Aerosol processing of materials:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York [u.a.]
Wiley-VCH
1999
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XXX, 680 S. Ill., graph. Darst. |
| ISBN: | 0471246697 |
Internformat
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| 100 | 1 | |a Kodas, Toivo T. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Aerosol processing of materials |c Toivo T. Kodas and Mark J. Hampden-Smith |
| 264 | 1 | |a New York [u.a.] |b Wiley-VCH |c 1999 | |
| 300 | |a XXX, 680 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Aerosols | |
| 650 | 4 | |a Chemical vapor deposition | |
| 650 | 4 | |a Thin films | |
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Datensatz im Suchindex
| _version_ | 1804127369065136128 |
|---|---|
| adam_text | CONTENTS
Preface xvii
Acknowledgments xix
Nomenclature xxi
1. Introduction 1
1.1 Background 1
1.2 Definitions 7
1.3 Important Physicochemical Phenomena 8
1.4 Types of Aerosol Processes 11
1.5 Advantages and Disadvantages of Aerosol Processes 14
1.6 Recommended Books by Topic 16
1.7 References 18
2 Particle Size Distribution and Physical and Chemical
Characteristics 19
2.1 Introduction 19
2.2 Mean Free Path of the Gas 20
2.3 Mass and Particle Concentration 23
2.4 Particle Size Distribution 24
2.4.1 Introduction 24
2.4.2 Average Particle Size 28
2.4.3 Spread of the Distribution 30
2.4.4 Moments of Particle Size Distribution 31
2.5 Density and Surface Area 32
2.6 Particle Morphology 33
2.7 Chemical and Phase Composition 38
2.8 Crystallinity 41
2.9 References 43
v
vi CONTENTS
3 Particle Transport 45
3.1 Introduction 45
3.2 Diffusion 45
3.2.1 Wall Losses by Diffusion 50
3.3 Transport Coefficient Approach to Diffusional Deposition
of Particles 52
3.4 Diffusion Equation Approach to Particle Deposition 54
3.5 Particle Motion in External Force Fields 55
3.5.1 Sedimentation in a Gravitational Field 56
3.5.2 Motion of Charged Particles in Electric Fields 59
3.5.3 Particle Motion in Thermal Gradients 62
3.6 Impaction 65
3.6.1 Particle Deposition by Impaction from Aerosol Jets 67
3.6.2 Particle Deposition in Tube Bends 69
3.6.3 Turbulent Deposition in Pipe Flows 70
3.7 Photophoresis and Radiometry 71
3.8 Structure of Deposits 71
3.9 References 72
4 Particle Growth, Evaporation, and Nucleation 75
4.1 Introduction 75
4.2 Qualitative Description of Particle Growth 76
4.3 Particle Growth: Free Molecule and Transition Regimes 77
4.4 Transport: Continuum Regime 81
4.5 Droplet Evaporation: Characteristic Time for Gas Phase
Diffusion to a Particle 83
4.6 Evaporation from Solution Droplets 84
4.7 Droplet Evaporation during Materials Processing 85
4.8 Chemical Reactions: Surface Reaction Limited Growth 89
4.9 Chemical Reactions: Volume Reaction Limited Growth 92
4.10 Nucleation 93
4.10.1 Classical Homogeneous Nucleation 96
4.10.2 Collision Controlled Nucleation 97
4.10.3 Chemical Nucleation 100
4.10.4 Materials That Sublime Dissociatively 101
4.11 References 102
5 Collision and Coalescence 105
5.1 Introduction 105
5.2 Brownian Coagulation 107
5.3 Characteristic Time for Coagulation 109
5.4 Shear Induced and Turbulent Coagulation 110
CONTENTS vii
5.5 Coagulation by Electric Forces 112
5.6 Self Preserving Size Distributions: Uncharged Spherical
Particles 113
5.7 Self Preserving Size Distributions: Uncharged
Agglomerates 119
5.8 Self Preserving Size Distributions: Charged Particles 122
5.9 Coalescence of Particles 124
5.10 References 127
6 Intraparticle Transport Processes 129
6.1 Introduction 129
6.2 Solid State and Liquid Phase Diffusion 130
6.2.1 Introduction 130
6.2.2 Theory 132
6.2.3 Liquid Phase 135
6.2.4 Solid State 137
6.3 Heat Transfer within Particles 138
6.4 Gas Solid Reactions 140
6.4.1 Introduction 140
6.4.2 Shrinking Core Model 141
6.5 Gas Liquid Reactions 143
6.6 References 144
7 Models Based on the General Dynamic Equation 146
7.1 Introduction 146
7.2 General Dynamic Equation 147
7.3 Discrete Models 148
7.4 Sectional Models 150
7.5 Lognormal and Other Moment Models 153
7.6 Monodisperse with Sintering 157
7.7 Comparison of Models 159
7.8 Modeling of Particle Deposition Processes 159
7.9 References 163
8 Chemistry 166
8.1 Introduction 166
8.2 General Features of Metal Containing Compounds 172
8.3 Selection of Chemical Reagents as Precursors: Important
Chemical Properties Related to Aerosol Processing 178
8.3.1 Solubility 179
8.3.2 Volatility 182
8.3.3 Reactivity 185
vlii CONTENTS
8.4 Thermally Induced Reactions of Metal Containing
Compounds 186
8.4.1 Thermal Decomposition of Inorganic Compounds 186
8.4.1.1 Metal Nitrates 187
8.4.1.2 Metal Carbonates 190
8.4.1.3 Metal Sulfates 192
8.4.1.4 Metal Halides 194
8.4.2 Thermal Decomposition of Metal Organic
Compounds 199
8.4.2.1 Metal Carboxylates 199
8.4.2.2 Metal Alkoxides 202
8.4.2.3 Metal Diketonates 203
8.4.2.4 Metal Amides 203
8.4.2.5 Other Derivatives 204
8.4.3 Thermal Decomposition of Organometallic
Compounds 204
8.5 Photo Induced Reactions 204
8.6 Plasma Induced Reactions 206
8.7 Flame Induced Reactions 210
8.8 Single Source Precursors 214
8.9 Surface Processes 218
8.10 Solid State Processes: Crystallization, Densification,
Porosity, and Surface Properties 221
8.11 References 225
9 Characteristics of Nanostructured Materials 230
9.1 Introduction 230
9.2 Properties of Nanostructured Materials 238
9.2.1 Electronic Properties 239
9.2.2 Optical Properties 242
9.2.3 Magnetic Properties 244
9.2.4 Compositional and Phase Behavior 246
9.2.4.1 Crystal Lattice Distortions 246
9.2.4.2 Compositional Inhomogeneities 247
9.2.4.3 Phase Transitions and Temperatures 249
9.2.4.4 Vapor Pressure 250
9.2.4.5 Internal Pressure 251
9.2.4.6 Melting Point 252
9.2.4.7 Solubility 253
9.2.5 Mechanical Properties of Consolidated
Nanoparticles 254
9.2.6 Chemical Reactivity 258
CONTENTS ix
9.3 Applications of Nanostructured Materials 260
9.3.1 Current Applications 261
9.3.2 Future Applications 262
9.4 References 262
10 Overall Qualitative Behavior of Gas to Particle Conversion
Processes 266
10.1 Introduction 266
10.2 Modes of Operation for Single Component Systems 269
10.2.1 Nucleation Coagulation 270
10.2.2 Nucleation Condensation 275
10.3 Modes of Operation for Multicomponent Systems 279
10.3.1 Generation of Multicomponent Materials Using
Two or More Volatile Species 279
10.3.2 Strategies for Avoiding Segregation in
Multicomponent Materials 285
10.3.3 Strategies for Producing Composite Particles 288
10.3.4 Strategies for Producing Coated Particles 288
10.4 Fluidized Beds 290
10.5 References 291
11 Technology of Gas to Particle Conversion 293
11.1 Introduction 293
11.2 Comparison of Different Gas to Particle Conversion
Routes and Their Comparison with Liquid to Solid and
Solid to Solid Conversion Routes 296
11.3 Design 298
11.4 Chemical Routes: Tubular Flow Reactors 299
11.4.1 Introduction 299
11.4.2 Precursors and Products 302
11.4.3 Experimental Considerations 303
11.4.4 Theory 306
11.5 Chemical Routes: Flame Reactors 306
11.5.1 Introduction 306
11.5.2 Precursors and Products 308
11.5.3 Experimental Considerations 309
11.5.4 Theory 310
11.6 Chemical Routes: Laser Driven Photothermal Reactors 311
11.6.1 Introduction 311
11.6.2 Precursors and Products 313
11.6.3 Experimental Details 314
11.6.4 Theory 315
X CONTENTS
11.7 Chemical Routes: Laser Driven Photochemical Reactors 315
11.7.1 Introduction 315
11.7.2 Precursors and Products 315
11.7.3 Experimental Considerations 316
11.7.4 Theory 316
11.8 Chemical Routes: Thermal Plasma Reactors 316
11.8.1 Introduction 316
11.8.2 Precursors and Products 318
11.8.3 Experimental Considerations 318
11.8.4 Theory 321
11.9 Chemical Routes: Low Temperature Plasma Reactors 323
11.9.1 Introduction 323
11.9.2 Precursors and Products 324
11.9.3 Experimental Considerations 324
11.9.4 Theory 324
11.10 Chemical Processes: Fluidized Beds 325
11.10.1 Introduction 325
11.10.2 Precursors and Products 326
11.10.3 Experimental Considerations 326
11.10.4 Theory 327
11.11 Physical Processes: Free Convective Plumes and Tubular
Flow Systems 327
11.11.1 Introduction 327
11.11.2 Precursors and Products 329
11.11.3 Experimental Considerations 330
11.11.4 Theory 332
11.12 Physical Processes: Nozzle Expansion 334
11.12.1 Introduction 334
11.12.2 Precursors and Products 335
11.12.3 Experimental Considerations 335
11.12.4 Theory 336
11.13 Physical Processes: Laser Ablation 336
11.13.1 Introduction 336
11.13.2 Precursors and Products 337
11.13.3 Experimental Considerations 338
11.13.4 Theory 338
11.14 Physical Processes: Supercritical Spraying 338
11.14.1 Introduction 338
11.14.2 Precursors and Products 339
11.14.3 Experimental Considerations 340
11.14.4 Theory 340
CONTENTS 3d
11.15 Hybrid Processes: Evaporation Condensation Reaction 342
11.15.1 Introduction 342
11.15.2 Precursors and Products 343
11.15.3 Experimental Considerations 343
11.15.4 Theory 344
11.16 References 345
11.17 Tables 352
12 Overall Qualitative Behavior of Liquid to Solid and Solid to
Solid Conversion Processes 380
12.1 Introduction 380
12.2 Overview of Basic Physicochemical Phenomena 381
12.2.1 Droplet Formation 384
12.2.2 Processes within Droplets 384
12.2.3 Particles Containing Solids and Liquids 384
12.2.4 Dried Particles 385
12.2.5 Product Particles 386
12.2.6 Aerosol Dynamics 386
12.2.7 Reactor scale Phenomena 386
12.3 Individual Physical and Chemical Phenomena 387
12.3.1 Droplet Generation 387
12.3.2 Heat Transfer 389
12.3.3 Solvent Transport 392
12.3.4 Solute Transport in Droplets 396
12.3.5 Solute Precipitation in Droplets 399
12.3.6 Transport of Gaseous Species in Solid Particles 400
12.3.7 Intraparticle Reaction 402
12.4 Overall Qualitative Behavior of Liquid to Solid and
Solid to Solid Conversion Processes 403
12.4.1 Droplet Evaporation in Flow Systems 403
12.4.2 Influence of Solvent Evaporation on Particle
Morphology 410
12.4.3 Influence of Precursor Characteristics on
Particle Morphology 415
12.4.4 Influence of Intraparticle Reaction on Particle
Morphology 416
12.5 Modes of Reactor Behavior 418
12.5.1 Intraparticle Reaction with No Volatile
Components 419
12.5.2 Intraparticle Reaction with Evaporation of
Volatile Reactants 421
xii CONTENTS
12.5.3 Intraparticle Reaction with Volatile
Intermediates or Products 421
12.5.4 New Particle Formation with a Single Volatile
Component 427
12.5.5 Spray Combustion Synthesis 427
12.5.6 Aerosol Phase Densification 429
12.6 References 432
13 Technology: Liquid to Solid and Solid to Solid Conversion 436
13.1 Liquid to Solid and Solid to Solid Conversion 436
13.1.1 Introduction 436
13.1.2 Commercial Potential 439
13.2 Spray Pyrolysis 440
13.2.1 Introduction 440
13.2.2 Precursors and Products 447
13.2.3 Metal Oxide Powders 448
13.2.4 Nonoxide Powders 451
13.2.5 Metal Powders 452
13.2.6 Composite Powders 452
13.2.7 Coated Powders 455
13.2.8 Influence of Precursor Characteristics on
Particle Morphology 457
13.2.9 Conditions Conducive to the Formation of
Solid Particles 458
13.3 Spray Drying 460
13.4 Freeze Drying 463
13.5 Spray Combustion Synthesis 464
13.6 Flame Spray Pyrolysis 466
13.7 Melt Atomization 468
13.8 Powder Synthesis and Densification in Thermal Plasmas 470
13.8.1. Thermal Plasma Densification 470
13.8.2 Thermal Plasma Synthesis of Powders 470
13.9 References 470
13.10 Tables 474
14 Film Formation 492
14.1 Introduction 492
14.2 Film Characteristics 494
14.3 Deposition or Etching Using Nonevaporating Particles
Formed Ex Situ 496
14.4 Deposition or Etching Using Evaporating Particles with
Involatile Reactants Formed Ex Situ 499
CONTENTS xiii
14.5 Aerosol Assisted Chemical Vapor Deposition 503
14.6 Deposition Using Droplets or Solid Particles Formed In
Situ 512
14.7 Simultaneous Particle and Vapor Deposition 516
14.8 Particle Formation during CVD 520
14.9 Particle Formation during Low Pressure Plasma
Deposition and Etching 528
14.10 References 531
15. Film Generation Technologies 533
15.1 Introduction 533
15.2 Liquid Phase Precursors 533
15.2.1 Droplet Deposition (Film Pyrolysis) 533
15.2.1.1 Introduction 533
15.2.1.2 Precursors and Products 535
15.2.1.3 Experimental Details 536
15.2.1.4 Theory 537
15.2.2 Aerosol Assisted Chemical Vapor Deposition 537
15.2.2.1 Introduction 537
15.2.2.2 Precursors and Products 540
15.2.2.3 Experimental Details 540
15.2.2.4 Theory 542
15.2.3 Supercritical Expansion of Solutions 543
15.2.3.1 Introduction 543
15.2.3.2 Precursors and Products 543
15.2.3.3 Experimental Details 544
15.2.3.4 Theory 545
15.2.4 Molten Droplet Deposition 545
15.2.4.1 Introduction 545
15.2.4.2 Precursors and Products 548
15.2.4.3 Experimental Details 548
15.2.4.4 Theory 549
15.2.5 Aerosol Jet Etching, Aerosol Cleaning, and
Related Processes 550
15.2.5.1 Introduction 550
15.2.5.2 Precursors and Products 551
15.2.5.3 Experimental Details 551
15.2.5.4 Theory 552
15.3 Solid Particle Deposition 554
15.3.1 Introduction 554
15.3.2 Ionized Cluster Beam Deposition 554
xiv CONTENTS
15.3.2.1 Introduction 554
15.3.2.2 Precursors and Products 556
15.3.2.3 Experimental Details 556
15.3.2.4 Theory 558
15.3.3 Neutral Cluster Beam 559
15.3.4 Inertial Particle Deposition 560
15.3.4.1 Introduction 560
15.3.4.2 Precursors and Products 561
15.3.4.3 Experimental Details 561
15.3.4.4 Theory 561
15.3.5 Thermophoretic Aerosol Deposition 562
15.3.5.1 Introduction 562
15.3.5.2 Precursors and Products 563
15.3.5.3 Experimental Details 563
15.3.5.4 Theory 563
15.3.6 Thermophoretic Aerosol Deposition:
Optical Fibers 564
15.3.6.1 Introduction 564
15.3.6.2 Precursors and Products 566
15.3.6.3 Experimental Details 566
15.3.6.4 Theory 566
15.3.7 Deposition of Charged Solid Particles in
Electric Fields 567
15.4 Simultaneous Particle Deposition and CVD 569
15.5 Particle Formation during CVD 571
15.5.1 Introduction 571
15.5.2 Precursors and Products 572
15.5.3 Experimental Details 572
15.5.4 Theory 572
15.6 References 574
15.7 Tables 577
16 Aerosol Reactor Components 602
16.1 Introduction 602
16.2 Atomization 602
16.2.1 Introduction 602
16.2.2 Classification of Atomizers 603
16.2.3 Pressure and Two Fluid Atomization 604
16.2.4 Ultrasonic Atomizers 606
16.2.5 Electrostatic Atomizers 610
16.2.6 Summary of Atomizer Characteristics 612
16.3 Dry Powder Feeders 613
CONTENTS xv
16.4 Droplet Impactors and Virtual Impactors 614
16.5 Powder Collection: Filtration and Electrostatic
Precipitators 618
16.5.1 Filtration 619
16.5.2 Cyclones 620
16.5.3 Settling Chambers 621
16.5.4 Electrostatic Precipitators 621
16.6 Volatile Reactant Delivery Systems 622
16.7 References 626
17 Measurement Techniques 629
17.1 Introduction 629
17.2 Particle Collection Methods 629
17.3 Physical Properties: Size and Morphology 632
17.3.1 Dry Methods: Sieving 633
17.3.2 Dry Methods: Scanning and Transmission
Electron Microscopy 633
17.3.3 Liquid Phase Methods: Light Scattering 635
17.3.4 Liquid Phase Methods: Sedimentation Velocity 635
17.3.5 Liquid Phase Methods: Assorted 636
17.3.6 Gas Phase Methods: Condensation Particle
Counter 637
17.3.7 Gas Phase Methods: Differential Mobility
Particle Sizer and Electrical Aerosol Analyzer 638
17.3.8 Gas Phase Methods: Single Particle Optical
Particle Counter 640
17.3.9 Gas Phase Methods: Dynamic Light Scattering 641
17.3.10 Gas Phase Methods: Assorted 641
17.3.11 Gas Phase Methods: Multistage Impactors 641
17.3.12 Gas Phase Methods: Virtual Impactors 642
17.3.13 Gas Phase Methods: Cyclones 642
17.3.14 Gas Phase Methods: Aerodynamic Particle
Sizer 642
17.4 Physical Properties: Microstructure 643
17.4.1 Mercury Porosimetry 643
17.4.2 Surface Area 644
17.4.3 Density 645
17.4.4 Pellet Green Density 646
17.4.5 Tap Density 646
17.4.6 Transmission Electron Microscopy 646
17.5 Physical Properties: Phase Composition and Distribution 647
17.5.1 X ray Diffraction 648
xvi CONTENTS
17.5.2 Transmission Electron Microscopy and
Electron Diffraction 648
17.6 Chemical Composition: Bulk Materials 648
17.6.1 X ray Fluorescence 649
17.6.2 Fourier Transform Infrared Spectroscopy 649
17.6.3 Proton induced X ray Emission Spectroscopy 649
17.6.4 Nuclear Reaction Analysis 650
17.6.5 Emission and Absorption Spectroscopy 650
17.6.6 Combustion Elemental Analysis 650
17.7 Chemical Composition: Surface Sensitive Methods 651
17.7.1 Auger Electron Spectroscopy 651
17.7.2 Energy Dispersive Spectroscopy 651
17.7.3 X ray Photoelectron Spectroscopy 653
17.7.4 Mass Spectrometric Methods 654
17.8 Thermophysical and Thermochemical Analysis 654
17.8.1 Thermogravimetric Analysis 654
17.8.2 Differential Thermal Analysis and Differential
Scanning Calorimetry 655
17.8.3 Dilatometry 655
17.9 Surface Properties 655
17.10 Assorted Methods 655
17.11 References 656
Index 659
|
| any_adam_object | 1 |
| author | Kodas, Toivo T. Hampden-Smith, Mark J. |
| author_facet | Kodas, Toivo T. Hampden-Smith, Mark J. |
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| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
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| dewey-sort | 3621.3815 12 |
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| id | DE-604.BV012706338 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:32:15Z |
| institution | BVB |
| isbn | 0471246697 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008637054 |
| oclc_num | 38731991 |
| open_access_boolean | |
| owner | DE-703 DE-91G DE-BY-TUM DE-384 DE-1046 DE-29T |
| owner_facet | DE-703 DE-91G DE-BY-TUM DE-384 DE-1046 DE-29T |
| physical | XXX, 680 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Wiley-VCH |
| record_format | marc |
| spelling | Kodas, Toivo T. Verfasser aut Aerosol processing of materials Toivo T. Kodas and Mark J. Hampden-Smith New York [u.a.] Wiley-VCH 1999 XXX, 680 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Aerosols Chemical vapor deposition Thin films Dünne Schicht (DE-588)4136925-7 gnd rswk-swf CVD-Verfahren (DE-588)4009846-1 gnd rswk-swf Pulver (DE-588)4219041-1 gnd rswk-swf Aerosol (DE-588)4000595-1 gnd rswk-swf Pulver (DE-588)4219041-1 s Dünne Schicht (DE-588)4136925-7 s Aerosol (DE-588)4000595-1 s CVD-Verfahren (DE-588)4009846-1 s DE-604 Hampden-Smith, Mark J. Verfasser aut HBZ Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008637054&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Kodas, Toivo T. Hampden-Smith, Mark J. Aerosol processing of materials Aerosols Chemical vapor deposition Thin films Dünne Schicht (DE-588)4136925-7 gnd CVD-Verfahren (DE-588)4009846-1 gnd Pulver (DE-588)4219041-1 gnd Aerosol (DE-588)4000595-1 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4009846-1 (DE-588)4219041-1 (DE-588)4000595-1 |
| title | Aerosol processing of materials |
| title_auth | Aerosol processing of materials |
| title_exact_search | Aerosol processing of materials |
| title_full | Aerosol processing of materials Toivo T. Kodas and Mark J. Hampden-Smith |
| title_fullStr | Aerosol processing of materials Toivo T. Kodas and Mark J. Hampden-Smith |
| title_full_unstemmed | Aerosol processing of materials Toivo T. Kodas and Mark J. Hampden-Smith |
| title_short | Aerosol processing of materials |
| title_sort | aerosol processing of materials |
| topic | Aerosols Chemical vapor deposition Thin films Dünne Schicht (DE-588)4136925-7 gnd CVD-Verfahren (DE-588)4009846-1 gnd Pulver (DE-588)4219041-1 gnd Aerosol (DE-588)4000595-1 gnd |
| topic_facet | Aerosols Chemical vapor deposition Thin films Dünne Schicht CVD-Verfahren Pulver Aerosol |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008637054&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT kodastoivot aerosolprocessingofmaterials AT hampdensmithmarkj aerosolprocessingofmaterials |