14th International Vacuum Congress (IVC-14), 10th International Conference on Solid Surfaces (ICSS-10), 5th International Conference on Nanometre Scale Science and Technology (NANO-5), 10th International Conference on Quantitative Surface Analysis (QSA-10): 31 August - 4 September 1998, International Convention Centre, Birmingham, UK
Gespeichert in:
| Körperschaften: | , , |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Exeter
Elsevier
1999
|
| Schriftenreihe: | Vacuum
53 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-Bd. |
| Beschreibung: | 485 S. Ill., graph. Darst. |
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Datensatz im Suchindex
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| adam_text | VACUUM
SURFACE ENGINEERING. SURFACE INSTRUMENTATION
&
VACUUM TECHNOLOGY
Volume
53
number
1
2/May
1999
Contents
R
В
Jackman and
M
Petty
xi
Publisher s Announcement
xiii
Preface
AUTHORS
ARTICLES
PLASMA SCIENCE DIVISION
G Viera, J
Costa,
F J Compte,
E Garčia-Sanz, J L Andújar
and E
Bertrán
R Jothilingam, T Farrell,
T B
Joyce,
T J Bullough and
P J Goodhew
W
M Posadowski and A Brudnik
C
Molle. A Beauvois, M
Wautelet,
J P Dauchot and M Hecq
E
Kusano,
T Kobayashi, N Kashiwagi,
21
T
Saitoh,
S Saikí, H Nanto and A Kinbara
G G Bondarenko and V I Kristya
W
Chen,
T Hayashi, M Itoh, Y Morikawa,
29
K Sugita and T Uchida
M Kashiwagi and S
Ido
P K Petrov, E K
Hollmann,
V A Volpyas,
37
A V Volpyas, T Tanaka and K Kawabata
M Braic, C N Zoita, V
Braic, A Kiss,
41
M Popescu and G
Musa
G Beensh-Marchwicka, E Prociow
and
W
Posadowski
Accurate
electrical measurements for in situ diagnosis of RF
discharges in plasma CVD processes
7
Comparison of in situ optical reflectance and post-growth
characterisation of quantitative composition and thickness
determination of AI^Ga, xAs
11
Optical emission spectroscopy of self-sustained magnetron
sputtering
17
Characterization of an inductively amplified magnetron
plasma by glow discharge mass spectrometry
Ion energy distribution in ionized dc sputtering measured by
an energy-resolved mass spectrometer
25
Simulation of heavy ion energy distribution function in the
cathode sheath of noble gas mixture glow discharge
Application of magnetic neutral loop discharge plasma to SiO2
etching process
33
Computational analyses of a magnetron sputtering system
with a ferromagnetic target
Preparation of argon-free refractory thin films using RF-DC
coupled magnetron sputtering
Influence of He,
Ne
and Kr addition in reactive
Ar
N2 dc
magnetron plasma on TiN deposition
47
Preparation of thermosensitive magnetron sputtered thin films
M
Gioti,
S
Logothetidis,
С
Charitidis
53
and
H
Lefakis
Composition, chemical bonding and mechanical properties of
magnetron sputtered
CN„thin
films at different substrate bias
VACUUM METALLURGY DIVISION
M
Pancielejko,
W Precht
and
A Czyzniewski
57
Tribological properties of PVD titanium carbides
S Logothetidis, M Gioti,
С
Charitidis
61
and P
Patsalas
E
Koleva,
G Mladenov
and K Vutova
67
V
G Glebovsky and
V
N
Semenov
71
I
Ibarrondo
and J
Degauque
75
A
V
Kholzakov,
I
N
Shabanova
79
and A G Ponomarev
S
N Ermolov, R
Cortenraad,
83
V
N
Semenov, A
W
Denier
van der Gon,
S
I
Bozhko, H H Brongersma and
V
G Glebovsky
К
Vutova and G Mladenov
87
K Abiko
and S Takaki
93
S Takaki
and K
Abiko
97
Y Saotome, Y Nakazawa and Y Yamada
101
V T
Volkov, A M lonov and
T V Nikiforova
W
Precht. M Pancielejko
and A Czyzniewski
M A Baker,
R
Gilmore,
C Lenardi
P
N
Gibson and W Gissler
M
Tomlinson,
S B
Lyon,
P Hovsepian
and W-D Munz
Q Luo,
W
M Rainforth. L A Donohue,
I
Wadswortn and W-D Münz
P Panjan, B Navinšek, M Čekada
and A Zalar
I K Fetišov, A A Filippov,
G V Khodachenko, D V Mozgrin
and A A Pisarev
105
109
A new process for the development of hard and stable sput¬
tered amorphous carbon films
Calculation of weld parameters and thermal efficiency in elec¬
tron beam welding
The perfection of tungsten single crystals grown from the melt
and solid state
Study of vacuum levels in the annealing of high silicon
(6.4
wt%) non-oriented magnetic steel sheets obtained by
rapid quenching and its incidence on grain size, texture and
core losses
XPS-studies of structure transformation and relaxation pro¬
cesses in transition metal melts
Growth and characterization of monocrystalline tungsten sub¬
strates
Computer simulation of the heat transfer during electron beam
melting and refining
Ultra-purification of iron by ultra-high vacuum melting
Ultra-purification of iron by three types of melting furnaces
constructed using ultra-high vacuum technology
Disassembling and materials recovering process of alkaline
manganese dry batteries by vacuum-aided recycling systems
technology
(VARS
Tech.)
Ultrapurification
of yttrium metal from oxide to single crystal:
results and perspectives
Structure and tribological properties of carbon and carbon
nitride films, obtained by the ARC method
113
Microstructure
and mechanical properties of multilayer TiB2/C
and co-sputtered TiB2-C coatings for cutting tools
117
Corrosion performance of CrN/NbN superlattice coatings de¬
posited by the combined cathodic arc/unbalanced magnetron
technique
123
Tribological investigation of TiAICrN and TiAIN/CrN coatings
grown by combined steered-arc/unbalanced magnetron de¬
position
127
Oxidation behaviour of TiAIN coatings sputtered at low tem¬
perature
133
Impulse irradiation plasma technology for film deposition
VACUUM SCIENCE DIVISION
Pressure Measurement and Calibration
P A Redhead
137
The ultimate vacuum
F
Watanabe
151
My never-ending story towards XHV pressure measurements
F J
Redgrave,
А В
Forbes and
P M
Harris
B P
Butler,
V Music and
F J
Redgrave
L
Wangkui,
L
Qiang,
L
Shiliang,
Z
Dixin,
M
Shilong,
H
Wei,
M
Qinhua,
L Detian,
L
Zhenghai,
G
Yueli,
M
Yang,
W
Xinhui,
T
Dongxu and
L
Li
L Detian, L Zhenghai, M
Yang
and Z Dixin
S Suginuma and M Hirata
W
Jitschin, M Ronzheimer and
S Khodabakhshi
159
A discussion of methods for the estimation of volumetric
ratios determined by multiple expansions
163
Influence of orifice geometry on the simplification of transmis¬
sion probability calculations
167
Dynamic flow method UHV standard apparatus developed by
UP
173
An apparatus controlled by computer for vacuum gauge calib¬
ration
177
Dependence of sensitivity coefficient of a nude-type Bayard
Alpert gauge on the diameter of an envelope
181
Gas flow measurement by means of orifices and
Venturi
tubes
M
Yang,
Z
Dixin,
L
Shiliang,
G
Yueli
and
L
Detian
S B Nesterov, Yu K Vassiliev
and
A P Kryukov
187
Two dynamic comparison methods for calibrating the rate of
pressure leaks
193
Influence of the vacuum chamber shape on the non-uniformity
of gas distribution
Residual Gas Analysis and Leak Detection
J K Fremerey
197
Residual gas: traditional understanding and new experimental
results
S
Taylor,
J J
Tunstall,
J H
Leck,
R F Tindall, J P
Jullien,
J
Batey,
R R A Syms, T
Tate and IVI IVI
Ahmad
B
Holst,
J R
Buckland
and W Allison
J J
Tunstall,
S
Taylor,
A Vourdas,
J H
Leck
and J
Batey
203
Performance
improvements for a miniature quadrupole with
a micromachined mass filter
207
Spatial mapping in the electron-impact ion-source of a resid¬
ual gas analyser
211
Application of a static magnetic field to the mass filter of
a quadrupole mass spectrometer
S
Bryan,
J L
Hemmerich
and
T
Winkel 215 Developments in
helium leak detection at
JET
Vacuum Pumping
С
Benvenuti,
J M Cazeneuve, P Chiggiato,
219
F Cicoira, A
Escudeiro Santana,
V
Johanek,
V Ruzinov and J Fraxedas
HP Cheng,
RY
Jou,
FZ
Chen.
227
Y-W
Chang,
M Iwane and T Hanaoka
T Sawada, S Kamada,
W
Sugiyama,
233
J-i Takemoto, S
Haga
and M Tsuchiya
R P
Davis 239
A D
Chew
243
J P Bojon, N Hilleret and K
Weiss
247
A novel route to extreme vacua: the non-evaporable getter thin
film coatings
Flow investigation of
Siegbahn
vacuum pump by CFD meth¬
odology
Experimental verification of theory for the pumping mecha¬
nism of a dry-scroll vacuum pump
Development of a relative method for comparing the composi¬
tion of the residual atmosphere above commercial dry-pump
systems
The measurement of helium retention in
forepumps
Origin of possible contamination introduced by a turbo-
molecular pumping system
Sorption, Desorption, Outgassing
Chr
Day
and
A
Schwenk-Ferrero
M
De
Angeli
and
F Ghezzi
S
В
Nesterov,
Yu
К
Vassiliev,
G L
Saksaganski,
B
A Loginov and
V V Protasenko
V V Anashin, O B Malyshev, R
Calder
and O
Gröbner
and Permeation
253
Sticking coefficients for helium and helium-containing mix¬
tures at activated carbon under liquid helium cooling condi¬
tions
257
Solution for pressure measurement problems in finding PCT
equilibrium characteristics of hydrogen getters
263
How the
sorbent microgeometry
effects the sorptional charac¬
teristics of cryopumps
269
A study of the photodesorption process for cryosorbed layers
of H2, CH4, CO or CO2 at various temperatures between
3
and
68
К
R
Cimino,
V
Baglin
and I R Collins
273
VUV synchrotron radiation studies of candidate LHC vacuum
chamber materials
V Nemanič
and
J
Setina
277
A study of thermal treatment procedures to reduce hydrogen
outgassing rate in thin wall stainless steel cells
S S Inayoshi, S
Tsukahara and A Kinbara
281
Decrease of water vapor desorption by Si film coating on
stainless steel
К
Akaishi,
К
Ezaki,
Y Kubota
and
O Motojima
285
Reduction of water outgassing and UHV production in an
unbaked vacuum chamber by neon gas discharge
S
Ichimura,
K Kokubun,
M Hirata,
291
S
Tsukahara,
К
Saito
and
Y tkeda
R A
Nevshupa,
J L
de
Segovia and
295
E A Deulin
P Repa
and
D Oráiek
299
К Н
Chung,
S K Lee, Y H
Shin,
303
J
Y
Lim,
S S Hong and S H
Be
Y Hirohata, M Okegawa, H Yanagihara,
309
T
Hino,
N
Ogiwara,
J Yagyu
and
M Saidoh
Measurement of outgassing characteristics from a vacuum
chamber fabricated for pressure calibration in UHV/XHV re¬
gion
Outgassing of stainless steel during sliding friction in ultra-
high vacuum
Outgassing stimulated by deformation
The outgassing from TiN and BN films grown on stainless
steel by IBAD
Gas desorption properties of tungsten coated graphite
materials
H
Nörenberg,
T
Miyamoto,
N
Fukugami,
Y
Tsukahara,
G D W Smith
and
GAD
Briggs
313
Permeation of gases through polymer membranes investi¬
gated by mass spectroscopy
Surface Treatment
С
Benvenuti,
G
Canil,
P
Chiggiato,
P
Collin,
R
Cosso,
J
Guérin,
S
Hie,
D
Latorre and K
S
Neil
317
Surface
cleaning efficiency measurements for UHV applica¬
tions
S
Tada,
Y
Sakamoto,
T
Suzuki,
H
Sarto,
M Oikawa,
A Kidokoro
and
H
Enoki
321
Experiment on removing hydrocarbon by using RF oxygen or
hydrogen plasma
S S
Inayoshi,
Y Sato, K
Saito,
S Tsukahara, Y
Hara,
S
Amano,
К
Ishizawa,
T
Nomura,
A Shimada
and M Kanazawa
325
Chemical
polishing of stainless steel for ultrahigh vacuum wall
material
Particulates
J M
Jimenez,
J L Dorier and N Hilleret
A A Bochkarev, V I Poliakova
and M V Pukhovoy
329
Measurements of paniculate contamination and migration
under vacuum using a large sensitive area particle counter
335
Two mechanisms of formation of a dust in vacuum chambers
Vacuum Systems
A Morris and
J M
Dyke
H
С
Hseuh, R Davis,
D Pate, L
Smart
R Todd and D
Weiss
339
Y
Saito,
Y Ogawa, G Horikoshi,
353
N Matuda, R Takahashi and M Fukushima
J C
Orchard
and S C
Scales
Safe handling of corrosive chemicals in a vacuum environ¬
ment: a case study photoelectron spectroscopy of reactive
intermediates
347
RHIC vacuum systems
Vacuum system of the 300 m gravitational wave laser inter¬
ferometer in Japan (TAMA300)
357
The JET vacuum interspace system
P
Beer,
M A Djouadi, R Marchai,
A Sokolowska,
M
Lambertin,
A Czyzniewski and
W Precht
363
Antiabrasivecoatings in a new application
—
wood rotary peel¬
ing process
For more information on Vacuum please visit our website which is
accessible via the
Elsevier
Surfaces
&
Interfaces Homepage at:
httpV/www.elsevier.nl/locate/surfaces
ISSN 0042-207X
VACUAV
53(1-2) 1-366 (1999)
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Disclaimer
No responsibility is assumed by the Publisher for any injury and/or damage to persons or property as a matter of products
liability, negligence or otherwise, or from any use or operation of any methods, products, instructions or ideas contained in
the material herein.
Although all advertising material is expected to conform to ethical (medical) standards, inclusion in this publication does
not constitute a guarantee or endorsement of the quality or value of such product or of the claims made of it by its
manufacturer.
PERGAMON
VACUUM
Volume 53/number 3-4/June
1999
Contents
AUTHORS
ARTICLES
M
Fadei,
N
A Hegab
and
367
E
Abd El-Wahabb
Temperature and light soaking dependence of the dc electrical
conductivity of binary amorphous Sb-Se Films
Τ
M Berlicki, S J
Osadnik
and
E L Prociòw
E
Urbonavičius,
E Pétnycytè and
A Galdikas
A Galdikas,
L Pranevičius, D Katilius,
С
Templier,
J
Delafond and
J C
Desoyer
373
Vacuum pressure thermal thin-film sensor
377
The kinetics of thin film island growth at initial stages
381
Temperature effects on the depth profiling of alloys
G
Carter
389
G
Carter
399
K Chakrabarti, M Basu, S Chaudhuri,
405
А К
Pal and
H
Hanzawa
S S Fouad, S A Faek and S M El-Sayed
415
S
E
Valamontes,
C N
Panos
and
421
E S Valamontes
O Benkherourou, S
Sahnoune,
M Djabi
427
and J-P
Deville
M
M
Pejović,
G S
Ristić,
435
Č S Milosavljevic, P D
Vuković
and
J P Karamarkovič
K Starbova, V Mankov, J
Dikova
441
and N Starbov
S A Fayek, A F Maged and
lvi
R Balboul
447
M P
Johansson,
H
Sjöström and
451
L Hultman
F Shoji
459
The Avrami-Johnson-Mehl model
and irradiation induced
phase changes in silicon
Energy exponents in thermal spike models of interface mixing
Mechanical, electrical and optical properties of a-C
:
H
: N
films
deposited by plasma CVD technique
Spectroscopic studies in glassy semiconducting
Geße, x
The helicoid multi-groove
f rictional
pump as a direct compres¬
sor in the atmosphere under re-examination of the coefficient
of the internal viscosity
Analysis of photoemission lines in silicon nitrided layers for¬
med by low-energy nitrogen ion implantation in silicon
Statistical reliability of time delay values for nitrogen-filled
tube at pressure of
1.3
mbar
The effects of vapour incidence on the
microstructure
and
related properties of condensed GeS2 thin films
Optical and electrical properties of vacuum evaporated In
doped
Se
amorphous thin films
HREM and nanoindentation studies of BN:C films deposited
by reactive sputtering from a B,C target
A low-energy ¡on beam system for studying energetic ion
deposition on Silicon surfaces
L
Michalak, A Markowski and
H
Felińska
465
T
Wierzchem, I Ulbin-Pokorska,
К
Sikorski
and J
Trojanowski
Influence of the inhomogeneity of a focused photon beam on
the stability of the ion current in an ion source with an effusion
molecular beam
473
Properties of multicomponent surface layers produced on
steels by modified plasma nitriding processes
BOOK REVIEW
I Mayergoyz
481
Nonlinear Diffusion of Electromagnetic Fields with applica¬
tions to Eddy currents and Superconductivity
ERRATUM
VACUUM DIARY
483
I
For more information on Vacuum please visit our website which is
accessible via the
Elsevier
Surfaces
&
Interfaces Homepage at:
http://www.elsevier.nl/locate/surfaces
ISSN 0042-207X
53(3-4) 367-486 (1999)
This Journal is part of ContenlsDirect, the free alerting service which sends tables of contents by e-mail for
Elsevier
Science books and journals. The quickest way to register for ContentsDirect is via the World Wide Web
at: »ww.elsevier.nl/Iocate/ContentsDirect
If you don t have access to the WWW you can register for this service by sending an e-mail message to
cdsubsiaelsevier.co.uk specifying the title of the publication you wish to register for. The tables of contents are
also available on the
Elsevier
Science website at: www.elsevier.nl or www.elsevier.com or www.eisevier.co.jp
1
DIRECT
1
PERGAMON
|
| any_adam_object | 1 |
| author_corporate | International Vacuum Congress Birmingham International Conference on Solid Surfaces International Conference on Nanometre Scale Science and Technology |
| author_corporate_role | aut aut aut |
| author_facet | International Vacuum Congress Birmingham International Conference on Solid Surfaces International Conference on Nanometre Scale Science and Technology |
| author_sort | International Vacuum Congress Birmingham |
| building | Verbundindex |
| bvnumber | BV012707293 |
| ctrlnum | (OCoLC)632714750 (DE-599)BVBBV012707293 |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV012707293 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:32:16Z |
| institution | BVB |
| institution_GND | (DE-588)5320852-3 (DE-588)5320851-1 (DE-588)5325111-8 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008637888 |
| oclc_num | 632714750 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | 485 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Elsevier |
| record_format | marc |
| series2 | Vacuum |
| spelling | International Vacuum Congress 14 1998 Birmingham Verfasser (DE-588)5320852-3 aut 14th International Vacuum Congress (IVC-14), 10th International Conference on Solid Surfaces (ICSS-10), 5th International Conference on Nanometre Scale Science and Technology (NANO-5), 10th International Conference on Quantitative Surface Analysis (QSA-10) 31 August - 4 September 1998, International Convention Centre, Birmingham, UK vol. eds.: J. P. Coad ... Exeter Elsevier 1999 485 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Vacuum 53 Einzelaufnahme eines Zeitschr.-Bd. Vakuum (DE-588)4062266-6 gnd rswk-swf Festkörper (DE-588)4016918-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Festkörper (DE-588)4016918-2 s DE-604 Vakuum (DE-588)4062266-6 s Coad, J. P. Sonstige oth International Conference on Solid Surfaces 10 1998 Birmingham Verfasser (DE-588)5320851-1 aut International Conference on Nanometre Scale Science and Technology 5 1998 Birmingham Verfasser (DE-588)5325111-8 aut Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008637888&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | 14th International Vacuum Congress (IVC-14), 10th International Conference on Solid Surfaces (ICSS-10), 5th International Conference on Nanometre Scale Science and Technology (NANO-5), 10th International Conference on Quantitative Surface Analysis (QSA-10) 31 August - 4 September 1998, International Convention Centre, Birmingham, UK Vakuum (DE-588)4062266-6 gnd Festkörper (DE-588)4016918-2 gnd |
| subject_GND | (DE-588)4062266-6 (DE-588)4016918-2 (DE-588)1071861417 |
| title | 14th International Vacuum Congress (IVC-14), 10th International Conference on Solid Surfaces (ICSS-10), 5th International Conference on Nanometre Scale Science and Technology (NANO-5), 10th International Conference on Quantitative Surface Analysis (QSA-10) 31 August - 4 September 1998, International Convention Centre, Birmingham, UK |
| title_auth | 14th International Vacuum Congress (IVC-14), 10th International Conference on Solid Surfaces (ICSS-10), 5th International Conference on Nanometre Scale Science and Technology (NANO-5), 10th International Conference on Quantitative Surface Analysis (QSA-10) 31 August - 4 September 1998, International Convention Centre, Birmingham, UK |
| title_exact_search | 14th International Vacuum Congress (IVC-14), 10th International Conference on Solid Surfaces (ICSS-10), 5th International Conference on Nanometre Scale Science and Technology (NANO-5), 10th International Conference on Quantitative Surface Analysis (QSA-10) 31 August - 4 September 1998, International Convention Centre, Birmingham, UK |
| title_full | 14th International Vacuum Congress (IVC-14), 10th International Conference on Solid Surfaces (ICSS-10), 5th International Conference on Nanometre Scale Science and Technology (NANO-5), 10th International Conference on Quantitative Surface Analysis (QSA-10) 31 August - 4 September 1998, International Convention Centre, Birmingham, UK vol. eds.: J. P. Coad ... |
| title_fullStr | 14th International Vacuum Congress (IVC-14), 10th International Conference on Solid Surfaces (ICSS-10), 5th International Conference on Nanometre Scale Science and Technology (NANO-5), 10th International Conference on Quantitative Surface Analysis (QSA-10) 31 August - 4 September 1998, International Convention Centre, Birmingham, UK vol. eds.: J. P. Coad ... |
| title_full_unstemmed | 14th International Vacuum Congress (IVC-14), 10th International Conference on Solid Surfaces (ICSS-10), 5th International Conference on Nanometre Scale Science and Technology (NANO-5), 10th International Conference on Quantitative Surface Analysis (QSA-10) 31 August - 4 September 1998, International Convention Centre, Birmingham, UK vol. eds.: J. P. Coad ... |
| title_short | 14th International Vacuum Congress (IVC-14), 10th International Conference on Solid Surfaces (ICSS-10), 5th International Conference on Nanometre Scale Science and Technology (NANO-5), 10th International Conference on Quantitative Surface Analysis (QSA-10) |
| title_sort | 14th international vacuum congress ivc 14 10th international conference on solid surfaces icss 10 5th international conference on nanometre scale science and technology nano 5 10th international conference on quantitative surface analysis qsa 10 31 august 4 september 1998 international convention centre birmingham uk |
| title_sub | 31 August - 4 September 1998, International Convention Centre, Birmingham, UK |
| topic | Vakuum (DE-588)4062266-6 gnd Festkörper (DE-588)4016918-2 gnd |
| topic_facet | Vakuum Festkörper Konferenzschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008637888&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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