Experiments and modeling of thin film processes:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
Uppsala
Acta Universitatis Upsaliensis
1999
|
| Series: | Uppsala Universitet: [Acta Universitatis Upsaliensis / Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology]
445 |
| Subjects: | |
| Physical Description: | 47 S. Ill., graph. Darst. |
| ISBN: | 9155444423 |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV012713296 | ||
| 003 | DE-604 | ||
| 005 | 20010215 | ||
| 007 | t | ||
| 008 | 990812s1999 ad|| m||| 00||| eng d | ||
| 020 | |a 9155444423 |9 91-554-4442-3 | ||
| 035 | |a (OCoLC)58808763 | ||
| 035 | |a (DE-599)BVBBV012713296 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-29 |a DE-188 | ||
| 082 | 0 | |a 505 |b A188, U58x, no. 445 | |
| 084 | |a UP 7570 |0 (DE-625)146436: |2 rvk | ||
| 084 | |a ZN 3460 |0 (DE-625)157317: |2 rvk | ||
| 100 | 1 | |a Jonsson, Lars B. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Experiments and modeling of thin film processes |c by Lars B. Jonsson |
| 264 | 1 | |a Uppsala |b Acta Universitatis Upsaliensis |c 1999 | |
| 300 | |a 47 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Uppsala Universitet: [Acta Universitatis Upsaliensis / Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology] |v 445 | |
| 502 | |a Vollst. zugl.: Uppsala, Univ., Diss., 1999 | ||
| 650 | 4 | |a Thin films | |
| 650 | 0 | 7 | |a Ätzen |0 (DE-588)4000648-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiterschicht |0 (DE-588)4158812-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Sputtern |0 (DE-588)4182614-0 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleiterschicht |0 (DE-588)4158812-5 |D s |
| 689 | 0 | 1 | |a Ätzen |0 (DE-588)4000648-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Halbleiterschicht |0 (DE-588)4158812-5 |D s |
| 689 | 1 | 1 | |a Sputtern |0 (DE-588)4182614-0 |D s |
| 689 | 1 | |5 DE-604 | |
| 810 | 2 | |a Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology] |t Uppsala Universitet: [Acta Universitatis Upsaliensis |v 445 |w (DE-604)BV012713281 |9 445 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008642245 | ||
Record in the Search Index
| _version_ | 1804127376687235072 |
|---|---|
| any_adam_object | |
| author | Jonsson, Lars B. |
| author_facet | Jonsson, Lars B. |
| author_role | aut |
| author_sort | Jonsson, Lars B. |
| author_variant | l b j lb lbj |
| building | Verbundindex |
| bvnumber | BV012713296 |
| classification_rvk | UP 7570 ZN 3460 |
| ctrlnum | (OCoLC)58808763 (DE-599)BVBBV012713296 |
| dewey-full | 505 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 505 - Serial publications |
| dewey-raw | 505 |
| dewey-search | 505 |
| dewey-sort | 3505 |
| dewey-tens | 500 - Natural sciences and mathematics |
| discipline | Allgemeine Naturwissenschaft Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01827nam a2200457 cb4500</leader><controlfield tag="001">BV012713296</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20010215 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">990812s1999 ad|| m||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9155444423</subfield><subfield code="9">91-554-4442-3</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)58808763</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV012713296</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29</subfield><subfield code="a">DE-188</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">505</subfield><subfield code="b">A188, U58x, no. 445</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7570</subfield><subfield code="0">(DE-625)146436:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3460</subfield><subfield code="0">(DE-625)157317:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Jonsson, Lars B.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Experiments and modeling of thin film processes</subfield><subfield code="c">by Lars B. Jonsson</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Uppsala</subfield><subfield code="b">Acta Universitatis Upsaliensis</subfield><subfield code="c">1999</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">47 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Uppsala Universitet: [Acta Universitatis Upsaliensis / Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology]</subfield><subfield code="v">445</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Vollst. zugl.: Uppsala, Univ., Diss., 1999</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Thin films</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ätzen</subfield><subfield code="0">(DE-588)4000648-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiterschicht</subfield><subfield code="0">(DE-588)4158812-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiterschicht</subfield><subfield code="0">(DE-588)4158812-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Ätzen</subfield><subfield code="0">(DE-588)4000648-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Halbleiterschicht</subfield><subfield code="0">(DE-588)4158812-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="810" ind1="2" ind2=" "><subfield code="a">Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology]</subfield><subfield code="t">Uppsala Universitet: [Acta Universitatis Upsaliensis</subfield><subfield code="v">445</subfield><subfield code="w">(DE-604)BV012713281</subfield><subfield code="9">445</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008642245</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV012713296 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:32:22Z |
| institution | BVB |
| isbn | 9155444423 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008642245 |
| oclc_num | 58808763 |
| open_access_boolean | |
| owner | DE-29 DE-188 |
| owner_facet | DE-29 DE-188 |
| physical | 47 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Acta Universitatis Upsaliensis |
| record_format | marc |
| series2 | Uppsala Universitet: [Acta Universitatis Upsaliensis / Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology] |
| spelling | Jonsson, Lars B. Verfasser aut Experiments and modeling of thin film processes by Lars B. Jonsson Uppsala Acta Universitatis Upsaliensis 1999 47 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Uppsala Universitet: [Acta Universitatis Upsaliensis / Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology] 445 Vollst. zugl.: Uppsala, Univ., Diss., 1999 Thin films Ätzen (DE-588)4000648-7 gnd rswk-swf Halbleiterschicht (DE-588)4158812-5 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Halbleiterschicht (DE-588)4158812-5 s Ätzen (DE-588)4000648-7 s DE-604 Sputtern (DE-588)4182614-0 s Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology] Uppsala Universitet: [Acta Universitatis Upsaliensis 445 (DE-604)BV012713281 445 |
| spellingShingle | Jonsson, Lars B. Experiments and modeling of thin film processes Thin films Ätzen (DE-588)4000648-7 gnd Halbleiterschicht (DE-588)4158812-5 gnd Sputtern (DE-588)4182614-0 gnd |
| subject_GND | (DE-588)4000648-7 (DE-588)4158812-5 (DE-588)4182614-0 (DE-588)4113937-9 |
| title | Experiments and modeling of thin film processes |
| title_auth | Experiments and modeling of thin film processes |
| title_exact_search | Experiments and modeling of thin film processes |
| title_full | Experiments and modeling of thin film processes by Lars B. Jonsson |
| title_fullStr | Experiments and modeling of thin film processes by Lars B. Jonsson |
| title_full_unstemmed | Experiments and modeling of thin film processes by Lars B. Jonsson |
| title_short | Experiments and modeling of thin film processes |
| title_sort | experiments and modeling of thin film processes |
| topic | Thin films Ätzen (DE-588)4000648-7 gnd Halbleiterschicht (DE-588)4158812-5 gnd Sputtern (DE-588)4182614-0 gnd |
| topic_facet | Thin films Ätzen Halbleiterschicht Sputtern Hochschulschrift |
| volume_link | (DE-604)BV012713281 |
| work_keys_str_mv | AT jonssonlarsb experimentsandmodelingofthinfilmprocesses |