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MLA-Zitierstil (9. Ausg.)Advanced Metallization and Interconnect Systems for ULSI Applications in 1997: Proceedings of the Conference Held September 30 - October 2, 1997, in San Diego, California ; a Parallel Session of the Conference Was Held from October 21 - 22, 1997, in Tokyo, Japan. Materials Research Soc, 1998.