(1998). Electron microscopy of semiconducting materials and ULSI devices: Symposium held August 15 - 16, 1998, San Francisco, California, USA. Materials Research Soc.
Chicago-Zitierstil (17. Ausg.)Electron Microscopy of Semiconducting Materials and ULSI Devices: Symposium Held August 15 - 16, 1998, San Francisco, California, USA. Warrendale, PA: Materials Research Soc, 1998.
MLA-Zitierstil (9. Ausg.)Electron Microscopy of Semiconducting Materials and ULSI Devices: Symposium Held August 15 - 16, 1998, San Francisco, California, USA. Materials Research Soc, 1998.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.