Stress induced phenomena in metallization: fourth international workshop, Tokyo, Japan, June 1997
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Woodbury, NY
AIP, American Inst. of Physics
1998
|
| Schriftenreihe: | American Institute of Physics <New York, NY>: AIP conference proceedings
418 |
| Schlagworte: | |
| Beschreibung: | IX, 519 S. Ill., graph. Darst. |
| ISBN: | 1563966824 |
Internformat
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| genre_facet | Konferenzschrift 1997 Tokio |
| id | DE-604.BV012788484 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:33:42Z |
| institution | BVB |
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| isbn | 1563966824 |
| language | English |
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| physical | IX, 519 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | AIP, American Inst. of Physics |
| record_format | marc |
| series | American Institute of Physics <New York, NY>: AIP conference proceedings |
| series2 | American Institute of Physics <New York, NY>: AIP conference proceedings |
| spelling | Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997 eds.: Hidekazu Okabayashi ... Woodbury, NY AIP, American Inst. of Physics 1998 IX, 519 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier American Institute of Physics <New York, NY>: AIP conference proceedings 418 Elektromigration (DE-588)4296761-2 gnd rswk-swf Metallisieren (DE-588)4169599-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1997 Tokio gnd-content Metallisieren (DE-588)4169599-9 s Elektromigration (DE-588)4296761-2 s DE-604 Okabayashi, Hidekazu Sonstige oth International Workshop on Stress Induced Phenomena in Metallization 4 1997 Tokio Sonstige (DE-588)5330531-0 oth American Institute of Physics <New York, NY>: AIP conference proceedings 418 (DE-604)BV001899984 418 |
| spellingShingle | Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997 American Institute of Physics <New York, NY>: AIP conference proceedings Elektromigration (DE-588)4296761-2 gnd Metallisieren (DE-588)4169599-9 gnd |
| subject_GND | (DE-588)4296761-2 (DE-588)4169599-9 (DE-588)1071861417 |
| title | Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997 |
| title_auth | Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997 |
| title_exact_search | Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997 |
| title_full | Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997 eds.: Hidekazu Okabayashi ... |
| title_fullStr | Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997 eds.: Hidekazu Okabayashi ... |
| title_full_unstemmed | Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997 eds.: Hidekazu Okabayashi ... |
| title_short | Stress induced phenomena in metallization |
| title_sort | stress induced phenomena in metallization fourth international workshop tokyo japan june 1997 |
| title_sub | fourth international workshop, Tokyo, Japan, June 1997 |
| topic | Elektromigration (DE-588)4296761-2 gnd Metallisieren (DE-588)4169599-9 gnd |
| topic_facet | Elektromigration Metallisieren Konferenzschrift 1997 Tokio |
| volume_link | (DE-604)BV001899984 |
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