Realization of a miniaturized electron beam column for low-energy lithography application:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
1997
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| Schlagworte: | |
| Beschreibung: | Neuchâtel, Univ., Diss., 1997 |
| Beschreibung: | 146 S. Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
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| author | Despont, Michel |
| author_facet | Despont, Michel |
| author_role | aut |
| author_sort | Despont, Michel |
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| bvnumber | BV012563328 |
| ctrlnum | (OCoLC)246619942 (DE-599)BVBBV012563328 |
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| illustrated | Illustrated |
| indexdate | 2024-07-09T18:29:44Z |
| institution | BVB |
| language | English |
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| physical | 146 S. Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
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| spelling | Despont, Michel Verfasser aut Realization of a miniaturized electron beam column for low-energy lithography application by Michel Despont 1997 146 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Neuchâtel, Univ., Diss., 1997 (DE-588)4113937-9 Hochschulschrift gnd-content |
| spellingShingle | Despont, Michel Realization of a miniaturized electron beam column for low-energy lithography application |
| subject_GND | (DE-588)4113937-9 |
| title | Realization of a miniaturized electron beam column for low-energy lithography application |
| title_auth | Realization of a miniaturized electron beam column for low-energy lithography application |
| title_exact_search | Realization of a miniaturized electron beam column for low-energy lithography application |
| title_full | Realization of a miniaturized electron beam column for low-energy lithography application by Michel Despont |
| title_fullStr | Realization of a miniaturized electron beam column for low-energy lithography application by Michel Despont |
| title_full_unstemmed | Realization of a miniaturized electron beam column for low-energy lithography application by Michel Despont |
| title_short | Realization of a miniaturized electron beam column for low-energy lithography application |
| title_sort | realization of a miniaturized electron beam column for low energy lithography application |
| topic_facet | Hochschulschrift |
| work_keys_str_mv | AT despontmichel realizationofaminiaturizedelectronbeamcolumnforlowenergylithographyapplication |