Proceedings of the Workshop on Refractory Metals and Silicides for VLSI IV: 12-15 May 1986, San Juan Bautista, Calif.
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Institute of Physics
1986
|
| Schriftenreihe: | Journal of vacuum science and technology
4,6 |
| Schlagworte: | |
| Beschreibung: | Einzelaufn. e. Zeitschr.-Bandes |
| Beschreibung: | S. [1321] - 1415 Ill., graph. Darst. |
Internformat
MARC
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| 110 | 2 | |a Workshop on Refractory Metals and Silicides for VLSI (4, 1986, San Juan Bautista, Calif.) |e Verfasser |0 (DE-588)16137562-5 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the Workshop on Refractory Metals and Silicides for VLSI IV |b 12-15 May 1986, San Juan Bautista, Calif. |c special ed. for the proceedings: Michael D. Strathman |
| 264 | 1 | |a New York |b American Institute of Physics |c 1986 | |
| 300 | |a S. [1321] - 1415 |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science and technology |v 4,6 | |
| 500 | |a Einzelaufn. e. Zeitschr.-Bandes | ||
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| 650 | 0 | 7 | |a Siliciumverbindungen |0 (DE-588)4124194-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a VLSI |0 (DE-588)4117388-0 |2 gnd |9 rswk-swf |
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| 689 | 1 | 0 | |a Metall |0 (DE-588)4038860-8 |D s |
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| 700 | 1 | |a Strathman, Michael D. |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| author_sort | Workshop on Refractory Metals and Silicides for VLSI (4, 1986, San Juan Bautista, Calif.) |
| building | Verbundindex |
| bvnumber | BV012497831 |
| classification_tum | WER 510f |
| ctrlnum | (OCoLC)633369870 (DE-599)BVBBV012497831 |
| discipline | Werkstoffwissenschaften |
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| genre | (DE-588)1071861417 Konferenzschrift 1986 San Juan Bautista Calif. gnd-content |
| genre_facet | Konferenzschrift 1986 San Juan Bautista Calif. |
| id | DE-604.BV012497831 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:28:40Z |
| institution | BVB |
| institution_GND | (DE-588)16137562-5 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008485103 |
| oclc_num | 633369870 |
| open_access_boolean | |
| owner | DE-91G DE-BY-TUM |
| owner_facet | DE-91G DE-BY-TUM |
| physical | S. [1321] - 1415 Ill., graph. Darst. |
| publishDate | 1986 |
| publishDateSearch | 1986 |
| publishDateSort | 1986 |
| publisher | American Institute of Physics |
| record_format | marc |
| series2 | Journal of vacuum science and technology |
| spelling | Workshop on Refractory Metals and Silicides for VLSI (4, 1986, San Juan Bautista, Calif.) Verfasser (DE-588)16137562-5 aut Proceedings of the Workshop on Refractory Metals and Silicides for VLSI IV 12-15 May 1986, San Juan Bautista, Calif. special ed. for the proceedings: Michael D. Strathman New York American Institute of Physics 1986 S. [1321] - 1415 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science and technology 4,6 Einzelaufn. e. Zeitschr.-Bandes Metall (DE-588)4038860-8 gnd rswk-swf Feuerfestigkeit (DE-588)4154266-6 gnd rswk-swf Siliciumverbindungen (DE-588)4124194-0 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1986 San Juan Bautista Calif. gnd-content VLSI (DE-588)4117388-0 s Siliciumverbindungen (DE-588)4124194-0 s DE-604 Metall (DE-588)4038860-8 s Feuerfestigkeit (DE-588)4154266-6 s Strathman, Michael D. Sonstige oth |
| spellingShingle | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI IV 12-15 May 1986, San Juan Bautista, Calif. Metall (DE-588)4038860-8 gnd Feuerfestigkeit (DE-588)4154266-6 gnd Siliciumverbindungen (DE-588)4124194-0 gnd VLSI (DE-588)4117388-0 gnd |
| subject_GND | (DE-588)4038860-8 (DE-588)4154266-6 (DE-588)4124194-0 (DE-588)4117388-0 (DE-588)1071861417 |
| title | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI IV 12-15 May 1986, San Juan Bautista, Calif. |
| title_auth | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI IV 12-15 May 1986, San Juan Bautista, Calif. |
| title_exact_search | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI IV 12-15 May 1986, San Juan Bautista, Calif. |
| title_full | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI IV 12-15 May 1986, San Juan Bautista, Calif. special ed. for the proceedings: Michael D. Strathman |
| title_fullStr | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI IV 12-15 May 1986, San Juan Bautista, Calif. special ed. for the proceedings: Michael D. Strathman |
| title_full_unstemmed | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI IV 12-15 May 1986, San Juan Bautista, Calif. special ed. for the proceedings: Michael D. Strathman |
| title_short | Proceedings of the Workshop on Refractory Metals and Silicides for VLSI IV |
| title_sort | proceedings of the workshop on refractory metals and silicides for vlsi iv 12 15 may 1986 san juan bautista calif |
| title_sub | 12-15 May 1986, San Juan Bautista, Calif. |
| topic | Metall (DE-588)4038860-8 gnd Feuerfestigkeit (DE-588)4154266-6 gnd Siliciumverbindungen (DE-588)4124194-0 gnd VLSI (DE-588)4117388-0 gnd |
| topic_facet | Metall Feuerfestigkeit Siliciumverbindungen VLSI Konferenzschrift 1986 San Juan Bautista Calif. |
| work_keys_str_mv | AT workshoponrefractorymetalsandsilicidesforvlsi41986sanjuanbautistacalif proceedingsoftheworkshoponrefractorymetalsandsilicidesforvlsiiv1215may1986sanjuanbautistacalif AT strathmanmichaeld proceedingsoftheworkshoponrefractorymetalsandsilicidesforvlsiiv1215may1986sanjuanbautistacalif |