Diagnostic techniques for semiconductor materials processing: symposium held November 29 - December 2, 1993, Boston, Massachusetts, U.S.A.
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Pittsburgh, Pa.
Materials Research Soc.
1994
|
| Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings
324 |
| Schlagworte: | |
| Beschreibung: | XV, 505 S. Ill., graph. Darst. |
| ISBN: | 1558992235 |
Internformat
MARC
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| 245 | 1 | 0 | |a Diagnostic techniques for semiconductor materials processing |b symposium held November 29 - December 2, 1993, Boston, Massachusetts, U.S.A. |c ed.: O. J. Glembocki ... |
| 264 | 1 | |a Pittsburgh, Pa. |b Materials Research Soc. |c 1994 | |
| 300 | |a XV, 505 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings |v 324 | |
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| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1993 |z Boston Mass. |2 gnd-content | |
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Datensatz im Suchindex
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| author2 | Glembocki, Orest J. |
| author2_role | edt |
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| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UD 8400 |
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| dewey-raw | 621.3815/2/0287 |
| dewey-search | 621.3815/2/0287 |
| dewey-sort | 3621.3815 12 3287 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre_facet | Konferenzschrift 1993 Boston Mass. |
| id | DE-604.BV012719651 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:32:29Z |
| institution | BVB |
| institution_GND | (DE-588)5126201-0 |
| isbn | 1558992235 |
| language | English |
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| physical | XV, 505 S. Ill., graph. Darst. |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | Materials Research Soc. |
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| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Diagnostic techniques for semiconductor materials processing symposium held November 29 - December 2, 1993, Boston, Massachusetts, U.S.A. ed.: O. J. Glembocki ... Pittsburgh, Pa. Materials Research Soc. 1994 XV, 505 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 324 Semiconductors Testing Congresses Prüfprogramm (DE-588)4268583-7 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1993 Boston Mass. gnd-content Halbleitertechnologie (DE-588)4158814-9 s Prüfprogramm (DE-588)4268583-7 s DE-604 Glembocki, Orest J. edt Symposium on Diagnostic Techniques for Semiconductor Materials Processing 1 1993 Boston, Mass. Sonstige (DE-588)5126201-0 oth Materials Research Society: Materials Research Society symposia proceedings 324 (DE-604)BV001899105 324 |
| spellingShingle | Diagnostic techniques for semiconductor materials processing symposium held November 29 - December 2, 1993, Boston, Massachusetts, U.S.A. Materials Research Society: Materials Research Society symposia proceedings Semiconductors Testing Congresses Prüfprogramm (DE-588)4268583-7 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4268583-7 (DE-588)4158814-9 (DE-588)1071861417 |
| title | Diagnostic techniques for semiconductor materials processing symposium held November 29 - December 2, 1993, Boston, Massachusetts, U.S.A. |
| title_auth | Diagnostic techniques for semiconductor materials processing symposium held November 29 - December 2, 1993, Boston, Massachusetts, U.S.A. |
| title_exact_search | Diagnostic techniques for semiconductor materials processing symposium held November 29 - December 2, 1993, Boston, Massachusetts, U.S.A. |
| title_full | Diagnostic techniques for semiconductor materials processing symposium held November 29 - December 2, 1993, Boston, Massachusetts, U.S.A. ed.: O. J. Glembocki ... |
| title_fullStr | Diagnostic techniques for semiconductor materials processing symposium held November 29 - December 2, 1993, Boston, Massachusetts, U.S.A. ed.: O. J. Glembocki ... |
| title_full_unstemmed | Diagnostic techniques for semiconductor materials processing symposium held November 29 - December 2, 1993, Boston, Massachusetts, U.S.A. ed.: O. J. Glembocki ... |
| title_short | Diagnostic techniques for semiconductor materials processing |
| title_sort | diagnostic techniques for semiconductor materials processing symposium held november 29 december 2 1993 boston massachusetts u s a |
| title_sub | symposium held November 29 - December 2, 1993, Boston, Massachusetts, U.S.A. |
| topic | Semiconductors Testing Congresses Prüfprogramm (DE-588)4268583-7 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Semiconductors Testing Congresses Prüfprogramm Halbleitertechnologie Konferenzschrift 1993 Boston Mass. |
| volume_link | (DE-604)BV001899105 |
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