Electron microscopy of semiconducting materials and ULSI devices: symposium held August 15 - 16, 1998, San Francisco, California, USA
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Warrendale, PA.
Materials Research Soc.
1998
|
| Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings
523 |
| Schlagworte: | |
| Beschreibung: | XI, 270 S. Ill., graph. Darst. |
| ISBN: | 1558994297 |
Internformat
MARC
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Datensatz im Suchindex
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| discipline | Physik |
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| genre | (DE-588)1071861417 Konferenzschrift 1998 San Francisco Calif. gnd-content |
| genre_facet | Konferenzschrift 1998 San Francisco Calif. |
| id | DE-604.BV012724373 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:32:34Z |
| institution | BVB |
| isbn | 1558994297 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008651013 |
| oclc_num | 632889309 |
| open_access_boolean | |
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| owner_facet | DE-703 DE-384 DE-29T DE-83 DE-11 |
| physical | XI, 270 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA ed.: Clive Hayzelden ... Warrendale, PA. Materials Research Soc. 1998 XI, 270 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 523 ULSI (DE-588)4226286-0 gnd rswk-swf Halbleiterwerkstoff (DE-588)4158817-4 gnd rswk-swf Elektronenmikroskopie (DE-588)4014327-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1998 San Francisco Calif. gnd-content Elektronenmikroskopie (DE-588)4014327-2 s Halbleiterwerkstoff (DE-588)4158817-4 s DE-604 ULSI (DE-588)4226286-0 s Hayzelden, Clive Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 523 (DE-604)BV001899105 523 |
| spellingShingle | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA Materials Research Society: Materials Research Society symposia proceedings ULSI (DE-588)4226286-0 gnd Halbleiterwerkstoff (DE-588)4158817-4 gnd Elektronenmikroskopie (DE-588)4014327-2 gnd |
| subject_GND | (DE-588)4226286-0 (DE-588)4158817-4 (DE-588)4014327-2 (DE-588)1071861417 |
| title | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA |
| title_auth | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA |
| title_exact_search | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA |
| title_full | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA ed.: Clive Hayzelden ... |
| title_fullStr | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA ed.: Clive Hayzelden ... |
| title_full_unstemmed | Electron microscopy of semiconducting materials and ULSI devices symposium held August 15 - 16, 1998, San Francisco, California, USA ed.: Clive Hayzelden ... |
| title_short | Electron microscopy of semiconducting materials and ULSI devices |
| title_sort | electron microscopy of semiconducting materials and ulsi devices symposium held august 15 16 1998 san francisco california usa |
| title_sub | symposium held August 15 - 16, 1998, San Francisco, California, USA |
| topic | ULSI (DE-588)4226286-0 gnd Halbleiterwerkstoff (DE-588)4158817-4 gnd Elektronenmikroskopie (DE-588)4014327-2 gnd |
| topic_facet | ULSI Halbleiterwerkstoff Elektronenmikroskopie Konferenzschrift 1998 San Francisco Calif. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT hayzeldenclive electronmicroscopyofsemiconductingmaterialsandulsidevicessymposiumheldaugust15161998sanfranciscocaliforniausa |