Aspekte der SiC-Technologie: Micropipes und Implantantionsdefekte:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | German |
| Published: |
Erlangen
Lehrstuhl für Mikrocharakterisierung
1999
|
| Series: | Mikrostrukturelle Materialforschung
9 |
| Subjects: | |
| Physical Description: | 81 S. Ill., graph. Darst. |
| ISBN: | 3932392159 |
Staff View
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| 100 | 1 | |a Heindl, Jürgen |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Aspekte der SiC-Technologie: Micropipes und Implantantionsdefekte |c J. Heindl |
| 264 | 1 | |a Erlangen |b Lehrstuhl für Mikrocharakterisierung |c 1999 | |
| 300 | |a 81 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
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| 490 | 1 | |a Mikrostrukturelle Materialforschung |v 9 | |
| 502 | |a Zugl.: Erlangen-Nürnberg, Univ., Diss., 1999 | ||
| 650 | 0 | 7 | |a Zylindrischer Hohlraum |0 (DE-588)4191390-5 |2 gnd |9 rswk-swf |
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| 650 | 0 | 7 | |a Siliciumcarbid |0 (DE-588)4055009-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Technik |0 (DE-588)4059205-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Gitterbaufehler |0 (DE-588)4125030-8 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
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| 689 | 2 | 0 | |a Siliciumcarbid |0 (DE-588)4055009-6 |D s |
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| 689 | 2 | 2 | |a Gitterbaufehler |0 (DE-588)4125030-8 |D s |
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Record in the Search Index
| _version_ | 1804127261310320640 |
|---|---|
| any_adam_object | |
| author | Heindl, Jürgen |
| author_facet | Heindl, Jürgen |
| author_role | aut |
| author_sort | Heindl, Jürgen |
| author_variant | j h jh |
| building | Verbundindex |
| bvnumber | BV012608575 |
| classification_rvk | UP 3000 ZN 3460 |
| classification_tum | ELT 293d ELT 072d PHY 621d |
| ctrlnum | (OCoLC)76060871 (DE-599)BVBBV012608575 |
| discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Thesis Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV012608575 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:30:32Z |
| institution | BVB |
| isbn | 3932392159 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008563726 |
| oclc_num | 76060871 |
| open_access_boolean | |
| owner | DE-29 DE-29T DE-91 DE-BY-TUM DE-12 DE-634 |
| owner_facet | DE-29 DE-29T DE-91 DE-BY-TUM DE-12 DE-634 |
| physical | 81 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Lehrstuhl für Mikrocharakterisierung |
| record_format | marc |
| series | Mikrostrukturelle Materialforschung |
| series2 | Mikrostrukturelle Materialforschung |
| spelling | Heindl, Jürgen Verfasser aut Aspekte der SiC-Technologie: Micropipes und Implantantionsdefekte J. Heindl Erlangen Lehrstuhl für Mikrocharakterisierung 1999 81 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Mikrostrukturelle Materialforschung 9 Zugl.: Erlangen-Nürnberg, Univ., Diss., 1999 Zylindrischer Hohlraum (DE-588)4191390-5 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Siliciumcarbid (DE-588)4055009-6 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Technik (DE-588)4059205-4 gnd rswk-swf Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Silicium (DE-588)4077445-4 s Technik (DE-588)4059205-4 s Gitterbaufehler (DE-588)4125030-8 s DE-604 Siliciumcarbid (DE-588)4055009-6 s Zylindrischer Hohlraum (DE-588)4191390-5 s Ionenimplantation (DE-588)4027606-5 s Mikrostrukturelle Materialforschung 9 (DE-604)BV011287638 9 |
| spellingShingle | Heindl, Jürgen Aspekte der SiC-Technologie: Micropipes und Implantantionsdefekte Mikrostrukturelle Materialforschung Zylindrischer Hohlraum (DE-588)4191390-5 gnd Silicium (DE-588)4077445-4 gnd Siliciumcarbid (DE-588)4055009-6 gnd Ionenimplantation (DE-588)4027606-5 gnd Technik (DE-588)4059205-4 gnd Gitterbaufehler (DE-588)4125030-8 gnd |
| subject_GND | (DE-588)4191390-5 (DE-588)4077445-4 (DE-588)4055009-6 (DE-588)4027606-5 (DE-588)4059205-4 (DE-588)4125030-8 (DE-588)4113937-9 |
| title | Aspekte der SiC-Technologie: Micropipes und Implantantionsdefekte |
| title_auth | Aspekte der SiC-Technologie: Micropipes und Implantantionsdefekte |
| title_exact_search | Aspekte der SiC-Technologie: Micropipes und Implantantionsdefekte |
| title_full | Aspekte der SiC-Technologie: Micropipes und Implantantionsdefekte J. Heindl |
| title_fullStr | Aspekte der SiC-Technologie: Micropipes und Implantantionsdefekte J. Heindl |
| title_full_unstemmed | Aspekte der SiC-Technologie: Micropipes und Implantantionsdefekte J. Heindl |
| title_short | Aspekte der SiC-Technologie: Micropipes und Implantantionsdefekte |
| title_sort | aspekte der sic technologie micropipes und implantantionsdefekte |
| topic | Zylindrischer Hohlraum (DE-588)4191390-5 gnd Silicium (DE-588)4077445-4 gnd Siliciumcarbid (DE-588)4055009-6 gnd Ionenimplantation (DE-588)4027606-5 gnd Technik (DE-588)4059205-4 gnd Gitterbaufehler (DE-588)4125030-8 gnd |
| topic_facet | Zylindrischer Hohlraum Silicium Siliciumcarbid Ionenimplantation Technik Gitterbaufehler Hochschulschrift |
| volume_link | (DE-604)BV011287638 |
| work_keys_str_mv | AT heindljurgen aspektedersictechnologiemicropipesundimplantantionsdefekte |