Experiments and modeling of thin film processes:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Uppsala
Acta Universitatis Upsaliensis
1999
|
| Schriftenreihe: | Uppsala Universitet: [Acta Universitatis Upsaliensis / Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology]
445 |
| Schlagworte: | |
| Beschreibung: | 47 S. Ill., graph. Darst. |
| ISBN: | 9155444423 |
Internformat
MARC
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| 100 | 1 | |a Jonsson, Lars B. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Experiments and modeling of thin film processes |c by Lars B. Jonsson |
| 264 | 1 | |a Uppsala |b Acta Universitatis Upsaliensis |c 1999 | |
| 300 | |a 47 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Uppsala Universitet: [Acta Universitatis Upsaliensis / Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology] |v 445 | |
| 502 | |a Vollst. zugl.: Uppsala, Univ., Diss., 1999 | ||
| 650 | 4 | |a Thin films | |
| 650 | 0 | 7 | |a Ätzen |0 (DE-588)4000648-7 |2 gnd |9 rswk-swf |
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| 650 | 0 | 7 | |a Sputtern |0 (DE-588)4182614-0 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
| _version_ | 1804127376687235072 |
|---|---|
| any_adam_object | |
| author | Jonsson, Lars B. |
| author_facet | Jonsson, Lars B. |
| author_role | aut |
| author_sort | Jonsson, Lars B. |
| author_variant | l b j lb lbj |
| building | Verbundindex |
| bvnumber | BV012713296 |
| classification_rvk | UP 7570 ZN 3460 |
| ctrlnum | (OCoLC)58808763 (DE-599)BVBBV012713296 |
| dewey-full | 505 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 505 - Serial publications |
| dewey-raw | 505 |
| dewey-search | 505 |
| dewey-sort | 3505 |
| dewey-tens | 500 - Natural sciences and mathematics |
| discipline | Allgemeine Naturwissenschaft Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Thesis Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV012713296 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:32:22Z |
| institution | BVB |
| isbn | 9155444423 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008642245 |
| oclc_num | 58808763 |
| open_access_boolean | |
| owner | DE-29 DE-188 |
| owner_facet | DE-29 DE-188 |
| physical | 47 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Acta Universitatis Upsaliensis |
| record_format | marc |
| series2 | Uppsala Universitet: [Acta Universitatis Upsaliensis / Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology] |
| spelling | Jonsson, Lars B. Verfasser aut Experiments and modeling of thin film processes by Lars B. Jonsson Uppsala Acta Universitatis Upsaliensis 1999 47 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Uppsala Universitet: [Acta Universitatis Upsaliensis / Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology] 445 Vollst. zugl.: Uppsala, Univ., Diss., 1999 Thin films Ätzen (DE-588)4000648-7 gnd rswk-swf Halbleiterschicht (DE-588)4158812-5 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Halbleiterschicht (DE-588)4158812-5 s Ätzen (DE-588)4000648-7 s DE-604 Sputtern (DE-588)4182614-0 s Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology] Uppsala Universitet: [Acta Universitatis Upsaliensis 445 (DE-604)BV012713281 445 |
| spellingShingle | Jonsson, Lars B. Experiments and modeling of thin film processes Thin films Ätzen (DE-588)4000648-7 gnd Halbleiterschicht (DE-588)4158812-5 gnd Sputtern (DE-588)4182614-0 gnd |
| subject_GND | (DE-588)4000648-7 (DE-588)4158812-5 (DE-588)4182614-0 (DE-588)4113937-9 |
| title | Experiments and modeling of thin film processes |
| title_auth | Experiments and modeling of thin film processes |
| title_exact_search | Experiments and modeling of thin film processes |
| title_full | Experiments and modeling of thin film processes by Lars B. Jonsson |
| title_fullStr | Experiments and modeling of thin film processes by Lars B. Jonsson |
| title_full_unstemmed | Experiments and modeling of thin film processes by Lars B. Jonsson |
| title_short | Experiments and modeling of thin film processes |
| title_sort | experiments and modeling of thin film processes |
| topic | Thin films Ätzen (DE-588)4000648-7 gnd Halbleiterschicht (DE-588)4158812-5 gnd Sputtern (DE-588)4182614-0 gnd |
| topic_facet | Thin films Ätzen Halbleiterschicht Sputtern Hochschulschrift |
| volume_link | (DE-604)BV012713281 |
| work_keys_str_mv | AT jonssonlarsb experimentsandmodelingofthinfilmprocesses |