Handbook of physical vapor deposition (PVD) processing: film formation, adhesion, surface preparation and contamination control
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Westwood, NJ
Noyes Publ.
1998
|
| Series: | Noyes publications in materials science, process technology and semiconductors
|
| Subjects: | |
| Physical Description: | XXVII, 917 S. Ill., graph. Darst. |
| ISBN: | 0815514220 |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV012517834 | ||
| 003 | DE-604 | ||
| 005 | 20091127 | ||
| 007 | t | ||
| 008 | 990420s1998 ad|| |||| 00||| eng d | ||
| 020 | |a 0815514220 |9 0-8155-1422-0 | ||
| 035 | |a (OCoLC)37806270 | ||
| 035 | |a (DE-599)BVBBV012517834 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 |a DE-20 |a DE-91 | ||
| 050 | 0 | |a TS695 | |
| 082 | 0 | |a 671.7/35 |2 21 | |
| 084 | |a UP 7550 |0 (DE-625)146434: |2 rvk | ||
| 084 | |a FER 882f |2 stub | ||
| 100 | 1 | |a Mattox, Donald M. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Handbook of physical vapor deposition (PVD) processing |b film formation, adhesion, surface preparation and contamination control |c by Donald M. Mattox |
| 264 | 1 | |a Westwood, NJ |b Noyes Publ. |c 1998 | |
| 300 | |a XXVII, 917 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Noyes publications in materials science, process technology and semiconductors | |
| 650 | 7 | |a Galvanoplastia |2 larpcal | |
| 650 | 7 | |a Manuais |2 larpcal | |
| 650 | 4 | |a Physical vapor deposition |v Handbooks, manuals, etc | |
| 650 | 0 | 7 | |a PVD-Verfahren |0 (DE-588)4115673-0 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a PVD-Verfahren |0 (DE-588)4115673-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008497556 | ||
Record in the Search Index
| _version_ | 1804127162191577088 |
|---|---|
| any_adam_object | |
| author | Mattox, Donald M. |
| author_facet | Mattox, Donald M. |
| author_role | aut |
| author_sort | Mattox, Donald M. |
| author_variant | d m m dm dmm |
| building | Verbundindex |
| bvnumber | BV012517834 |
| callnumber-first | T - Technology |
| callnumber-label | TS695 |
| callnumber-raw | TS695 |
| callnumber-search | TS695 |
| callnumber-sort | TS 3695 |
| callnumber-subject | TS - Manufactures |
| classification_rvk | UP 7550 |
| classification_tum | FER 882f |
| ctrlnum | (OCoLC)37806270 (DE-599)BVBBV012517834 |
| dewey-full | 671.7/35 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 671 - Metalworking & primary metal products |
| dewey-raw | 671.7/35 |
| dewey-search | 671.7/35 |
| dewey-sort | 3671.7 235 |
| dewey-tens | 670 - Manufacturing |
| discipline | Physik Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01331nam a2200385 c 4500</leader><controlfield tag="001">BV012517834</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20091127 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">990420s1998 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0815514220</subfield><subfield code="9">0-8155-1422-0</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)37806270</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV012517834</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-20</subfield><subfield code="a">DE-91</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TS695</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">671.7/35</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7550</subfield><subfield code="0">(DE-625)146434:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">FER 882f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Mattox, Donald M.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of physical vapor deposition (PVD) processing</subfield><subfield code="b">film formation, adhesion, surface preparation and contamination control</subfield><subfield code="c">by Donald M. Mattox</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Westwood, NJ</subfield><subfield code="b">Noyes Publ.</subfield><subfield code="c">1998</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XXVII, 917 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Noyes publications in materials science, process technology and semiconductors</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Galvanoplastia</subfield><subfield code="2">larpcal</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Manuais</subfield><subfield code="2">larpcal</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Physical vapor deposition</subfield><subfield code="v">Handbooks, manuals, etc</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">PVD-Verfahren</subfield><subfield code="0">(DE-588)4115673-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">PVD-Verfahren</subfield><subfield code="0">(DE-588)4115673-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008497556</subfield></datafield></record></collection> |
| id | DE-604.BV012517834 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:28:58Z |
| institution | BVB |
| isbn | 0815514220 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008497556 |
| oclc_num | 37806270 |
| open_access_boolean | |
| owner | DE-703 DE-20 DE-91 DE-BY-TUM |
| owner_facet | DE-703 DE-20 DE-91 DE-BY-TUM |
| physical | XXVII, 917 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Noyes Publ. |
| record_format | marc |
| series2 | Noyes publications in materials science, process technology and semiconductors |
| spelling | Mattox, Donald M. Verfasser aut Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control by Donald M. Mattox Westwood, NJ Noyes Publ. 1998 XXVII, 917 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Noyes publications in materials science, process technology and semiconductors Galvanoplastia larpcal Manuais larpcal Physical vapor deposition Handbooks, manuals, etc PVD-Verfahren (DE-588)4115673-0 gnd rswk-swf PVD-Verfahren (DE-588)4115673-0 s DE-604 |
| spellingShingle | Mattox, Donald M. Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control Galvanoplastia larpcal Manuais larpcal Physical vapor deposition Handbooks, manuals, etc PVD-Verfahren (DE-588)4115673-0 gnd |
| subject_GND | (DE-588)4115673-0 |
| title | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control |
| title_auth | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control |
| title_exact_search | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control |
| title_full | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control by Donald M. Mattox |
| title_fullStr | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control by Donald M. Mattox |
| title_full_unstemmed | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control by Donald M. Mattox |
| title_short | Handbook of physical vapor deposition (PVD) processing |
| title_sort | handbook of physical vapor deposition pvd processing film formation adhesion surface preparation and contamination control |
| title_sub | film formation, adhesion, surface preparation and contamination control |
| topic | Galvanoplastia larpcal Manuais larpcal Physical vapor deposition Handbooks, manuals, etc PVD-Verfahren (DE-588)4115673-0 gnd |
| topic_facet | Galvanoplastia Manuais Physical vapor deposition Handbooks, manuals, etc PVD-Verfahren |
| work_keys_str_mv | AT mattoxdonaldm handbookofphysicalvapordepositionpvdprocessingfilmformationadhesionsurfacepreparationandcontaminationcontrol |