Extreme ultraviolet lithography: from the topical meeting May 1 - 3, 1996 Boston, Mass.
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Washington, DC
1996
|
| Series: | Optical Society of America: OSA trends in optics and photonics
4 |
| Subjects: | |
| Physical Description: | IX, 235 S. graph. Darst. |
| ISBN: | 1557524351 |
Staff View
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Record in the Search Index
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| genre | (DE-588)1071861417 Konferenzschrift 1996 Boston Mass. gnd-content |
| genre_facet | Konferenzschrift 1996 Boston Mass. |
| id | DE-604.BV012168502 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:22:54Z |
| institution | BVB |
| isbn | 1557524351 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008243615 |
| oclc_num | 36176256 |
| open_access_boolean | |
| owner | DE-29T DE-703 DE-83 |
| owner_facet | DE-29T DE-703 DE-83 |
| physical | IX, 235 S. graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| record_format | marc |
| series | Optical Society of America: OSA trends in optics and photonics |
| series2 | Optical Society of America: OSA trends in optics and photonics |
| spelling | Extreme ultraviolet lithography from the topical meeting May 1 - 3, 1996 Boston, Mass. ed. by Glenn D. Kubiak ... Washington, DC 1996 IX, 235 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Optical Society of America: OSA trends in optics and photonics 4 Interferometry Congresses Lasers Industrial applications Congresses Optical coatings Congresses Photolithography Congresses Ultraviolet radiation Industrial applications Congresses Extremes Ultraviolett (DE-588)4264163-9 gnd rswk-swf Fotolithografie (DE-588)4274823-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1996 Boston Mass. gnd-content Fotolithografie (DE-588)4274823-9 s Extremes Ultraviolett (DE-588)4264163-9 s DE-604 Kubiak, Glenn D. Sonstige oth Optical Society of America: OSA trends in optics and photonics 4 (DE-604)BV012166388 4 |
| spellingShingle | Extreme ultraviolet lithography from the topical meeting May 1 - 3, 1996 Boston, Mass. Optical Society of America: OSA trends in optics and photonics Interferometry Congresses Lasers Industrial applications Congresses Optical coatings Congresses Photolithography Congresses Ultraviolet radiation Industrial applications Congresses Extremes Ultraviolett (DE-588)4264163-9 gnd Fotolithografie (DE-588)4274823-9 gnd |
| subject_GND | (DE-588)4264163-9 (DE-588)4274823-9 (DE-588)1071861417 |
| title | Extreme ultraviolet lithography from the topical meeting May 1 - 3, 1996 Boston, Mass. |
| title_auth | Extreme ultraviolet lithography from the topical meeting May 1 - 3, 1996 Boston, Mass. |
| title_exact_search | Extreme ultraviolet lithography from the topical meeting May 1 - 3, 1996 Boston, Mass. |
| title_full | Extreme ultraviolet lithography from the topical meeting May 1 - 3, 1996 Boston, Mass. ed. by Glenn D. Kubiak ... |
| title_fullStr | Extreme ultraviolet lithography from the topical meeting May 1 - 3, 1996 Boston, Mass. ed. by Glenn D. Kubiak ... |
| title_full_unstemmed | Extreme ultraviolet lithography from the topical meeting May 1 - 3, 1996 Boston, Mass. ed. by Glenn D. Kubiak ... |
| title_short | Extreme ultraviolet lithography |
| title_sort | extreme ultraviolet lithography from the topical meeting may 1 3 1996 boston mass |
| title_sub | from the topical meeting May 1 - 3, 1996 Boston, Mass. |
| topic | Interferometry Congresses Lasers Industrial applications Congresses Optical coatings Congresses Photolithography Congresses Ultraviolet radiation Industrial applications Congresses Extremes Ultraviolett (DE-588)4264163-9 gnd Fotolithografie (DE-588)4274823-9 gnd |
| topic_facet | Interferometry Congresses Lasers Industrial applications Congresses Optical coatings Congresses Photolithography Congresses Ultraviolet radiation Industrial applications Congresses Extremes Ultraviolett Fotolithografie Konferenzschrift 1996 Boston Mass. |
| volume_link | (DE-604)BV012166388 |
| work_keys_str_mv | AT kubiakglennd extremeultravioletlithographyfromthetopicalmeetingmay131996bostonmass |