Proceedings of the 3rd Seminar on Quantitative Microscopy: geometrical measurements in the micro- and nanometre range with far and near field methods, November 5th and 6th 1998, Lungby, Denmark
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | German |
| Veröffentlicht: |
Bremerhaven
Wirtschaftsverl. NW, Verl. für Neue Wiss.
1998
|
| Schriftenreihe: | Physikalisch-Technische Bundesanstalt <Braunschweig>: [PTB-Bericht / Abteilung Fertigungsmeßtechnik]
34 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben |
| Beschreibung: | 129 S. Ill., graph. Darst. |
| ISBN: | 3897012804 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV012737521 | ||
| 003 | DE-604 | ||
| 005 | 20000511 | ||
| 007 | t | ||
| 008 | 990824s1998 gw ad|| t||| 00||| ger d | ||
| 020 | |a 3897012804 |9 3-89701-280-4 | ||
| 035 | |a (OCoLC)246439990 | ||
| 035 | |a (DE-599)BVBBV012737521 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a ger | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-12 |a DE-703 | ||
| 084 | |a UH 6300 |0 (DE-625)159498: |2 rvk | ||
| 088 | |a PTB F 34 | ||
| 111 | 2 | |a Seminar on Quantitative Microscopy |n 3 |d 1998 |c Lyngby |j Verfasser |0 (DE-588)5324818-1 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the 3rd Seminar on Quantitative Microscopy |b geometrical measurements in the micro- and nanometre range with far and near field methods, November 5th and 6th 1998, Lungby, Denmark |c Physikalisch-Technische Bundesanstalt, Fertigungsmeßtechnik ; [Physikalisch-Technische Bundesanstalt]. By Klaus Hasche ... (ed.). [Hrsg.: Physikalisch-Technische Bundesanstalt Braunschweig und Berlin, Presse und Öffentlichkeitsarbeit] |
| 264 | 1 | |a Bremerhaven |b Wirtschaftsverl. NW, Verl. für Neue Wiss. |c 1998 | |
| 300 | |a 129 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Physikalisch-Technische Bundesanstalt <Braunschweig>: [PTB-Bericht / Abteilung Fertigungsmeßtechnik] |v 34 | |
| 500 | |a Literaturangaben | ||
| 650 | 0 | 7 | |a Quantitative Mikroskopie |0 (DE-588)4176606-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1998 |z Lyngby-Tårbaek |2 gnd-content | |
| 689 | 0 | 0 | |a Quantitative Mikroskopie |0 (DE-588)4176606-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Hasche, Klaus |e Sonstige |4 oth | |
| 710 | 2 | |a Physikalisch-Technische Bundesanstalt |b Abteilung Fertigungsmesstechnik |e Sonstige |0 (DE-588)2094023-3 |4 oth | |
| 810 | 2 | |a Abteilung Fertigungsmeßtechnik] |t Physikalisch-Technische Bundesanstalt <Braunschweig>: [PTB-Bericht |v 34 |w (DE-604)BV000628479 |9 34 | |
| 856 | 4 | 2 | |m GBV Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008661459&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008661459 | ||
Datensatz im Suchindex
| _version_ | 1804127405160267776 |
|---|---|
| adam_text | PHYSIKALISCH-TECHNISCHEBUNDESANSTALT FERTIGUNGSMEBTECHNIK PTB-BERICHT
F-34 PROCEEDINGS OF THE 3RD SEMINAR ON QUANTITATIVE MICROSCOPY
GEOMETRICAL MEASUREMENTS IN THE MICRO- AND NANOMETRE RANGE WITH FAR AND
NEAR FIELD METHODS, NOVEMBER 5TH AND 6TH 1998, LYNGBY, DENMARK BY KLAUS
HASCHE, WERNER MIRANDE AND GUNTER WILKENING (EDS.)
UNIVERSITATSBIBLIOTHBC HANNOVER TECHNISCHE FNFORMATIONSBIBLIOTHEK
PTB-F-34 BRAUNSCHWEIG, DEZEMBER 1998 ISSN 0179-0609 ISBN 3-89701-280-4
TABLE OF CONTENTS FOREWORD CONTRIBUTIONS INSTRUMENTATION ARBITRARY
PIEZO-MOVEMENT AS A SEQUENCE OF HYSTERESIS LOOPS 1 K. DIRSCHERL, J.
GARNAES, J.F. JORGENSEN, L. NIELSEN, M.P. SORENSEN CHARACTERISATION OF
OPTICAL AND UV GRATINGS BY MEANS OF SCANNING 7 TUNNELING MICROSCOPY AND
OPTICAL DIFFRACTOMETRY M. PISANI, G.B. PICOTTO THREE-WAVELENGTH
INTERFEROMETRIC DIFFRACTOMETRY: ACCURACY IN 12 MEASUREMENT OF SPACINGS
OF DIFFRACTION GRATINGS L.F. VITUSHKIN SURFACE METROLOGY IN THE RANGE 1
NM TO 200 MM 20 FT GOSCHKE, FT. TILLMANN, D. GRIGG, D. GOTTHARD THE FRT
MICROGLIDER - A POWERFUL TOOL FOR QUANTITATIVE MEASURE- 25 MENTS M.
MEYER, F. GITMANS, TH. FRIES FRT MARK III: A POWERFUL TOOL FOR
QUANTITATIVE SPM IMAGE ANALYSIS 28 J. KOGLIN, F. GITMANS, TH. FRIES
CHARACTERISATION AND CONTROL OF PIEZO DRIVEN SCANNING PROBE 31
TRANSLATION MECHANISMS K.R. KOOPS, FT. BANNING, J.M.T.A. ADRIAENS, W.L.
DE KONING, P.M.L.O. SCHOLTE, W.CR. HEERENS INTEGRATION OF ATOMIC FORCE
MICROSCOPE ON COORDINATE MEASURING 39 MACHINE N. KOFOD, H.N. HANSEN, L
DE CHIFFRE CALIBRATION METHODS TO RECOGNIZE ARTIFACTS OF AFM
MEASUREMENTS AS INSTRUMENTAL 46 ERRORS D. HUSER, TH. RINDER, H. ROTHE
INTERFEROMETRIC CALIBRATION PROCEDURES FOR XY CAPACITANCE SENSORS IN 55
SCANNING PROBE MICROSCOPE G.-S. PENG, L KOENDERS CALIBRATION OF A
METROLOGY AFM SCANNER USING AN INTERFEROMETER AND 61 TILTING DEVICE
TOGETHER WITH A LINEAR DISPLACEMENT STAGE MELI PROVING STEP HEIGHT AND
PITCH MEASUREMENTS USING THE CALIBRATED 68 OMIC FORCE MICROSCOPE KONING,
FT. DIXSON, J. FU, W. TSAI, T.B. RENEGAR, T. VORBURGER ECTROCHEMICAL
DEPOSITION THROUGH AND ELECTRON BEAM DEPOSITION ON 75 LAYER TEMPLATES: A
STEP TOWARDS CALIBRATION STANDARDS IN THE 10-NM NGE NEUBAUER, W. KAUTEK,
S. PENTZIEN, S. REETZ, M. SAHRE, T. SOLOMUN, FT. RNTNER, D. PUM, U.B.
SLEYTR {TERMINATION OF THE GEOMETRICAL DIMENSIONS OF QUANTUM DOTS AND 82
»ASUREMENT OF LATTICE DISTORTIONS ADE IMPARISON OF LINEWIDTH
MEASUREMENTS ON SI STRUCTURES PERFORMED 89 ATOMIC FORCE MICROSCOPY (AFM)
AND LOW VOLTAGE SCANNING JCTRON MICROSCOPY (SEM) AND ON MICROSTRUCTURES
MIRANDE, C. G. FRASE E OF TRANSFER STANDARDS FOR CALIBRATION OF SCANNING
PROBE 97 CROSCOPE SCALES: A CASE STUDY HAYCOCKS, M. STEDMAN EORETICAL
CONSIDERATION FOR A NEW TOLERANCE SYSTEM TO CHARACTERISE 103 ;HNICAL
SURFACES IN THE MICRO- AND NANOMETER SCALE WESTKAMPER, M. KRAUS
^PLICATION UGHNESS SCALING OF VERY THIN AU AND AUPD FILMS 105 DENASI, E
MONTICONE, G.B. PICOTTO, M. PISANI ARACTERIZATION OF ELECTROMECHANICAL
FILMS BY SPM 111 ELTONEN, M. PAAJANEN, J. LEKKALA TERMINATION OF THE
GEOMETRY OF MICROHARDNESS INDENTERS USING A 115 IBRATED SCANNING FORCE
MICROSCOPE THIELE, K. HASCHE, K. HERRMANN, FT. SEEMANN MPARISION OF AFM
AND OPTICAL METHODS AT MEASURING NANOMETRIC 123 LACE ROUGHNESS )HLIDAL,
D. FRANTA, M. OHLIDAL, M. VICAR, P. KLAPETEK
|
| any_adam_object | 1 |
| author_corporate | Seminar on Quantitative Microscopy Lyngby |
| author_corporate_role | aut |
| author_facet | Seminar on Quantitative Microscopy Lyngby |
| author_sort | Seminar on Quantitative Microscopy Lyngby |
| building | Verbundindex |
| bvnumber | BV012737521 |
| classification_rvk | UH 6300 |
| ctrlnum | (OCoLC)246439990 (DE-599)BVBBV012737521 |
| discipline | Physik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02237nam a2200409 cb4500</leader><controlfield tag="001">BV012737521</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20000511 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">990824s1998 gw ad|| t||| 00||| ger d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3897012804</subfield><subfield code="9">3-89701-280-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)246439990</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV012737521</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">ger</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-12</subfield><subfield code="a">DE-703</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 6300</subfield><subfield code="0">(DE-625)159498:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="088" ind1=" " ind2=" "><subfield code="a">PTB F 34</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">Seminar on Quantitative Microscopy</subfield><subfield code="n">3</subfield><subfield code="d">1998</subfield><subfield code="c">Lyngby</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5324818-1</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Proceedings of the 3rd Seminar on Quantitative Microscopy</subfield><subfield code="b">geometrical measurements in the micro- and nanometre range with far and near field methods, November 5th and 6th 1998, Lungby, Denmark</subfield><subfield code="c">Physikalisch-Technische Bundesanstalt, Fertigungsmeßtechnik ; [Physikalisch-Technische Bundesanstalt]. By Klaus Hasche ... (ed.). [Hrsg.: Physikalisch-Technische Bundesanstalt Braunschweig und Berlin, Presse und Öffentlichkeitsarbeit]</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bremerhaven</subfield><subfield code="b">Wirtschaftsverl. NW, Verl. für Neue Wiss.</subfield><subfield code="c">1998</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">129 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Physikalisch-Technische Bundesanstalt <Braunschweig>: [PTB-Bericht / Abteilung Fertigungsmeßtechnik]</subfield><subfield code="v">34</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Quantitative Mikroskopie</subfield><subfield code="0">(DE-588)4176606-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1998</subfield><subfield code="z">Lyngby-Tårbaek</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Quantitative Mikroskopie</subfield><subfield code="0">(DE-588)4176606-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hasche, Klaus</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">Physikalisch-Technische Bundesanstalt</subfield><subfield code="b">Abteilung Fertigungsmesstechnik</subfield><subfield code="e">Sonstige</subfield><subfield code="0">(DE-588)2094023-3</subfield><subfield code="4">oth</subfield></datafield><datafield tag="810" ind1="2" ind2=" "><subfield code="a">Abteilung Fertigungsmeßtechnik]</subfield><subfield code="t">Physikalisch-Technische Bundesanstalt <Braunschweig>: [PTB-Bericht</subfield><subfield code="v">34</subfield><subfield code="w">(DE-604)BV000628479</subfield><subfield code="9">34</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">GBV Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008661459&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008661459</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1998 Lyngby-Tårbaek gnd-content |
| genre_facet | Konferenzschrift 1998 Lyngby-Tårbaek |
| id | DE-604.BV012737521 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:32:49Z |
| institution | BVB |
| institution_GND | (DE-588)5324818-1 (DE-588)2094023-3 |
| isbn | 3897012804 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008661459 |
| oclc_num | 246439990 |
| open_access_boolean | |
| owner | DE-12 DE-703 |
| owner_facet | DE-12 DE-703 |
| physical | 129 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Wirtschaftsverl. NW, Verl. für Neue Wiss. |
| record_format | marc |
| series2 | Physikalisch-Technische Bundesanstalt <Braunschweig>: [PTB-Bericht / Abteilung Fertigungsmeßtechnik] |
| spelling | Seminar on Quantitative Microscopy 3 1998 Lyngby Verfasser (DE-588)5324818-1 aut Proceedings of the 3rd Seminar on Quantitative Microscopy geometrical measurements in the micro- and nanometre range with far and near field methods, November 5th and 6th 1998, Lungby, Denmark Physikalisch-Technische Bundesanstalt, Fertigungsmeßtechnik ; [Physikalisch-Technische Bundesanstalt]. By Klaus Hasche ... (ed.). [Hrsg.: Physikalisch-Technische Bundesanstalt Braunschweig und Berlin, Presse und Öffentlichkeitsarbeit] Bremerhaven Wirtschaftsverl. NW, Verl. für Neue Wiss. 1998 129 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Physikalisch-Technische Bundesanstalt <Braunschweig>: [PTB-Bericht / Abteilung Fertigungsmeßtechnik] 34 Literaturangaben Quantitative Mikroskopie (DE-588)4176606-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1998 Lyngby-Tårbaek gnd-content Quantitative Mikroskopie (DE-588)4176606-4 s DE-604 Hasche, Klaus Sonstige oth Physikalisch-Technische Bundesanstalt Abteilung Fertigungsmesstechnik Sonstige (DE-588)2094023-3 oth Abteilung Fertigungsmeßtechnik] Physikalisch-Technische Bundesanstalt <Braunschweig>: [PTB-Bericht 34 (DE-604)BV000628479 34 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008661459&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Proceedings of the 3rd Seminar on Quantitative Microscopy geometrical measurements in the micro- and nanometre range with far and near field methods, November 5th and 6th 1998, Lungby, Denmark Quantitative Mikroskopie (DE-588)4176606-4 gnd |
| subject_GND | (DE-588)4176606-4 (DE-588)1071861417 |
| title | Proceedings of the 3rd Seminar on Quantitative Microscopy geometrical measurements in the micro- and nanometre range with far and near field methods, November 5th and 6th 1998, Lungby, Denmark |
| title_auth | Proceedings of the 3rd Seminar on Quantitative Microscopy geometrical measurements in the micro- and nanometre range with far and near field methods, November 5th and 6th 1998, Lungby, Denmark |
| title_exact_search | Proceedings of the 3rd Seminar on Quantitative Microscopy geometrical measurements in the micro- and nanometre range with far and near field methods, November 5th and 6th 1998, Lungby, Denmark |
| title_full | Proceedings of the 3rd Seminar on Quantitative Microscopy geometrical measurements in the micro- and nanometre range with far and near field methods, November 5th and 6th 1998, Lungby, Denmark Physikalisch-Technische Bundesanstalt, Fertigungsmeßtechnik ; [Physikalisch-Technische Bundesanstalt]. By Klaus Hasche ... (ed.). [Hrsg.: Physikalisch-Technische Bundesanstalt Braunschweig und Berlin, Presse und Öffentlichkeitsarbeit] |
| title_fullStr | Proceedings of the 3rd Seminar on Quantitative Microscopy geometrical measurements in the micro- and nanometre range with far and near field methods, November 5th and 6th 1998, Lungby, Denmark Physikalisch-Technische Bundesanstalt, Fertigungsmeßtechnik ; [Physikalisch-Technische Bundesanstalt]. By Klaus Hasche ... (ed.). [Hrsg.: Physikalisch-Technische Bundesanstalt Braunschweig und Berlin, Presse und Öffentlichkeitsarbeit] |
| title_full_unstemmed | Proceedings of the 3rd Seminar on Quantitative Microscopy geometrical measurements in the micro- and nanometre range with far and near field methods, November 5th and 6th 1998, Lungby, Denmark Physikalisch-Technische Bundesanstalt, Fertigungsmeßtechnik ; [Physikalisch-Technische Bundesanstalt]. By Klaus Hasche ... (ed.). [Hrsg.: Physikalisch-Technische Bundesanstalt Braunschweig und Berlin, Presse und Öffentlichkeitsarbeit] |
| title_short | Proceedings of the 3rd Seminar on Quantitative Microscopy |
| title_sort | proceedings of the 3rd seminar on quantitative microscopy geometrical measurements in the micro and nanometre range with far and near field methods november 5th and 6th 1998 lungby denmark |
| title_sub | geometrical measurements in the micro- and nanometre range with far and near field methods, November 5th and 6th 1998, Lungby, Denmark |
| topic | Quantitative Mikroskopie (DE-588)4176606-4 gnd |
| topic_facet | Quantitative Mikroskopie Konferenzschrift 1998 Lyngby-Tårbaek |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008661459&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV000628479 |
| work_keys_str_mv | AT seminaronquantitativemicroscopylyngby proceedingsofthe3rdseminaronquantitativemicroscopygeometricalmeasurementsinthemicroandnanometrerangewithfarandnearfieldmethodsnovember5thand6th1998lungbydenmark AT hascheklaus proceedingsofthe3rdseminaronquantitativemicroscopygeometricalmeasurementsinthemicroandnanometrerangewithfarandnearfieldmethodsnovember5thand6th1998lungbydenmark AT physikalischtechnischebundesanstaltabteilungfertigungsmesstechnik proceedingsofthe3rdseminaronquantitativemicroscopygeometricalmeasurementsinthemicroandnanometrerangewithfarandnearfieldmethodsnovember5thand6th1998lungbydenmark |