Ion implantation into semiconductors, oxides and ceramics: proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16 - 19 June 1998
Saved in:
| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
Amsterdam [u.a.]
Elsevier
1999
|
| Series: | European Materials Research Society: European Materials Research Society symposia proceedings
85 |
| Subjects: | |
| Item Description: | Aus: Nuclear instruments and methods / B ; 147,1/4 |
| Physical Description: | XIV, 442 S. Ill., graph. Darst. |
| ISBN: | 0080436137 |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV012769983 | ||
| 003 | DE-604 | ||
| 005 | 20000403 | ||
| 007 | t | ||
| 008 | 990920s1999 ad|| |||| 10||| eng d | ||
| 020 | |a 0080436137 |9 0-08-043613-7 | ||
| 035 | |a (OCoLC)41258763 | ||
| 035 | |a (DE-599)BVBBV012769983 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 | ||
| 050 | 0 | |a TK7871.85 | |
| 082 | 0 | |a 621.3815/2 |2 21 | |
| 084 | |a UP 3000 |0 (DE-625)146369: |2 rvk | ||
| 245 | 1 | 0 | |a Ion implantation into semiconductors, oxides and ceramics |b proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16 - 19 June 1998 |c ed. by J. K. N. Lindner ... |
| 264 | 1 | |a Amsterdam [u.a.] |b Elsevier |c 1999 | |
| 300 | |a XIV, 442 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a European Materials Research Society: European Materials Research Society symposia proceedings |v 85 | |
| 500 | |a Aus: Nuclear instruments and methods / B ; 147,1/4 | ||
| 650 | 4 | |a Ceramics - Congresses | |
| 650 | 4 | |a Oxides - Congresses | |
| 650 | 4 | |a Semiconductors - Congresses | |
| 650 | 4 | |a Ceramic materials |x Effect of radiation on |v Congresses | |
| 650 | 4 | |a Ion implantation |v Congresses | |
| 650 | 4 | |a Oxides |x Effect of radiation on |v Congresses | |
| 650 | 4 | |a Semiconductor doping |v Congresses | |
| 650 | 4 | |a Semiconductors |x Effect of radiation on |v Congresses | |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Keramik |0 (DE-588)4030270-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Oxide |0 (DE-588)4126202-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1998 |z Straßburg |2 gnd-content | |
| 689 | 0 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
| 689 | 0 | 1 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
| 689 | 1 | 1 | |a Oxide |0 (DE-588)4126202-5 |D s |
| 689 | 1 | |8 1\p |5 DE-604 | |
| 689 | 2 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
| 689 | 2 | 1 | |a Keramik |0 (DE-588)4030270-2 |D s |
| 689 | 2 | |8 2\p |5 DE-604 | |
| 700 | 1 | |a Lindner, Jörg K. N. |e Sonstige |4 oth | |
| 711 | 2 | |a Symposium Ion Implantation into Semiconductors, Oxides and Ceramics |d 1998 |c Straßburg |j Sonstige |0 (DE-588)3040199-9 |4 oth | |
| 830 | 0 | |a European Materials Research Society: European Materials Research Society symposia proceedings |v 85 |w (DE-604)BV004201591 |9 85 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008683884 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Record in the Search Index
| _version_ | 1804127438312046592 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV012769983 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UP 3000 |
| ctrlnum | (OCoLC)41258763 (DE-599)BVBBV012769983 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02763nam a2200625 cb4500</leader><controlfield tag="001">BV012769983</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20000403 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">990920s1999 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0080436137</subfield><subfield code="9">0-08-043613-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)41258763</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV012769983</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 3000</subfield><subfield code="0">(DE-625)146369:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Ion implantation into semiconductors, oxides and ceramics</subfield><subfield code="b">proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16 - 19 June 1998</subfield><subfield code="c">ed. by J. K. N. Lindner ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Amsterdam [u.a.]</subfield><subfield code="b">Elsevier</subfield><subfield code="c">1999</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XIV, 442 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">European Materials Research Society: European Materials Research Society symposia proceedings</subfield><subfield code="v">85</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Aus: Nuclear instruments and methods / B ; 147,1/4</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ceramics - Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Oxides - Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors - Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ceramic materials</subfield><subfield code="x">Effect of radiation on</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ion implantation</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Oxides</subfield><subfield code="x">Effect of radiation on</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductor doping</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Effect of radiation on</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Keramik</subfield><subfield code="0">(DE-588)4030270-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Oxide</subfield><subfield code="0">(DE-588)4126202-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1998</subfield><subfield code="z">Straßburg</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Oxide</subfield><subfield code="0">(DE-588)4126202-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="1"><subfield code="a">Keramik</subfield><subfield code="0">(DE-588)4030270-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="8">2\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Lindner, Jörg K. N.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">Symposium Ion Implantation into Semiconductors, Oxides and Ceramics</subfield><subfield code="d">1998</subfield><subfield code="c">Straßburg</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)3040199-9</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">European Materials Research Society: European Materials Research Society symposia proceedings</subfield><subfield code="v">85</subfield><subfield code="w">(DE-604)BV004201591</subfield><subfield code="9">85</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008683884</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1998 Straßburg gnd-content |
| genre_facet | Konferenzschrift 1998 Straßburg |
| id | DE-604.BV012769983 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:33:21Z |
| institution | BVB |
| institution_GND | (DE-588)3040199-9 |
| isbn | 0080436137 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008683884 |
| oclc_num | 41258763 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | XIV, 442 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Elsevier |
| record_format | marc |
| series | European Materials Research Society: European Materials Research Society symposia proceedings |
| series2 | European Materials Research Society: European Materials Research Society symposia proceedings |
| spelling | Ion implantation into semiconductors, oxides and ceramics proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16 - 19 June 1998 ed. by J. K. N. Lindner ... Amsterdam [u.a.] Elsevier 1999 XIV, 442 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier European Materials Research Society: European Materials Research Society symposia proceedings 85 Aus: Nuclear instruments and methods / B ; 147,1/4 Ceramics - Congresses Oxides - Congresses Semiconductors - Congresses Ceramic materials Effect of radiation on Congresses Ion implantation Congresses Oxides Effect of radiation on Congresses Semiconductor doping Congresses Semiconductors Effect of radiation on Congresses Halbleiter (DE-588)4022993-2 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Keramik (DE-588)4030270-2 gnd rswk-swf Oxide (DE-588)4126202-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1998 Straßburg gnd-content Ionenimplantation (DE-588)4027606-5 s Halbleiter (DE-588)4022993-2 s DE-604 Oxide (DE-588)4126202-5 s 1\p DE-604 Keramik (DE-588)4030270-2 s 2\p DE-604 Lindner, Jörg K. N. Sonstige oth Symposium Ion Implantation into Semiconductors, Oxides and Ceramics 1998 Straßburg Sonstige (DE-588)3040199-9 oth European Materials Research Society: European Materials Research Society symposia proceedings 85 (DE-604)BV004201591 85 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Ion implantation into semiconductors, oxides and ceramics proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16 - 19 June 1998 European Materials Research Society: European Materials Research Society symposia proceedings Ceramics - Congresses Oxides - Congresses Semiconductors - Congresses Ceramic materials Effect of radiation on Congresses Ion implantation Congresses Oxides Effect of radiation on Congresses Semiconductor doping Congresses Semiconductors Effect of radiation on Congresses Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd Keramik (DE-588)4030270-2 gnd Oxide (DE-588)4126202-5 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4027606-5 (DE-588)4030270-2 (DE-588)4126202-5 (DE-588)1071861417 |
| title | Ion implantation into semiconductors, oxides and ceramics proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16 - 19 June 1998 |
| title_auth | Ion implantation into semiconductors, oxides and ceramics proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16 - 19 June 1998 |
| title_exact_search | Ion implantation into semiconductors, oxides and ceramics proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16 - 19 June 1998 |
| title_full | Ion implantation into semiconductors, oxides and ceramics proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16 - 19 June 1998 ed. by J. K. N. Lindner ... |
| title_fullStr | Ion implantation into semiconductors, oxides and ceramics proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16 - 19 June 1998 ed. by J. K. N. Lindner ... |
| title_full_unstemmed | Ion implantation into semiconductors, oxides and ceramics proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16 - 19 June 1998 ed. by J. K. N. Lindner ... |
| title_short | Ion implantation into semiconductors, oxides and ceramics |
| title_sort | ion implantation into semiconductors oxides and ceramics proceedings of the e mrs 1998 spring meeting symposium j on ion implantation into semiconductors oxides and ceramics strasbourg france 16 19 june 1998 |
| title_sub | proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16 - 19 June 1998 |
| topic | Ceramics - Congresses Oxides - Congresses Semiconductors - Congresses Ceramic materials Effect of radiation on Congresses Ion implantation Congresses Oxides Effect of radiation on Congresses Semiconductor doping Congresses Semiconductors Effect of radiation on Congresses Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd Keramik (DE-588)4030270-2 gnd Oxide (DE-588)4126202-5 gnd |
| topic_facet | Ceramics - Congresses Oxides - Congresses Semiconductors - Congresses Ceramic materials Effect of radiation on Congresses Ion implantation Congresses Oxides Effect of radiation on Congresses Semiconductor doping Congresses Semiconductors Effect of radiation on Congresses Halbleiter Ionenimplantation Keramik Oxide Konferenzschrift 1998 Straßburg |
| volume_link | (DE-604)BV004201591 |
| work_keys_str_mv | AT lindnerjorgkn ionimplantationintosemiconductorsoxidesandceramicsproceedingsoftheemrs1998springmeetingsymposiumjonionimplantationintosemiconductorsoxidesandceramicsstrasbourgfrance1619june1998 AT symposiumionimplantationintosemiconductorsoxidesandceramicsstraßburg ionimplantationintosemiconductorsoxidesandceramicsproceedingsoftheemrs1998springmeetingsymposiumjonionimplantationintosemiconductorsoxidesandceramicsstrasbourgfrance1619june1998 |