Materials issues in vacuum microelectronics: symposium held April 13 - 16, 1998, San Francisco, California, U.S.A.
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
1998
|
| Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings
509 |
| Schlagworte: | |
| Beschreibung: | XI, 207 S. Ill., graph. Darst. |
| ISBN: | 1558994157 |
Internformat
MARC
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| 245 | 1 | 0 | |a Materials issues in vacuum microelectronics |b symposium held April 13 - 16, 1998, San Francisco, California, U.S.A. |c ed. Wei Zhu ... |
| 264 | 1 | |a Warrendale, Pa. |b Materials Research Soc. |c 1998 | |
| 300 | |a XI, 207 S. |b Ill., graph. Darst. | ||
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Datensatz im Suchindex
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| genre | (DE-588)1071861417 Konferenzschrift 1998 San Francisco Calif. gnd-content |
| genre_facet | Konferenzschrift 1998 San Francisco Calif. |
| id | DE-604.BV012471444 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:28:10Z |
| institution | BVB |
| isbn | 1558994157 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008463761 |
| oclc_num | 39361160 |
| open_access_boolean | |
| owner | DE-703 DE-83 |
| owner_facet | DE-703 DE-83 |
| physical | XI, 207 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Materials issues in vacuum microelectronics symposium held April 13 - 16, 1998, San Francisco, California, U.S.A. ed. Wei Zhu ... Warrendale, Pa. Materials Research Soc. 1998 XI, 207 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 509 Field emission cathodes Congresses Ion implantation Congresses Thin films Congresses Vacuum microelectronics Congresses Vakuumtechnik (DE-588)4062270-8 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1998 San Francisco Calif. gnd-content Mikroelektronik (DE-588)4039207-7 s Vakuumtechnik (DE-588)4062270-8 s DE-604 Zhu, Wei Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 509 (DE-604)BV001899105 509 |
| spellingShingle | Materials issues in vacuum microelectronics symposium held April 13 - 16, 1998, San Francisco, California, U.S.A. Materials Research Society: Materials Research Society symposia proceedings Field emission cathodes Congresses Ion implantation Congresses Thin films Congresses Vacuum microelectronics Congresses Vakuumtechnik (DE-588)4062270-8 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4062270-8 (DE-588)4039207-7 (DE-588)1071861417 |
| title | Materials issues in vacuum microelectronics symposium held April 13 - 16, 1998, San Francisco, California, U.S.A. |
| title_auth | Materials issues in vacuum microelectronics symposium held April 13 - 16, 1998, San Francisco, California, U.S.A. |
| title_exact_search | Materials issues in vacuum microelectronics symposium held April 13 - 16, 1998, San Francisco, California, U.S.A. |
| title_full | Materials issues in vacuum microelectronics symposium held April 13 - 16, 1998, San Francisco, California, U.S.A. ed. Wei Zhu ... |
| title_fullStr | Materials issues in vacuum microelectronics symposium held April 13 - 16, 1998, San Francisco, California, U.S.A. ed. Wei Zhu ... |
| title_full_unstemmed | Materials issues in vacuum microelectronics symposium held April 13 - 16, 1998, San Francisco, California, U.S.A. ed. Wei Zhu ... |
| title_short | Materials issues in vacuum microelectronics |
| title_sort | materials issues in vacuum microelectronics symposium held april 13 16 1998 san francisco california u s a |
| title_sub | symposium held April 13 - 16, 1998, San Francisco, California, U.S.A. |
| topic | Field emission cathodes Congresses Ion implantation Congresses Thin films Congresses Vacuum microelectronics Congresses Vakuumtechnik (DE-588)4062270-8 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Field emission cathodes Congresses Ion implantation Congresses Thin films Congresses Vacuum microelectronics Congresses Vakuumtechnik Mikroelektronik Konferenzschrift 1998 San Francisco Calif. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT zhuwei materialsissuesinvacuummicroelectronicssymposiumheldapril13161998sanfranciscocaliforniausa |