Trends and new applications of thin films: proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998
Gespeichert in:
| Format: | Tagungsbericht Buch |
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| Sprache: | English |
| Veröffentlicht: |
Uetikon-Zuerich [u.a.]
Trans Tech Publ.
1998
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| Schriftenreihe: | Materials science forum
287/288 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XV, 558 S. Ill., graph. Darst. |
| ISBN: | 087849815X |
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| 245 | 1 | 0 | |a Trends and new applications of thin films |b proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998 |c ed.: Horst Hoffmann |
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Datensatz im Suchindex
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| adam_text | TRENDS AND NEW APPLICATIONS OF THIN FILMS PROCEEDINGS OF THE 6TH
INTERNATIONAL SYMPOSIUM ON TRENDS AND NEW APPLICATIONS OF THIN FILMS
(TATF 98), REGENSBURG, GERMANY, MARCH 1998 EDITOR: HORST HOFFMANN W)
TRANS TECH PUBLICATIONS LTD SWITZERLAND * GERMANY * UK * USA TABLE OF
CONTENTS PREFACE OF THE EDITOR 1. SHORT COURSES (INVITED) DIAGNOSTICS IN
REACTIVE PLASMAS WITH OPTICAL EMISSION SPECTROSCOPY, PROBE MEASUREMENT
AND ENERGY-MASS SPECTROMETRY P. AWAKOWICZ 3 CRYSTALLOGRAPHY AND
MICROSTRUCTURE OF THIN FILMS STUDIED BY X-RAY AND ELECTRON DIFFRACTION
R.A. SCHWARZER 23 SURFACE AND THIN FILM ANALYSIS WITH ELECTRON AND MASS
SPECTROMETRIC TECHNIQUES A. WUCHER 61 2. PLENARY TALKS (INVITED) THE
MANUFACTURE OF THIN FILM TRANSISTORS AND COLOR FILTERS FOR FIAT LIQUID
CRYSTAL DISPLAYS E. LUEDER 87 DOPING DIAMONDS AND DIAMOND FILMS FOR
ELECTRONIC APPLICATIONS R. KALISH 97 RECENT RESULTS ON REACTIVE
MAGNETRON SPUTTERING FOR HIGH-RATE DEPOSITION OF CERAMIC COMPOUND FILMS
A. BILLARD AND C. FRANTZ 107 3. INVITED PAPERS FABRICATION OF MICRO- AND
NANOSTRUCTURES R. KASSING 119 MODELLING OF PVC PROCESSES J. MACHET, C.
GAUTIER, P. CLEDAT AND O. PIOT 131 REAL TIME OPTICAL METHOD OF STRESS
MEASUREMENTS IN THIN FILMS G. MOULARD, G. CONTOUX, G. MOTYL AND M.
COURBON 141 SPECTROELLIPSOMETRIC METHOD FOR PROCESS MONITORING OF
SEMICONDUCTOR THIN FILMS AND INTERFACES R. BRENOT, M. KILDEMO AND B.
DREVILLON 151 GIANT MAGNETORESISTIVE SENSORS FOR INDUSTRIAL APPLICATIONS
J. WECKER, W. CLEMENS AND E. HUFGARD 159 VIII TRENDS AND NEW
APPLICATIONS OF THIN FILMS BIOACTIVE FILMS A. HENGERER, E. PROHASKA, J.
DECKER, S. HAUCK, E. YACOUB, C. KOESSLINGER, U. REISCHL, S. DROST AND H.
WOLF 169 4. DEPOSITION PROCESSES IN-SITU CONTROL OF STOICHIOMETRY IN
ROOM TEMPERATURE MBE-GROWTH OF ZR0 2 THIN FILMS USING A NOVEL
HYPERTHERMAL OXYGEN ATOM SOURCE E. WISOTZKI, H. HAHN AND G.B. HOFLUND
181 SURFACE ANALYSIS OF HARD COATINGS DEPOSITED BY MODIFIED PULSE ARE
PROCESS K. KEUTEL, H. FUCHS, CH. EDELMANN AND H. MECKE 185 HIGH RATE
DEPOSITION OF THICK OXIDE LAYERS ON PLASTIC SUBSTRATES H. MORGNER, M.
NEUMANN, M. KRUG AND S. STRAACH 189 CATHODIC ARE EVAPORATION - A
VERSATILE TOOL FOR THIN FILM DEPOSITION F. RICHTER, G. KRANNICH, M.
KUEHN, S. PETER AND CH. SPAETH 193 5. THIN FILM SENSORS THIN FILM
THERMO-MECHANICAL SENSORS EMBEDDED IN METALLIC STRUCTURES T. GOLNAS AND
F.B. PRINZ 201 NOVEL THREE DIMENSIONALLY INTEGRATED THIN FILM COLOR
DETECTOR FOR DIGITAL SIGNAL PROCESSING D. KNIPP, H. STIEBIG, O. KLUTH
AND H. WAGNER 205 PIEZO-SPECTROSCOPIC STRESS MEASUREMENT NEAR
PZT-MICROSTRUCTURES ON SILICON R. KRAWIETZ, W. POMPE, A. GERBATSCH, V.
SERGO AND L.C. CIACCHI 211 PHOTOINDUCED EFFECTS IN THIN AMORPHOUS
CHALCOGENIDE FILMS K. PETKOV 215 OPTIMIZED AMORPHOUS SILICON BASED
TWO-TERMINAL THIN FILM DETECTORS FOR COLOR RECOGNITION J. ZIMMER, D.
KNIPP, H. STIEBIG AND H. WAGNER 221 6. THIN FILMS FOR MICROELECTRONICS
MATERIAL-SELECTIVE PLANARIZATION OF OXIDE LAYERS: A NOVEL TECHNOLOGY TH.
DETZEL AND P. HANESCH 227 DEPTH PROFILING OF THIN TISI X -FILMS ON
SILICON CARBIDE BY SNMS R. GETTO, J. FREYTAG, M. KOPNARSKI AND H.
OECHSNER 231 CONTENTS IX FLOWFILL-PROCESS AS A NEW CONCEPT FOR
INTER-METAL-DIELECTRICS U. HOECKELE, W. KROENINGER, G. PFEIFER, M. FRANK,
J. MARKTANNER AND K. BEEKMANN 235 COPPER METALLIZATION OF SUBMICRON
TRENCHES WITH PULSED VACUUM ARE P. SIEMROTH, P. WENZEL, TH. WITKE AND B.
SCHULTRICH 239 7. SP 3 -BOUNDED NITRIDE LAYERS HIGH RESOLUTION TEM
INVESTIGATIONS OF NANOSTRUCTURES IN HARD AMORPHOUS CARBON FILMS H.
BANZHOF, K. BRAND, H. LICHTE, A. LUFT, F.-C. MEYER, H.-J. SCHEIBE, B.
SCHULTRICH AND H. ZIEGELE 243 PROPERTIES OF SI 3 N 4 -LAYERS DEPOSITED
BY MEDIUM FREQUENCY TWIN MAGNETRON SPUTTERING M. RUSKE, G. BRAEUER, J.
PISTNER, J. SZCZYRBOWSKI AND A. ZMELTY 247 ON THE INITIAL CUBIC PHASE
NUCLEATION IN BORON NITRIDE FILMS J. YE AND H. OECHSNER 251 8.
MECHANICAL FILM PROPERTIES STRUCTURE, COMPOSITION AND RESIDUAL STRESSES
OF MAGNESIUM FLUORIDE THIN FILMS DEPOSITED BY DIRECT EVAPORATION L.
DUMAS, J.-Y. ROBIC AND Y. PAULEAU 255 GRADIENT INTERFACE LAYERS TO
IMPROVE C-BN THIN FILM ADHESION R. FREUDENSTEIN, S. REINKE, W. KULISCH,
R. FISCHER, J. ZWECK, A. BERGMAIER AND G. DOLLINGER 259 MICROHARDNESS,
MICROSTRUCTURE AND COMPOSITION BEHAVIOR OF STAINLESS STEEL 304 LASER
SURFACE ALLOYED WITH SILICON Y. ISSHIKI, H. NAKAI AND M. HASHIMOTO 263
TITANIUM NITRIDE - SILICON NITRIDE COMPOSITE COATINGS DEPOSITED BY
REACTIVE MAGNETRON SPUTTERING J. PATSCHEIDER, M. DISERENS AND F. LEVY
267 INFRARED ANALYSIS OF BORON NITRIDE THIN FILMS M.F. PLASS, W.
FUKAREK, A. KOLITSCH AND W. MOELLER 269 TRANSFERRED LAYERS PROPERTIES IN
DRY SLIDING CONTACT OF COPPER/CARBON-CARBON COMPOSITE COUPLE A. SAMAH,
M. EL MANSORI, R. BEDRI AND D. PAULMIER 271 EVALUATION OF STIFFNESS,
HARDNESS AND ADHESION OF THIN FILMS S. SCHAEDLICH, D. SCHNEIDER AND B.
SCHULTRICH 273 TRENDS AND NEW APPLICATIONS OF THIN FILMS RESIDUAL STRESS
EVOLUTION BY THE EX-SITU ANNEALING OF TIN THIN FILMS DEPOSITED ON STEEL
SUBSTRATES M. YE, G. BERTON, J.L. DELPLANCKE, M.P. DELPLANCKE, L.
SEGERS, R. WINAND AND K. DE BRUYN 275 9. NEW DEPOSITION TECHNIQUES
FILTERING SHIELDS IN VACUUM-ARC PLASMA SOURCES LI. AKSENOV AND V.M.
KHOROSHIKH 283 VACUUM-ARC SYSTEMS FOR DEPOSITING DROP-FREE COATINGS
ONTO INNER SURFACES LI. AKSENOV, V.M. KHOROSHIKH, V.A. BELOUS AND S.A.
LEONOV 287 COATING DEPOSITION BY CONDENSING THE PARTICLE FLUX FROM THE
TARGET SPUTTERED IN THE LOW-PRESSURE ARE PLASMA LI. AKSENOV AND V.M.
KHOROSHIKH 291 TREATMENT OF MATERIALS IN RADIAL LOW-PRESSURE ARE PLASMA
STREAMS LI. AKSENOV AND V.M. KHOROSHIKH 295 STUDY OF A PULSED DC
GLOW-DISCHARGE USED FOR PLASMA-CVD WITH AN ULTRAFAST VIDEOSYSTEM AND A
LANGMUIR-PROBE T.A. BEER, D. HEIM, J. LAIMER AND H. STOERI 299 ION
SPUTTERING OF METALS IN A SYSTEM WITH A THERMIONIC INERT GAS PLASMA
SOURCE V.A. BELOUS AND G.I. NOSOV 303 ION NITRIDING OF STEELS IN A
SYSTEM WITH A THERMIONIC GAS PLASMA SOURCE V.A. BELOUS AND G.I. NOSOV
307 OPTICAL EMISSION SPECTROSCOPY IN HIGH TARGET POWDER DENSITY
MAGNETRON SOURCE A. BRUDNIK, W. POSADOWSKI AND A. CZAPLA 311 BIAS
ENHANCED NUCLEATION AND GROWTH OF DIAMOND FILMS ON TITANIUM SUBSTRATES
R. FEHLING, M. SCHRECK, A. BERGMAIER, G. DOLLINGER AND B. STRITZKER 315
AN UHV-COMPATIBLE DC OFF-AXIS SPUTTERING DEVICE FOR REACTIVE SPUTTERING
AND INVESTIGATION OF THE PLASMA PROPERTIES DURING NIOBIUM DEPOSITION A.
KRAEMER, H. HAMMER AND A. SCHNEIDER 319 VACUUM-ARC EVAPORATOR OF METALS
WITH AN EXTENDED PLANAR CATHODE L.P. SABLEV, A.A. ANDREEV, V.V.
KUNCHENKO AND S.N. GRIGORIEV 323 SEVERAL WAYS TO MODIFY STRUCTURAL AND
MORPHOLOGICAL PROPERTIES OF THIN FILMS PREPARED BY REACTIVE SPUTTERING
N. MARTIN, H. MADJOUD, D. BARETTI AND C. ROUSSELOT 327 CONTENTS XI HIGH
CURRENT METAL-ION SOURCE FOR ACTIVATED DEPOSITION TH. WITKE AND P.
SIEMROTH 33 1 FIELD-INDUCED DEPOSITION OF HARD C-H COATINGS ON THE STEEL
SURFACE IN A RICH-PROPANE FLAME FLOW M. ZAKE AND M. LUBANE 333 10.
ELECTRICAL FILM PROPERTIES CVD DEPOSITION AND CHARACTERISATION OF HIGHLY
CONDUCTIVE ZNO B. HAHN, M. WOERZ, G. HEINDEL, E. PSCHORR-SCHOBERER AND W.
GEBHARDT 339 EFFECTS OF REACTION TEMPERATURE ON THE PHYSICAL PROPERTIES
OF CHEMICALLY DEPOSITED CDS FILMS S.J. CASTILLO, M. SOTELO-LERMA, I.A.
NEYRA, M.B. ORTUNO, R. RAMIREZ-BON AND FJ. ESPINOZA-BELTRAEN 343 PHASE
CHANGE DURING THE INITIAL OF NI 3 OFE 7 O(INVAR) FILMS ON MGO(OOL) BY
DC-BIASED PLASMA-SPUTTER-DEPOSITION J.P. YANG, K. MAKIHARA, H. NAKAI, J.
SHI, M. HASHIMOTO, A. BARNA AND P.B. BAMA 347 11. OPTICAL FILM
PROPERTIES THERMAL- AND PHOTO-INDUCED CHANGES OF THE OPTICAL PROPERTIES
OF AMORPHOUS AS 3 SE 2 THIN FILMS J.M. GONZAELEZ-LEAL, E. MAERQUEZ, R.
PRIETO-ALCOEN, A.M. BERNAL-OLIVA, J.J. RUIZ-PEREZ AND C. CORRALES 353
STRUCTURAL INVESTIGATIONS OF SPUTTERED THIN FILMS WITH X-RAY ABSORPTION
TECHNIQUES D. LUETZENKIRCHEN-HECHT, A. KRAEMER, H. HAMMER AND R. FRAHM 357
THIN FILM PROPERTIES OF GE-CONTAINING CHALCOGENIDE GLASSES K. PETKOV, R.
TODOROV AND D. KOZUHAROVA 361 A NEW METHOD FOR THE OPTICAL
CHARACTERIZATION OF INHOMOGENEOUS THIN FILMS BASED ONLY ON SPECTROSCOPIC
REFLECTION MEASUREMENTS J.J. RUIZ-PEREZ, E. MAERQUEZ, J.M. GONZAELEZ-LEAL,
D. JIMENEZ-GARAY AND D. MINKOV 363 SOLID SOLUTION CD X ZNI_ X S THIN
FILMS GROWN BY ATOMIC LAYER EPITAXY AND SUCCESSIVE IONIC LAYER
ADSORPTION AND REACTION TECHNIQUES M.P. VALKONEN, M. RITALA, S. LINDROOS
AND M. LESKELAE 367 XII TRENDS AND NEW APPLICATIONS OF THIN FILMS 12.
HARD CARBON FILMS HIGH RATES OF DIAMOND DEPOSITION WITH VARIOUS CRYSTALS
SIZES BY COMBUSTION FLAME METHOD T. LE HUU, D. PAULMIER, M. SCHMITT AND
E.K. KADIRI 373 TRIBOLOGICAL BEHAVIOUR OF DIAMOND COATINGS OBTAINED BY
COMBUSTION FLAME PROCESS M. SCHMITT, D. PAULMIER AND T. LE HUU 377
INFLUENCE OF PLASMA CONDITIONS ON THE DEPOSITION OF SUPERHARD AMORPHOUS
CARBON FILMS BY LASER AND ARE METHODS B. SCHULTRICH, F.-C. MEYER, H.-J.
SCHEIBE, TH. WITKE AND H. ZIEGELE 381 DEPOSITION AND CHARACTERIZATION OF
METAL CONTAINING AMORPHOUS HYDROCARBON FILMS (ME-C:H) PREPARED BY DC
MAGNETRON SPUTTERING C. SPECHT, J. SCHROEDER, R. WITTORF, M. GRISCHKE AND
K. BEWILOGUA 383 13. PROCESS CONTROL CORRELATION BETWEEN DEPOSITION RATE
AND HARDNESS OF REMOTE PECVD SILICON OXIDE FILMS CH. BAYER AND PH.
RUDOLF VON ROHR 389 STUDY OF THE GROWTH MECHANISMS AND PROPERTIES OF
(CR,0,N) FILMS DEPOSITED BY VACUUM ARE EVAPORATION C. GAUTIER AND J.
MACHET 393 MEASUREMENTS OF THE LOSS PROBABILITY OF NITROGEN ATOMS VERSUS
TEMPERATURE ON ALUMINIUM L. LEFEVRE, T. BELMONTE, T. CZERWIEC, A. RICARD
AND H. MICHEL 397 THEORETICAL INVESTIGATIONS OF THE MULTITARGET REACTIVE
SPUTTERING PROCESS: APPLICATION TO THE TITANIUM - CHROMIUM - OXYGEN
SYSTEM N. MARTIN AND CH. ROUSSELOT 401 14. SYMPOSIUM ON NANOSTRUCTURES
AND NANOPARTICLES ON THE USE OF SNMS FOR THE MANUFACTURE CONTROL OF AG
COLLOID CONTAINING SOL-GEL FILMS ON GLASS W. BOCK, B. KUTSCH, M.
KOPNARSKI AND H. OECHSNER 407 SEIF ORGANIZATION OF NANOSTRUCTURES DURING
SURFACE SEGREGATION OF S ONTI R. MUELLER AND H. OECHSNER 411 DIRECT
WRITING OF METALLIC NANOSTRUCTURES BY MEANS OF METAL COLLOIDS G.
DUMPICH, J. LOHAU, E.F. WASSERMANN, M. WINTER AND M.T. REETZ 413
CONTENTS XIII 15. DEPOSITION AND PROPERTIES OF ORGANIC LAYERS AMORPHOUS
AND CRYSTALLINE STATES IN THIN FILMS OF N 2 0 N.V. KRAINYUKOVA AND M.A.
STRZHEMECHNY 419 THIN FILM ELECTRODES FOR CAPACITIVE CHEMO- AND
BIOSENSORS: AN OPTIMIZATION OF THE ELECTRODES GEOMETRY V.M. MIRSKY, M.
RIEPL, C. KRAUSE, I. NOVOTNY, M. SPLONSKOWSKI, V. REHACEK, V. TVAROZEK,
H. HUMMEL AND O.S. WOLFBEIS 423 CAPACITIVE STUDY OF SELF-ASSEMBLED
ALKYLTHIOL MONOLAYERS: SURFACE CHARGE EFFECTS AND KINETICS OF
SURFACTANTS ADSORPTION R. SCHWEISS, V.M. MIRSKY AND O.S. WOLFBEIS 427 NEW
CLASS OF THIN AMORPHOUS FILMS PRODUCED BY PE CVD FROM ORGANIC COMPOUNDS
OF CARBON FAMILY J. TYCZKOWSKI AND B. PIETRZYK 431 16. MAGNETISM EFFECT
OF TENSILE STRESS-ANNEALING ON THE MAGNETICAL BEHAVIOUR OF SOME THIN
AMORPHOUS RIBBONS FOR FLUXGATE SENSORS E.D. DIACONU, H. CHIRIAC, H.
HOFFMANN, C. IOAN, C. MOLDOVANU AND M. MACOVICIUC 437 MAGNETIC DOMAINS
IN MICROSTRUCTURED THIN FILMS WITH PERPENDICULAR ANISOTROPY B. LANCHAVA,
K. PRUEGL, S. KREUZER, N. NESTLE AND H. HOFFMANN 441 MICROMAGNETICS OF
MAGNETIC MULTILAYERS B. LANCHAVA, K. PRUEGL AND H. HOFFMANN 445 WHY
EVAPORATED PERMALLOY/CU MULTILAYERS DO NOT EXHIBIT GMR EFFECT: IN-SITU
TRANSPORT PROPERTIES T. LUCINSKI, G. REISS, N. MATTERN AND R. RANK 449
STRUCTURE OF LASER-DEPOSITED FE/AI MULTILAYERS J. NOETZEL, H. GEISLER,
A. GORBUNOV, R. DIETSCH, H. MAI, A. MENSCH, W. MOELLER, W. POMPE, H.
REUTHER, A. TSELEV, E. WIESER AND H. WORCH 455 INVESTIGATIONS IN THE
STRUCTURE PROPERTIES OF MAGNETOOPTICAL MUTILAYERS WITH FE, TB AND ND T.
SCHMIDT, M. UNGER, R. SCHERSCHLICHT AND H. HOFFMANN 459 EFFECT OF SM
CONCENTRATION AND AR SPUTTERING GAS PRESSURE ON MAGNETIC PROPERTIES OF
SMCO/CR FILMS S. TAKEI, A. MORISAKO AND M. MATSUMOTO 463 MAGNETO-OPTICAL
FE/TB/ND/TB MULTILAYERS: ANISOTROPY AND KERR ROTATION M. UNGER, T.
SCHMIDT, R. SCHERSCHLICHT AND H. HOFFMANN 467 XIV TRENDS AND NEW
APPLICATIONS OF THIN FILMS 17. NANOSTRUCTURES AND NANOPARTICLES
THEORETICAL ANALYSIS OF THE EVOLUTION OF COMPOSITION PROFILES IN
NANOSCALE MULTILAYERS M. HENTSCHEL, M. BOBETH, G. DIENER AND W. POMPE
473 COULOMB BLOCKADE AND SINGLE ELECTRON EFFECTS IN ARRAYS OF
SELFORGANIZED ULTRASMALL METAL CLUSTERS OBSERVED AT ROOM TEMPERATURE F.
KREUPL, J. VANCEA, L. RISCH AND H. HOFFMANN 477 FRACTAL ANALYSIS OF
ISLAND STRUCTURES OF AI THIN FILMS E. KUSANO, Y. KURODA, A. SATOH, M.
KITAGAWA, H. NANTO AND A. KINBARA 479 MAGNETIC AND MAGNETO-OPTICAL
PROPERTIES OF COMPOSITE FILMS OF FERROMAGNETIC ULTRAFINE PARTICLES
DISPERSED IN POLYMETHYL METHACRYLATE K. YAMAGUCHI, T. SATO, Y. KATO, M.
INOUE AND T. FUJII 483 18. TIN-FILMS OPTICAL PROPERTIES OF COATINGS WITH
CU AND COPPER OXIDE COLLOIDAL PARTICLES IN A SI0 2 MATRIX FJ.
ESPINOZA-BELTRAEN, R. BERNAL, J. MANZANARES-MARTINEZ, FJ.
GARCIA-RODRIGUEZ, J.F. PEREZ-ROBLES, R. RAMIREZ-BON, Y.V. VOROBIEV AND
J. GONZAELEZ-HERNAENDEZ 489 IN SITU PREPARATION OF METAL, METALOXIDE AND
METALNITRIDE FILMS BY ION BEAM SPUTTERING H. HAMMER, H. BUSSE AND R.
KIEFER 493 TEXTURE CONTROL OF TIN FILMS DEPOSITED BY A DUAL ION BEAM
IBAD M. SCHAFFT AND H. OECHSNER 497 INFLUENCE OF DEPOSITION PARAMETERS
ON THE PROPERTIES OF TITANIUM NITRIDE FILMS FORMED BY ION BEAM ASSISTED
EVAPORATION D. WOLFF AND H. OECHSNER 499 19. FERROMAGNETIC FILMS SPIN
TUNNELING AND COULOMB BLOCKADE IN CO-AL20 3 -PERMALLOY TUNNEL JUNCTIONS
H. BRUECKL, H. VINZELBERG, J. KRETZ, I. MOENCH AND G. REISS 503
FERROMAGNETIC RESONANCE IN GRANULAER CO/AG AND NIFE/AG MULTILAYERS J.
DUBOWIK, F. STOBIECKI, B. SZYMAFISKI AND K. ROLL 505 GIANT
MAGNETOSTRICTION IN TBFE/FECO MULTILAYERS A. LUDWIG, E. QUANDT AND J.
MENCIK 509 CONTENTS XV INFLUENCE OF THE ANNEALING PROCESS ON THE GMR
EFFECT IN PERMALLOY/COPPER MULTILAYERS F. STOBIECKI, T. LUCINSKI, R.
GONTARZ AND M. URBANIAK 513 PRESENCE AND ABSENCE OF GIANT
MAGNETORESISTANCE IN SPUTTERED AND EVAPORATED PERMALLOY/COPPER
MULTILAYERS G. REISS, L. V. LOYEN, T. LUCINSKI, D. ELEFANT, H. BRUECKL
AND CH. REHM 517 20. BIOMATERIAL LAYERS APPLICATION OF BIOACTIVE LAYERS
FOR CHEMICAL SENSORS AND ANALYSIS SYSTEMS S. DROST, S. HAUCK, E.
YACOUB-GEORGE, H. WOLF, S. KOCH, C. KOESSLINGER, B. HILLERICH AND K.
HIEBER 521 SIMULATIONS OF THE ELECTRICAL PROPERTIES OF BILAYER LIPID
MEMBRANE R. IVANIC AND V. TVAROCEK 525 21. GROWTH MECHANISM
PSEUDOMORPHOUS TI THIN LAYER IN TI/MGO SUPERLATTICES AND ON MGO(OOL)
SUBSTRATES T. KADO 531 UNUSUAL GROWTH MODES IN PULSED LASER DEPOSITION
OF ZNSE THIN FILMS ON GAAS L.M. KUKREJA, P. BHATTACHARYA, T. GANGULI,
B.M. PANDEY AND K.C. RUSTAGI 535 STUDY OF THE GROWTH MECHANISMS OF
CHROMIUM NITRIDE FILMS DEPOSITED BY ION PLATING O. PIOT AND J. MACHET
539 EFFECT OF SCHWOEBEL BARRIERS ON GROWTH MECHANISMS AND MORPHOLOGY OF
THIN FILM V.L. TROFIMOV, V.G. MOKEROV AND A.G. SHUMYANKOV 543
AUTHORINDEX 549 KEYWORD INDEX 555
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| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1998 Regensburg gnd-content |
| genre_facet | Konferenzschrift 1998 Regensburg |
| id | DE-604.BV012196430 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:23:24Z |
| institution | BVB |
| institution_GND | (DE-588)1901553-7 |
| isbn | 087849815X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008264295 |
| oclc_num | 40710503 |
| open_access_boolean | |
| owner | DE-355 DE-BY-UBR DE-91G DE-BY-TUM DE-703 DE-83 |
| owner_facet | DE-355 DE-BY-UBR DE-91G DE-BY-TUM DE-703 DE-83 |
| physical | XV, 558 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Trans Tech Publ. |
| record_format | marc |
| series | Materials science forum |
| series2 | Materials science forum |
| spelling | Trends and new applications of thin films proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998 ed.: Horst Hoffmann Uetikon-Zuerich [u.a.] Trans Tech Publ. 1998 XV, 558 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science forum 287/288 Couches minces - Congrès ram Metallic films Congresses Surfaces (Technology) Congresses Thin films Congresses Dünne Schicht (DE-588)4136925-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1998 Regensburg gnd-content Dünne Schicht (DE-588)4136925-7 s DE-604 Hoffmann, Horst Sonstige oth International Symposium on Trends and New Applications of Thin Films 6 1998 Regensburg Sonstige (DE-588)1901553-7 oth Materials science forum 287/288 (DE-604)BV001902147 287/288 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008264295&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Trends and new applications of thin films proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998 Materials science forum Couches minces - Congrès ram Metallic films Congresses Surfaces (Technology) Congresses Thin films Congresses Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)1071861417 |
| title | Trends and new applications of thin films proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998 |
| title_auth | Trends and new applications of thin films proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998 |
| title_exact_search | Trends and new applications of thin films proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998 |
| title_full | Trends and new applications of thin films proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998 ed.: Horst Hoffmann |
| title_fullStr | Trends and new applications of thin films proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998 ed.: Horst Hoffmann |
| title_full_unstemmed | Trends and new applications of thin films proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998 ed.: Horst Hoffmann |
| title_short | Trends and new applications of thin films |
| title_sort | trends and new applications of thin films proceedings of the 6th international symposium on trends and new applications of thin films tatf 98 regensburg germany march 1998 |
| title_sub | proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998 |
| topic | Couches minces - Congrès ram Metallic films Congresses Surfaces (Technology) Congresses Thin films Congresses Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Couches minces - Congrès Metallic films Congresses Surfaces (Technology) Congresses Thin films Congresses Dünne Schicht Konferenzschrift 1998 Regensburg |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008264295&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV001902147 |
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