Low-energy ion irradiation of solid surfaces:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
1999
|
| Schriftenreihe: | Springer tracts in modern physics
146 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | VIII, 293 S. Ill., graph. Darst. |
| ISBN: | 3540650075 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV012196764 | ||
| 003 | DE-604 | ||
| 005 | 20190327 | ||
| 007 | t | ||
| 008 | 981006s1999 gw ad|| |||| 00||| eng d | ||
| 016 | 7 | |a 954717473 |2 DE-101 | |
| 020 | |a 3540650075 |c Pp. : DM 259.00 |9 3-540-65007-5 | ||
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| 100 | 1 | |a Gnaser, Hubert |d 1953- |e Verfasser |0 (DE-588)120507838 |4 aut | |
| 245 | 1 | 0 | |a Low-energy ion irradiation of solid surfaces |c Hubert Gnaser |
| 246 | 1 | 3 | |a Low energy ion irradiation of solid surfaces |
| 264 | 1 | |a Berlin [u.a.] |b Springer |c 1999 | |
| 300 | |a VIII, 293 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Springer tracts in modern physics |v 146 | |
| 650 | 4 | |a Bombardement ionique | |
| 650 | 7 | |a Bombardement ionique |2 ram | |
| 650 | 7 | |a Solides - Effets de rayonnements |2 ram | |
| 650 | 4 | |a Solides, Effets du rayonnement sur les | |
| 650 | 7 | |a Surfaces (physique) |2 ram | |
| 650 | 4 | |a Ion bombardment | |
| 650 | 4 | |a Solids |x Effect of radiation on | |
| 650 | 0 | 7 | |a Sputtern |0 (DE-588)4182614-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Festkörperoberfläche |0 (DE-588)4127823-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Niedrige Energie |0 (DE-588)4356330-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ionenbestrahlung |0 (DE-588)4335201-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Festkörperoberfläche |0 (DE-588)4127823-9 |D s |
| 689 | 0 | 1 | |a Sputtern |0 (DE-588)4182614-0 |D s |
| 689 | 0 | 2 | |a Niedrige Energie |0 (DE-588)4356330-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Festkörperoberfläche |0 (DE-588)4127823-9 |D s |
| 689 | 1 | 1 | |a Ionenbestrahlung |0 (DE-588)4335201-7 |D s |
| 689 | 1 | 2 | |a Niedrige Energie |0 (DE-588)4356330-2 |D s |
| 689 | 1 | |5 DE-604 | |
| 830 | 0 | |a Springer tracts in modern physics |v 146 |w (DE-604)BV000000153 |9 146 | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008264584&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
Datensatz im Suchindex
| _version_ | 1805068169149153280 |
|---|---|
| adam_text |
CONTENTS
1.
INTRODUCTION
.
1
2.
INTERACTION
OF
LOW-ENERGY
IONS
WITH
SOLIDS
.
7
2.1
ENERGY
LOSS
AND
SLOWING
DOWN
OF
INCIDENT
PARTICLES
.
8
2.1.1
STOPPING
CROSS
SECTIONS
.
8
2.1.2
ION
RANGES
IN
SOLIDS
.
12
2.1.3
ENERGY
TRANSFER
TO
THE
SURFACE
.
15
2.2
DISPLACEMENT
CASCADES
AND
GENERATION
OF
DEFECTS
.
17
2.2.1
BULK
DAMAGE
.
19
2.2.2
FORMATION
OF
SURFACE
VACANCIES
AND
ADATOMS
.
24
2.2.3
EXTENDED
SURFACE
DAMAGE
.
32
2.3
SPUTTERING
OF
PARTICLES
FROM
ELEMENTAL
TARGETS
.
37
2.3.1
LINEAR
COLLISION
CASCADE
.
38
2.3.2
SINGLE-KNOCKON
(NEAR-THRESHOLD)
REGIME
.
49
2.3.3
SPUTTERING
FROM
SINGLE
CRYSTALS
.
55
2.3.4
CLUSTER
EMISSION
IN
SPUTTERING
.
62
2.4
CLUSTER-ION
BOMBARDMENT
.
74
3.
COMPOSITION
CHANGES
IN
MULTICOMPONENT
MATERIALS
.
83
3.1
PREFERENTIAL
SPUTTERING
.
85
3.1.1
THEORETICAL
CONCEPTS
.
87
3.1.2
SURFACE
BINDING
ENERGIES
IN
ALLOYS
.
91
3.2
PROCESSES
EFFECTING
COMPOSITION
CHANGES
.
95
3.2.1
FLUENCE
DEPENDENCE
AND
STATIONARY
STATE
.
95
3.2.2
COLLISIONAL
MIXING
.
96
3.2.3
GIBBSIAN
SEGREGATION
.
105
3.2.4
RADIATION-ENHANCED
DIFFUSION
.
109
3.2.5
RADIATION-INDUCED
SEGREGATION
.
ILL
3.3
DATA
FROM
ALLOYS
.
112
3.3.1
NEAR-SURFACE
COMPOSITION
CHANGES
AND
PROFILES
.
113
3.3.2
ANGULAR
DISTRIBUTIONS
OF
SPUTTERED
ATOMS
.
123
3.3.3
ENERGY
SPECTRA
OF
SPUTTERED
SPECIES
.
127
3.3.4
MASS
DISTRIBUTIONS
OF
SPUTTERED
ATOMS
AND
CLUSTERS
.
129
VIII
CONTENTS
3.4
SPUTTERING
OF
ISOTOPIC
MIXTURES
.
133
3.4.1
TRANSIENT
VARIATIONS
OF
THE
ISOTOPIC
FLUX
COMPOSITION
.
138
3.4.2
EMISSION-ANGLE-DEPENDENT
ISOTOPIC
FLUX
.
140
3.4.3
COMPUTER
SIMULATIONS
OF
ISOTOPE
SPUTTERING
.
141
3.4.4
SUMMARY
OF
ISOTOPE
SPUTTERING
.
149
4.
ION
BOMBARDMENT
OF
CRYSTALLINE
SEMICONDUCTORS
.
153
4.1
SURFACE
MORPHOLOGY:
DEFECT
AND
ADATOM
FORMATION
.
155
4.1.1
SINGLE-ION
IMPACTS
AND
SURFACE
DEFECTS
.
155
4.1.2
MULTILAYER
REMOVAL
AND
SURFACE
ROUGHENING
.
162
4.2
NEAR-SURFACE
STRUCTURAL
MODIFICATIONS
.
167
4.2.1
AMORPHIZED
SURFACE
LAYER
.
168
4.2.2
ION-ENERGY
AND
FLUENCE
DEPENDENCE
OF
AMORPHIZATION
.
173
4.2.3
BULK
VERSUS
SURFACE
DEFECTS:
COMPUTATIONS
OF
DEFECT
PRODUCTION
.
186
4.3
MODIFICATION
OF
ELECTRONIC
PROPERTIES
.
191
4.4
COMPOSITION
CHANGES
IN
COMPOUND
SEMICONDUCTORS
.
195
4.4.1
GAAS(HO)
.
195
4.4.2
OTHER
SEMICONDUCTORS
.
201
5.
IONIZATION
PROCESSES
OF
SPUTTERED
ATOMS
AND
MOLECULES
.
205
5.1
MECHANISMS
OF
SECONDARY-ION
FORMATION:
IONIZATION
PROBABILITY
OF
SPUTTERED
IONS
.
207
5.1.1
ELECTRON-TUNNELING
MODEL
.
207
5.1.2
BOND-BREAKING
MODEL
.
213
5.2
SPUTTERING
WITH
CS
+
IONS
.
217
5.2.1
CESIUM
IMPLANTATION
DISTRIBUTION
.
219
5.2.2
WORK-FUNCTION
CHANGES
DUE
TO
CS
INCORPORATION
.
221
5.2.3
CORRELATION
BETWEEN
WORK
FUNCTION
AND
IONIZATION
.
225
5.3
ISOTOPIC
MASS
EFFECTS
IN
SPUTTERED-ION
FORMATION
.
228
5.4
FORMATION
OF
MOLECULAR
IONS
IN
SPUTTERING
.
234
5.4.1
CS-CARRYING
DIATOMIC
CATIONS
.
236
5.4.2
DOUBLY
CHARGED
NEGATIVE
CYY~
CLUSTERS
.
239
5.4.3
SPUTTERING
OF
METASTABLE
N^
AND
CO
-
ANIONS
.
243
5.5
ION
EMISSION
UNDER
MULTIPLY-CHARGED-ION
BOMBARDMENT
.
246
APPENDIX
.
251
A.L
EXPERIMENTAL
TECHNIQUES
.
251
A.2
COMPUTER
SIMULATIONS
.
256
REFERENCES
.
259
INDEX
.
291 |
| any_adam_object | 1 |
| author | Gnaser, Hubert 1953- |
| author_GND | (DE-588)120507838 |
| author_facet | Gnaser, Hubert 1953- |
| author_role | aut |
| author_sort | Gnaser, Hubert 1953- |
| author_variant | h g hg |
| building | Verbundindex |
| bvnumber | BV012196764 |
| callnumber-first | Q - Science |
| callnumber-label | Q111 |
| callnumber-raw | Q111 QC1 |
| callnumber-search | Q111 QC1 |
| callnumber-sort | Q 3111 |
| callnumber-subject | Q - General Science |
| classification_rvk | UD 9310 UP 7800 |
| classification_tum | PHY 790f WER 770f |
| ctrlnum | (OCoLC)40104952 (DE-599)BVBBV012196764 |
| dewey-full | 539 530.4/16 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 539 - Modern physics 530 - Physics |
| dewey-raw | 539 530.4/16 |
| dewey-search | 539 530.4/16 |
| dewey-sort | 3539 |
| dewey-tens | 530 - Physics |
| discipline | Physik Werkstoffwissenschaften |
| format | Book |
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| id | DE-604.BV012196764 |
| illustrated | Illustrated |
| indexdate | 2024-07-20T03:45:51Z |
| institution | BVB |
| isbn | 3540650075 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008264584 |
| oclc_num | 40104952 |
| open_access_boolean | |
| owner | DE-355 DE-BY-UBR DE-19 DE-BY-UBM DE-29T DE-703 DE-91G DE-BY-TUM DE-634 DE-11 DE-188 |
| owner_facet | DE-355 DE-BY-UBR DE-19 DE-BY-UBM DE-29T DE-703 DE-91G DE-BY-TUM DE-634 DE-11 DE-188 |
| physical | VIII, 293 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Springer |
| record_format | marc |
| series | Springer tracts in modern physics |
| series2 | Springer tracts in modern physics |
| spelling | Gnaser, Hubert 1953- Verfasser (DE-588)120507838 aut Low-energy ion irradiation of solid surfaces Hubert Gnaser Low energy ion irradiation of solid surfaces Berlin [u.a.] Springer 1999 VIII, 293 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer tracts in modern physics 146 Bombardement ionique Bombardement ionique ram Solides - Effets de rayonnements ram Solides, Effets du rayonnement sur les Surfaces (physique) ram Ion bombardment Solids Effect of radiation on Sputtern (DE-588)4182614-0 gnd rswk-swf Festkörperoberfläche (DE-588)4127823-9 gnd rswk-swf Niedrige Energie (DE-588)4356330-2 gnd rswk-swf Ionenbestrahlung (DE-588)4335201-7 gnd rswk-swf Festkörperoberfläche (DE-588)4127823-9 s Sputtern (DE-588)4182614-0 s Niedrige Energie (DE-588)4356330-2 s DE-604 Ionenbestrahlung (DE-588)4335201-7 s Springer tracts in modern physics 146 (DE-604)BV000000153 146 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008264584&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Gnaser, Hubert 1953- Low-energy ion irradiation of solid surfaces Springer tracts in modern physics Bombardement ionique Bombardement ionique ram Solides - Effets de rayonnements ram Solides, Effets du rayonnement sur les Surfaces (physique) ram Ion bombardment Solids Effect of radiation on Sputtern (DE-588)4182614-0 gnd Festkörperoberfläche (DE-588)4127823-9 gnd Niedrige Energie (DE-588)4356330-2 gnd Ionenbestrahlung (DE-588)4335201-7 gnd |
| subject_GND | (DE-588)4182614-0 (DE-588)4127823-9 (DE-588)4356330-2 (DE-588)4335201-7 |
| title | Low-energy ion irradiation of solid surfaces |
| title_alt | Low energy ion irradiation of solid surfaces |
| title_auth | Low-energy ion irradiation of solid surfaces |
| title_exact_search | Low-energy ion irradiation of solid surfaces |
| title_full | Low-energy ion irradiation of solid surfaces Hubert Gnaser |
| title_fullStr | Low-energy ion irradiation of solid surfaces Hubert Gnaser |
| title_full_unstemmed | Low-energy ion irradiation of solid surfaces Hubert Gnaser |
| title_short | Low-energy ion irradiation of solid surfaces |
| title_sort | low energy ion irradiation of solid surfaces |
| topic | Bombardement ionique Bombardement ionique ram Solides - Effets de rayonnements ram Solides, Effets du rayonnement sur les Surfaces (physique) ram Ion bombardment Solids Effect of radiation on Sputtern (DE-588)4182614-0 gnd Festkörperoberfläche (DE-588)4127823-9 gnd Niedrige Energie (DE-588)4356330-2 gnd Ionenbestrahlung (DE-588)4335201-7 gnd |
| topic_facet | Bombardement ionique Solides - Effets de rayonnements Solides, Effets du rayonnement sur les Surfaces (physique) Ion bombardment Solids Effect of radiation on Sputtern Festkörperoberfläche Niedrige Energie Ionenbestrahlung |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008264584&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV000000153 |
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