Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Pennington, NJ
Electrochemical Soc.
1996
|
| Schriftenreihe: | Electrochemical Society: Proceedings
1995,20 |
| Schlagworte: | |
| Beschreibung: | XII, 626 S. Ill., graph. Darst. |
| ISBN: | 1566771153 |
Internformat
MARC
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| 245 | 1 | 0 | |a Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing |c ed. Richard E. Novak ... |
| 246 | 1 | 3 | |a Cleaning technology in semiconductor device manufacturing |
| 264 | 1 | |a Pennington, NJ |b Electrochemical Soc. |c 1996 | |
| 300 | |a XII, 626 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 490 | 1 | |a Electrochemical Society: Proceedings |v 1995,20 | |
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| 650 | 7 | |a Semiconducteurs - Nettoyage |2 ram | |
| 650 | 4 | |a Semiconductor wafers |x Cleaning |v Congresses | |
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Datensatz im Suchindex
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| author_corporate | International Symposium on Cleaning Technology in Semiconductor Device Manufacturing Chicago, Ill |
| author_corporate_role | aut |
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| author_sort | International Symposium on Cleaning Technology in Semiconductor Device Manufacturing Chicago, Ill |
| building | Verbundindex |
| bvnumber | BV012135214 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UP 7570 ZN 4800 |
| ctrlnum | (OCoLC)35114783 (DE-599)BVBBV012135214 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre_facet | Konferenzschrift 1995 Chicago Ill. |
| id | DE-604.BV012135214 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:22:19Z |
| institution | BVB |
| institution_GND | (DE-588)1800601-2 |
| isbn | 1566771153 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008219001 |
| oclc_num | 35114783 |
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| physical | XII, 626 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | Electrochemical Soc. |
| record_format | marc |
| series | Electrochemical Society: Proceedings |
| series2 | Electrochemical Society: Proceedings |
| spelling | International Symposium on Cleaning Technology in Semiconductor Device Manufacturing 4 1995 Chicago, Ill. Verfasser (DE-588)1800601-2 aut Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing ed. Richard E. Novak ... Cleaning technology in semiconductor device manufacturing Pennington, NJ Electrochemical Soc. 1996 XII, 626 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings 1995,20 Plaquettes à gravure en semiconducteurs - Nettoyage ram Semiconducteurs - Nettoyage ram Semiconductor wafers Cleaning Congresses Halbleiterbauelement (DE-588)4113826-0 gnd rswk-swf Reinigung (DE-588)4049250-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1995 Chicago Ill. gnd-content Halbleiterbauelement (DE-588)4113826-0 s Reinigung (DE-588)4049250-3 s DE-604 Novak, Richard E. Sonstige oth Electrochemical Society: Proceedings 1995,20 (DE-604)BV001900941 1995,20 |
| spellingShingle | Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing Electrochemical Society: Proceedings Plaquettes à gravure en semiconducteurs - Nettoyage ram Semiconducteurs - Nettoyage ram Semiconductor wafers Cleaning Congresses Halbleiterbauelement (DE-588)4113826-0 gnd Reinigung (DE-588)4049250-3 gnd |
| subject_GND | (DE-588)4113826-0 (DE-588)4049250-3 (DE-588)1071861417 |
| title | Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing |
| title_alt | Cleaning technology in semiconductor device manufacturing |
| title_auth | Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing |
| title_exact_search | Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing |
| title_full | Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing ed. Richard E. Novak ... |
| title_fullStr | Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing ed. Richard E. Novak ... |
| title_full_unstemmed | Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing ed. Richard E. Novak ... |
| title_short | Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing |
| title_sort | proceedings of the fourth international symposium on cleaning technology in semiconductor device manufacturing |
| topic | Plaquettes à gravure en semiconducteurs - Nettoyage ram Semiconducteurs - Nettoyage ram Semiconductor wafers Cleaning Congresses Halbleiterbauelement (DE-588)4113826-0 gnd Reinigung (DE-588)4049250-3 gnd |
| topic_facet | Plaquettes à gravure en semiconducteurs - Nettoyage Semiconducteurs - Nettoyage Semiconductor wafers Cleaning Congresses Halbleiterbauelement Reinigung Konferenzschrift 1995 Chicago Ill. |
| volume_link | (DE-604)BV001900941 |
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