Advanced metallization and interconnect systems for ULSI applications in 1997: proceedings of the conference held September 30 - October 2, 1997, in San Diego, California ; a parallel session of the conference was held from October 21 - 22, 1997, in Tokyo, Japan
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
1998
|
| Schriftenreihe: | Materials Research Society conference proceedings
|
| Schlagworte: | |
| Beschreibung: | XVIII, 765 S. Ill. |
| ISBN: | 1558994122 |
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Datensatz im Suchindex
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| genre_facet | Konferenzschrift 1997 San Diego Calif. Konferenzschrift 1997 Tokio |
| id | DE-604.BV012620660 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:30:45Z |
| institution | BVB |
| institution_GND | (DE-588)5306163-9 |
| isbn | 1558994122 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008572523 |
| oclc_num | 634481849 |
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| physical | XVIII, 765 S. Ill. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Materials Research Soc. |
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| series2 | Materials Research Society conference proceedings |
| spelling | Advanced metallization and interconnect systems for ULSI applications in 1997 proceedings of the conference held September 30 - October 2, 1997, in San Diego, California ; a parallel session of the conference was held from October 21 - 22, 1997, in Tokyo, Japan ed.: Robin Cheung ... Warrendale, Pa. Materials Research Soc. 1998 XVIII, 765 S. Ill. txt rdacontent n rdamedia nc rdacarrier Materials Research Society conference proceedings ULSI (DE-588)4226286-0 gnd rswk-swf Metallisieren (DE-588)4169599-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1997 San Diego Calif. gnd-content (DE-588)1071861417 Konferenzschrift 1997 Tokio gnd-content ULSI (DE-588)4226286-0 s Metallisieren (DE-588)4169599-9 s DE-604 Cheung, Robin Sonstige oth Conference on Advanced Metallization and Interconnect Systems for ULSI Applications 14 1997 San Diego, Calif.; Tōkyō Sonstige (DE-588)5306163-9 oth |
| spellingShingle | Advanced metallization and interconnect systems for ULSI applications in 1997 proceedings of the conference held September 30 - October 2, 1997, in San Diego, California ; a parallel session of the conference was held from October 21 - 22, 1997, in Tokyo, Japan ULSI (DE-588)4226286-0 gnd Metallisieren (DE-588)4169599-9 gnd |
| subject_GND | (DE-588)4226286-0 (DE-588)4169599-9 (DE-588)1071861417 |
| title | Advanced metallization and interconnect systems for ULSI applications in 1997 proceedings of the conference held September 30 - October 2, 1997, in San Diego, California ; a parallel session of the conference was held from October 21 - 22, 1997, in Tokyo, Japan |
| title_auth | Advanced metallization and interconnect systems for ULSI applications in 1997 proceedings of the conference held September 30 - October 2, 1997, in San Diego, California ; a parallel session of the conference was held from October 21 - 22, 1997, in Tokyo, Japan |
| title_exact_search | Advanced metallization and interconnect systems for ULSI applications in 1997 proceedings of the conference held September 30 - October 2, 1997, in San Diego, California ; a parallel session of the conference was held from October 21 - 22, 1997, in Tokyo, Japan |
| title_full | Advanced metallization and interconnect systems for ULSI applications in 1997 proceedings of the conference held September 30 - October 2, 1997, in San Diego, California ; a parallel session of the conference was held from October 21 - 22, 1997, in Tokyo, Japan ed.: Robin Cheung ... |
| title_fullStr | Advanced metallization and interconnect systems for ULSI applications in 1997 proceedings of the conference held September 30 - October 2, 1997, in San Diego, California ; a parallel session of the conference was held from October 21 - 22, 1997, in Tokyo, Japan ed.: Robin Cheung ... |
| title_full_unstemmed | Advanced metallization and interconnect systems for ULSI applications in 1997 proceedings of the conference held September 30 - October 2, 1997, in San Diego, California ; a parallel session of the conference was held from October 21 - 22, 1997, in Tokyo, Japan ed.: Robin Cheung ... |
| title_short | Advanced metallization and interconnect systems for ULSI applications in 1997 |
| title_sort | advanced metallization and interconnect systems for ulsi applications in 1997 proceedings of the conference held september 30 october 2 1997 in san diego california a parallel session of the conference was held from october 21 22 1997 in tokyo japan |
| title_sub | proceedings of the conference held September 30 - October 2, 1997, in San Diego, California ; a parallel session of the conference was held from October 21 - 22, 1997, in Tokyo, Japan |
| topic | ULSI (DE-588)4226286-0 gnd Metallisieren (DE-588)4169599-9 gnd |
| topic_facet | ULSI Metallisieren Konferenzschrift 1997 San Diego Calif. Konferenzschrift 1997 Tokio |
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