Handbook of physical vapor deposition (PVD) processing: film formation, adhesion, surface preparation and contamination control
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Westwood, NJ
Noyes Publ.
1998
|
| Schriftenreihe: | Noyes publications in materials science, process technology and semiconductors
|
| Schlagworte: | |
| Beschreibung: | XXVII, 917 S. Ill., graph. Darst. |
| ISBN: | 0815514220 |
Internformat
MARC
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| 100 | 1 | |a Mattox, Donald M. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Handbook of physical vapor deposition (PVD) processing |b film formation, adhesion, surface preparation and contamination control |c by Donald M. Mattox |
| 264 | 1 | |a Westwood, NJ |b Noyes Publ. |c 1998 | |
| 300 | |a XXVII, 917 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Noyes publications in materials science, process technology and semiconductors | |
| 650 | 7 | |a Galvanoplastia |2 larpcal | |
| 650 | 7 | |a Manuais |2 larpcal | |
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Mattox, Donald M. |
| author_facet | Mattox, Donald M. |
| author_role | aut |
| author_sort | Mattox, Donald M. |
| author_variant | d m m dm dmm |
| building | Verbundindex |
| bvnumber | BV012517834 |
| callnumber-first | T - Technology |
| callnumber-label | TS695 |
| callnumber-raw | TS695 |
| callnumber-search | TS695 |
| callnumber-sort | TS 3695 |
| callnumber-subject | TS - Manufactures |
| classification_rvk | UP 7550 |
| classification_tum | FER 882f |
| ctrlnum | (OCoLC)37806270 (DE-599)BVBBV012517834 |
| dewey-full | 671.7/35 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 671 - Metalworking & primary metal products |
| dewey-raw | 671.7/35 |
| dewey-search | 671.7/35 |
| dewey-sort | 3671.7 235 |
| dewey-tens | 670 - Manufacturing |
| discipline | Physik Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
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| id | DE-604.BV012517834 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:28:58Z |
| institution | BVB |
| isbn | 0815514220 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008497556 |
| oclc_num | 37806270 |
| open_access_boolean | |
| owner | DE-703 DE-20 DE-91 DE-BY-TUM |
| owner_facet | DE-703 DE-20 DE-91 DE-BY-TUM |
| physical | XXVII, 917 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Noyes Publ. |
| record_format | marc |
| series2 | Noyes publications in materials science, process technology and semiconductors |
| spelling | Mattox, Donald M. Verfasser aut Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control by Donald M. Mattox Westwood, NJ Noyes Publ. 1998 XXVII, 917 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Noyes publications in materials science, process technology and semiconductors Galvanoplastia larpcal Manuais larpcal Physical vapor deposition Handbooks, manuals, etc PVD-Verfahren (DE-588)4115673-0 gnd rswk-swf PVD-Verfahren (DE-588)4115673-0 s DE-604 |
| spellingShingle | Mattox, Donald M. Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control Galvanoplastia larpcal Manuais larpcal Physical vapor deposition Handbooks, manuals, etc PVD-Verfahren (DE-588)4115673-0 gnd |
| subject_GND | (DE-588)4115673-0 |
| title | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control |
| title_auth | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control |
| title_exact_search | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control |
| title_full | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control by Donald M. Mattox |
| title_fullStr | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control by Donald M. Mattox |
| title_full_unstemmed | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control by Donald M. Mattox |
| title_short | Handbook of physical vapor deposition (PVD) processing |
| title_sort | handbook of physical vapor deposition pvd processing film formation adhesion surface preparation and contamination control |
| title_sub | film formation, adhesion, surface preparation and contamination control |
| topic | Galvanoplastia larpcal Manuais larpcal Physical vapor deposition Handbooks, manuals, etc PVD-Verfahren (DE-588)4115673-0 gnd |
| topic_facet | Galvanoplastia Manuais Physical vapor deposition Handbooks, manuals, etc PVD-Verfahren |
| work_keys_str_mv | AT mattoxdonaldm handbookofphysicalvapordepositionpvdprocessingfilmformationadhesionsurfacepreparationandcontaminationcontrol |