Electron microscopy of semiconducting materials and ULSI devices: symposium held August 15 - 16, 1998, San Francisco, California, USA
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Warrendale, PA.
Materials Research Soc.
1998
|
| Series: | Materials Research Society: Materials Research Society symposia proceedings
523 |
| Subjects: | |
| Physical Description: | XI, 270 S. Ill., graph. Darst. |
| ISBN: | 1558994297 |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV012724373 | ||
| 003 | DE-604 | ||
| 005 | 20000628 | ||
| 007 | t | ||
| 008 | 990820s1998 ad|| |||| 10||| eng d | ||
| 020 | |a 1558994297 |9 1-55899-429-7 | ||
| 035 | |a (OCoLC)632889309 | ||
| 035 | |a (DE-599)BVBBV012724373 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 |a DE-384 |a DE-29T |a DE-83 |a DE-11 | ||
| 084 | |a UD 8400 |0 (DE-625)145545: |2 rvk | ||
| 084 | |a UH 6300 |0 (DE-625)159498: |2 rvk | ||
| 084 | |a UP 3100 |0 (DE-625)146372: |2 rvk | ||
| 084 | |a UQ 1100 |0 (DE-625)146473: |2 rvk | ||
| 245 | 1 | 0 | |a Electron microscopy of semiconducting materials and ULSI devices |b symposium held August 15 - 16, 1998, San Francisco, California, USA |c ed.: Clive Hayzelden ... |
| 264 | 1 | |a Warrendale, PA. |b Materials Research Soc. |c 1998 | |
| 300 | |a XI, 270 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings |v 523 | |
| 650 | 0 | 7 | |a ULSI |0 (DE-588)4226286-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiterwerkstoff |0 (DE-588)4158817-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Elektronenmikroskopie |0 (DE-588)4014327-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1998 |z San Francisco Calif. |2 gnd-content | |
| 689 | 0 | 0 | |a Elektronenmikroskopie |0 (DE-588)4014327-2 |D s |
| 689 | 0 | 1 | |a Halbleiterwerkstoff |0 (DE-588)4158817-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Elektronenmikroskopie |0 (DE-588)4014327-2 |D s |
| 689 | 1 | 1 | |a ULSI |0 (DE-588)4226286-0 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Hayzelden, Clive |e Sonstige |4 oth | |
| 830 | 0 | |a Materials Research Society: Materials Research Society symposia proceedings |v 523 |w (DE-604)BV001899105 |9 523 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008651013 | ||
Record in the Search Index
| _version_ | 1804127389538582528 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV012724373 |
| classification_rvk | UD 8400 UH 6300 UP 3100 UQ 1100 |
| ctrlnum | (OCoLC)632889309 (DE-599)BVBBV012724373 |
| discipline | Physik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01828nam a2200445 cb4500</leader><controlfield tag="001">BV012724373</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20000628 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">990820s1998 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1558994297</subfield><subfield code="9">1-55899-429-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)632889309</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV012724373</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-384</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-83</subfield><subfield code="a">DE-11</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UD 8400</subfield><subfield code="0">(DE-625)145545:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 6300</subfield><subfield code="0">(DE-625)159498:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 3100</subfield><subfield code="0">(DE-625)146372:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UQ 1100</subfield><subfield code="0">(DE-625)146473:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Electron microscopy of semiconducting materials and ULSI devices</subfield><subfield code="b">symposium held August 15 - 16, 1998, San Francisco, California, USA</subfield><subfield code="c">ed.: Clive Hayzelden ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Warrendale, PA.</subfield><subfield code="b">Materials Research Soc.</subfield><subfield code="c">1998</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XI, 270 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Materials Research Society: Materials Research Society symposia proceedings</subfield><subfield code="v">523</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">ULSI</subfield><subfield code="0">(DE-588)4226286-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiterwerkstoff</subfield><subfield code="0">(DE-588)4158817-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Elektronenmikroskopie</subfield><subfield code="0">(DE-588)4014327-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1998</subfield><subfield code="z">San Francisco Calif.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Elektronenmikroskopie</subfield><subfield code="0">(DE-588)4014327-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Halbleiterwerkstoff</subfield><subfield code="0">(DE-588)4158817-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Elektronenmikroskopie</subfield><subfield code="0">(DE-588)4014327-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">ULSI</subfield><subfield code="0">(DE-588)4226286-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hayzelden, Clive</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Materials Research Society: Materials Research Society symposia proceedings</subfield><subfield code="v">523</subfield><subfield code="w">(DE-604)BV001899105</subfield><subfield code="9">523</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008651013</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1998 San Francisco Calif. gnd-content |
| genre_facet | Konferenzschrift 1998 San Francisco Calif. |
| id | DE-604.BV012724373 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:32:34Z |
| institution | BVB |
| isbn | 1558994297 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008651013 |
| oclc_num | 632889309 |
| open_access_boolean | |
| owner | DE-703 DE-384 DE-29T DE-83 DE-11 |
| owner_facet | DE-703 DE-384 DE-29T DE-83 DE-11 |
| physical | XI, 270 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA ed.: Clive Hayzelden ... Warrendale, PA. Materials Research Soc. 1998 XI, 270 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 523 ULSI (DE-588)4226286-0 gnd rswk-swf Halbleiterwerkstoff (DE-588)4158817-4 gnd rswk-swf Elektronenmikroskopie (DE-588)4014327-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1998 San Francisco Calif. gnd-content Elektronenmikroskopie (DE-588)4014327-2 s Halbleiterwerkstoff (DE-588)4158817-4 s DE-604 ULSI (DE-588)4226286-0 s Hayzelden, Clive Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 523 (DE-604)BV001899105 523 |
| spellingShingle | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA Materials Research Society: Materials Research Society symposia proceedings ULSI (DE-588)4226286-0 gnd Halbleiterwerkstoff (DE-588)4158817-4 gnd Elektronenmikroskopie (DE-588)4014327-2 gnd |
| subject_GND | (DE-588)4226286-0 (DE-588)4158817-4 (DE-588)4014327-2 (DE-588)1071861417 |
| title | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA |
| title_auth | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA |
| title_exact_search | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA |
| title_full | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA ed.: Clive Hayzelden ... |
| title_fullStr | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA ed.: Clive Hayzelden ... |
| title_full_unstemmed | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA ed.: Clive Hayzelden ... |
| title_short | Electron microscopy of semiconducting materials and ULSI devices |
| title_sort | electron microscopy of semiconducting materials and ulsi devices symposium held august 15 16 1998 san francisco california usa |
| title_sub | symposium held August 15 - 16, 1998, San Francisco, California, USA |
| topic | ULSI (DE-588)4226286-0 gnd Halbleiterwerkstoff (DE-588)4158817-4 gnd Elektronenmikroskopie (DE-588)4014327-2 gnd |
| topic_facet | ULSI Halbleiterwerkstoff Elektronenmikroskopie Konferenzschrift 1998 San Francisco Calif. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT hayzeldenclive electronmicroscopyofsemiconductingmaterialsandulsidevicessymposiumheldaugust15161998sanfranciscocaliforniausa |