Defects and diffusion in silicon processing: symposium held April 1 - 4, 1997, San Francisco, California, USA
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Pittsburgh, Pa.
Materials Research Soc.
1997
|
| Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings
469 |
| Schlagworte: | |
| Beschreibung: | XV, 541 S. Ill., graph. Darst. |
| ISBN: | 1558993738 |
Internformat
MARC
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| 245 | 1 | 0 | |a Defects and diffusion in silicon processing |b symposium held April 1 - 4, 1997, San Francisco, California, USA |c ed.: Tomas Diaz de la Rubia ... |
| 264 | 1 | |a Pittsburgh, Pa. |b Materials Research Soc. |c 1997 | |
| 300 | |a XV, 541 S. |b Ill., graph. Darst. | ||
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| 490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings |v 469 | |
| 650 | 4 | |a Semiconductor doping |v Congresses | |
| 650 | 4 | |a Semiconductors |x Defects |v Congresses | |
| 650 | 4 | |a Silicon crystals |x Defects |v Congresses | |
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Datensatz im Suchindex
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| genre | (DE-588)1071861417 Konferenzschrift 1997 San Francisco Calif. gnd-content |
| genre_facet | Konferenzschrift 1997 San Francisco Calif. |
| id | DE-604.BV012509866 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:28:48Z |
| institution | BVB |
| isbn | 1558993738 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008490654 |
| oclc_num | 37457922 |
| open_access_boolean | |
| owner | DE-703 DE-29T |
| owner_facet | DE-703 DE-29T |
| physical | XV, 541 S. Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Defects and diffusion in silicon processing symposium held April 1 - 4, 1997, San Francisco, California, USA ed.: Tomas Diaz de la Rubia ... Pittsburgh, Pa. Materials Research Soc. 1997 XV, 541 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 469 Semiconductor doping Congresses Semiconductors Defects Congresses Silicon crystals Defects Congresses Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf Dotierung (DE-588)4130672-7 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1997 San Francisco Calif. gnd-content Halbleiter (DE-588)4022993-2 s Dotierung (DE-588)4130672-7 s Gitterbaufehler (DE-588)4125030-8 s DE-604 Diaz De La Rubia, Tomás Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 469 (DE-604)BV001899105 469 |
| spellingShingle | Defects and diffusion in silicon processing symposium held April 1 - 4, 1997, San Francisco, California, USA Materials Research Society: Materials Research Society symposia proceedings Semiconductor doping Congresses Semiconductors Defects Congresses Silicon crystals Defects Congresses Gitterbaufehler (DE-588)4125030-8 gnd Dotierung (DE-588)4130672-7 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4125030-8 (DE-588)4130672-7 (DE-588)4022993-2 (DE-588)1071861417 |
| title | Defects and diffusion in silicon processing symposium held April 1 - 4, 1997, San Francisco, California, USA |
| title_auth | Defects and diffusion in silicon processing symposium held April 1 - 4, 1997, San Francisco, California, USA |
| title_exact_search | Defects and diffusion in silicon processing symposium held April 1 - 4, 1997, San Francisco, California, USA |
| title_full | Defects and diffusion in silicon processing symposium held April 1 - 4, 1997, San Francisco, California, USA ed.: Tomas Diaz de la Rubia ... |
| title_fullStr | Defects and diffusion in silicon processing symposium held April 1 - 4, 1997, San Francisco, California, USA ed.: Tomas Diaz de la Rubia ... |
| title_full_unstemmed | Defects and diffusion in silicon processing symposium held April 1 - 4, 1997, San Francisco, California, USA ed.: Tomas Diaz de la Rubia ... |
| title_short | Defects and diffusion in silicon processing |
| title_sort | defects and diffusion in silicon processing symposium held april 1 4 1997 san francisco california usa |
| title_sub | symposium held April 1 - 4, 1997, San Francisco, California, USA |
| topic | Semiconductor doping Congresses Semiconductors Defects Congresses Silicon crystals Defects Congresses Gitterbaufehler (DE-588)4125030-8 gnd Dotierung (DE-588)4130672-7 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Semiconductor doping Congresses Semiconductors Defects Congresses Silicon crystals Defects Congresses Gitterbaufehler Dotierung Halbleiter Konferenzschrift 1997 San Francisco Calif. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT diazdelarubiatomas defectsanddiffusioninsiliconprocessingsymposiumheldapril141997sanfranciscocaliforniausa |