. Stover ed. |
| title_fullStr | Flatness, roughness and discrete defects characterization for computer disks, wafers and flat panel displays II 29 - 30 January 1998, San Jose, California John C. Stover ed. |
| title_full_unstemmed | Flatness, roughness and discrete defects characterization for computer disks, wafers and flat panel displays II 29 - 30 January 1998, San Jose, California John C. Stover ed. |
| title_short | Flatness, roughness and discrete defects characterization for computer disks, wafers and flat panel displays II |
| title_sort | flatness roughness and discrete defects characterization for computer disks wafers and flat panel displays ii 29 30 january 1998 san jose california |
| title_sub | 29 - 30 January 1998, San Jose, California |
| topic | Flatness measurement Congresses Semiconductor wafers Measurement Congresses Surface roughness Measurement Congresses |
| topic_facet | Flatness measurement Congresses Semiconductor wafers Measurement Congresses Surface roughness Measurement Congresses Konferenzschrift |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT stoverjohnc flatnessroughnessanddiscretedefectscharacterizationforcomputerdiskswafersandflatpaneldisplaysii2930january1998sanjosecalifornia |