APA (7th ed.) Citation

(1998). Electron microscopy of semiconducting materials and ULSI devices: Symposium held August 15 - 16, 1998, San Francisco, California, USA. Materials Research Soc.

Chicago Style (17th ed.) Citation

Electron Microscopy of Semiconducting Materials and ULSI Devices: Symposium Held August 15 - 16, 1998, San Francisco, California, USA. Warrendale, PA: Materials Research Soc, 1998.

MLA (9th ed.) Citation

Electron Microscopy of Semiconducting Materials and ULSI Devices: Symposium Held August 15 - 16, 1998, San Francisco, California, USA. Materials Research Soc, 1998.