APA (7th ed.) Citation

Nonogaki, S., Ueno, T., & Itō, T. (1998). Microlithography fundamentals in semiconductor devices and fabrication technology. Dekker.

Chicago Style (17th ed.) Citation

Nonogaki, Saburo, Takumi Ueno, and Toshio Itō. Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology. New York [u.a.]: Dekker, 1998.

MLA (9th ed.) Citation

Nonogaki, Saburo, et al. Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology. Dekker, 1998.