Scanning electron microscopy: physics of image formation and microanalysis
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | German |
| Veröffentlicht: |
Berlin [u.a.]
Springer
1998
|
| Ausgabe: | 2., completely rev. and updated ed. |
| Schriftenreihe: | Springer series in optical sciences
45 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XIV, 527 S. Ill., graph. Darst. |
| ISBN: | 3540639764 9783540639763 |
Internformat
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| 100 | 1 | |a Reimer, Ludwig |d 1928- |e Verfasser |0 (DE-588)13230130X |4 aut | |
| 245 | 1 | 0 | |a Scanning electron microscopy |b physics of image formation and microanalysis |c Ludwig Reimer |
| 250 | |a 2., completely rev. and updated ed. | ||
| 264 | 1 | |a Berlin [u.a.] |b Springer |c 1998 | |
| 300 | |a XIV, 527 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 490 | 1 | |a Springer series in optical sciences |v 45 | |
| 650 | 7 | |a Elektronenmicroscopie |2 gtt | |
| 650 | 7 | |a Kristalstructuur |2 gtt | |
| 650 | 7 | |a Verstrooiing |2 gtt | |
| 650 | 4 | |a Scanning electron microscopy | |
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Datensatz im Suchindex
| _version_ | 1805071500998344704 |
|---|---|
| adam_text |
LUDWIG REIMER SCANNING ELECTRON MICROSCOPY PHYSICS OF IMAGE FORMATION
AND MICROANALYSIS SECOND COMPLETELY REVISED AND UPDATED EDITION WITH 260
FIGURES SPRINGER 2008 AGI-INFORMATION MANAGEMENT CONSULTANTS
MAY BE USED FOR PERSONAL PURPORSES ONLY OR BY LIBRARIES ASSOCIATED TO
DANDELON.COM NETWORK. CONTENTS 1. INTRODUCTION 1 1.1 PRINCIPLE OF THE
SCANNING ELECTRON MICROSCOPE 1 1.2 ELECTRON-SPECIMEN INTERACTIONS 3 1.3
IMAGING MODES OF SCANNING ELECTRON MICROSCOPY 7 1.3.1 SECONDARY
ELECTRONS (SE) 7 1.3.2 BACKSCATTERED ELECTRONS (BSE) 8 1.3.3 SPECIMEN
CURRENT 8 1.3.4 TRANSMITTED ELECTRONS 9 1.3.5 ELECTRON-BEAM-INDUCED
CURRENT (EBIC) 9 1.3.6 CATHODOLUMINESCENCE 9 1.3.7 ACOUSTIC THERMAL-WAVE
MICROSCOPY 10 1.3.8 ENVIRONMENTAL ELECTRON MICROSCOPY 10 1.3.9 IMAGING
WITH X-RAYS 10 1.4 ANALYTICAL MODES 11 1.4.1 CRYSTAL STRUCTURE AND
ORIENTATION 11 1.4.2 ELEMENTAL MICROANALYSIS -. 12 2. ELECTRON OPTICS OF
A SCANNING ELECTRON MICROSCOPE 13 2.1 ELECTRON GUNS 13 2.1.1 THERMIONIC
ELECTRON GUNS 13 2.1.2 SCHOTTKY-EMISSION GUNS 17 2.1.3 FIELD-EMISSION
GUNS 18 2.1.4 MEASUREMENT OF GUN PARAMETERS 19 2.2 ELECTRON OPTICS 21
2.2.1 FOCAL LENGTH OF AN ELECTRON LENS 21 2.2.2 LENS ABERRATIONS 23
2.2.3 SPECIAL DESIGNS OF OBJECTIVE LENSES 27 2.2.4 GEOMETRIC OPTICAL
THEORY OF ELECTRON-PROBE FORMATION 30 2.2.5 WAVE-OPTICAL THEORY OF
ELECTRON-PROBE FORMATION . 34 2.2.6 STABILISATION OF THE
ELECTRON-PROBE CURRENT 37 2.3 ELECTRON BEAM DEFLECTION MODES 38 2.3.1
ELECTRON BEAM DEFLECTION BY TRANSVERSE FIELDS 38 2.3.2 SCANNING,
MAGNIFICATION AND ROCKING 40 X CONTENTS 2.3.3 ELECTRON BEAM BLANKING AND
CHOPPING 42 2.4 FOCUSING 46 2.4.1 FOCUSING AND CORRECTION OF ASTIGMATISM
46 2.4.2 DEPTH OF FOCUS 49 2.4.3 DYNAMIC AND AUTOMATIC FOCUSING 50 2.4.4
RESOLUTION AND ELECTRON-PROBE SIZE 52 3. ELECTRON SCATTERING AND
DIFFUSION 57 3.1 ELASTIC SCATTERING 57 3.1.1 ELASTIC DIFFERENTIAL
CROSS-SECTION 57 3.1.2 CLASSICAL MECHANICS OF ELECTRON-NUCLEUS
SCATTERING . 59 3.1.3 THE RELATIVISTIC SCHRODINGER AND PAULI-DIRAC
EQUATIONS 61 3.1.4 QUANTUM MECHANICS OF SCATTERING 63 3.1.5 RUTHERFORD
SCATTERING AT A SCREENED NUCLEUS 66 3.1.6 EXACT MOTT CROSS-SECTIONS 69
3.2 INELASTIC SCATTERING 73 3.2.1 ELECTRON EXCITATION PROCESSES AND
ENERGY LOSSES 73 3.2.2 ELECTRON-ELECTRON COLLISIONS 76 3.2.3 QUANTUM
MECHANICS OF INNER-SHELL IONIZATION 78 3.2.4 ANGULAR DISTRIBUTION OF
TOTAL INELASTIC SCATTERING . 81 3.3 MULTIPLE SCATTERING EFFECTS 82
3.3.1 MEAN-FREE-PATH LENGTH 82 3.3.2 ANGULAR DISTRIBUTION OF TRANSMITTED
ELECTRONS 84 3.3.3 SPATIAL BEAM BROADENING 87 3.3.4
CONTINUOUS-SLOWING-DOWN APPROXIMATION 90 3.3.5 MODIFICATION OF THE
STOPPING POWER AT LOW ELECTRON ENERGIES 93 3.3.6 DISTRIBUTION OF ENERGY
LOSSES 94 3.4 ELECTRON DIFFUSION 98 3.4.1 TRANSMISSION AND ELECTRON
RANGE 98 3.4.2 SPATIAL AND DEPTH DISTRIBUTION OF ENERGY DISSIPATION .
101 3.4.3 DIFFUSION MODELS 106 3.4.4 GENERAL TRANSPORT EQUATION 110
3.4.5 SPECIAL SOLUTIONS OF THE TRANSPORT EQUATION 112 3.4.6 MONTE CARLO
SIMULATIONS 114 3.5 SPECIMEN HEATING AND DAMAGE 117 3.5.1 SPECIMEN
HEATING 117 3.5.2 CHARGING OF INSULATING SPECIMENS 120 3.5.3 RADIATION
DAMAGE OF ORGANIC AND INORGANIC SPECIMENS 130 3.5.4 CONTAMINATION 132
CONTENTS XI 4. EMISSION OF BACKSCATTERED AND SECONDARY ELECTRONS 135 4.1
BACKSCATTERED ELECTRONS 135 4.1.1 MEASUREMENT OF THE BACKSCATTERING
COEFFICIENT AND THE SECONDARY ELECTRON YIELD 135 4.1.2 BACKSCATTERING
FROM FILMS AND PARTICLES 138 4.1.3 BACKSCATTERING FROM SOLID SPECIMENS
142 4.1.4 ANGULAR DISTRIBUTION OF BACKSCATTERING 146 4.1.5 ENERGY
DISTRIBUTION OF BACKSCATTERED ELECTRONS AND LOW-LOSS ELECTRONS 148 4.2
SECONDARY ELECTRONS 152 4.2.1 DEPENDENCE OF SECONDARY ELECTRON YIELD ON
BEAM AND SPECIMEN PARAMETERS 152 4.2.2 PHYSICS OF SECONDARY-ELECTRON
EMISSION 158 4.2.3 CONTRIBUTION OF BACKSCATTERED ELECTRONS TO THE
SECONDARY ELECTRON YIELD 162 4.2.4 STATISTICS OF BSE AND SE EMISSION ,
165 5. ELECTRON DETECTORS AND SPECTROMETERS 171 5.1 MEASUREMENT OF SMALL
CURRENTS 171 5.2 SCINTILLATION DETECTORS AND MULTIPLIERS 172 5.2.1
SCINTILLATION MATERIALS 172 5.2.2 SCINTILLATOR-PHOTOMULTIPLIER
COMBINATION 173 5.2.3 ELECTRON CHANNEL MULTIPLIERS 176 5.3 SEMICONDUCTOR
DETECTORS 177 5.3.1 SURFACE BARRIER AND P-N JUNCTION DIODES 177 5.3.2
THE ELECTRONIC CIRCUIT OF SEMICONDUCTOR DETECTORS . 181 5.4 SECONDARY
AND BACKSCATTERED ELECTRON DETECTORS 183 5.4.1 SECONDARY ELECTRON
DETECTORS 183 5.4.2 BACKSCATTERED ELECTRON DETECTORS 188 5.4.3 MULTIPLE
DETECTOR SYSTEMS 191 5.5 DETECTOR NOISE 193 5.5.1 NOISE OF A
SCINTILLATOR-PHOTOMULTIPLIER COMBINATION . . 193 5.5.2 NOISE OF
SEMICONDUCTOR DETECTORS 196 5.6 ELECTRON SPECTROMETERS AND FILTERS 197
5.6.1 TYPES OF ELECTRON SPECTROMETER 197 5.6.2 SECONDARY ELECTRON
SPECTROMETERS 200 5.6.3 BACKSCATTERED AND AUGER ELECTRON SPECTROMETERS
203 6. IMAGE CONTRAST AND SIGNAL PROCESSING 207 6.1 SECONDARY ELECTRON
IMAGING MODE 207 6.1.1 TYPES OF IMAGE CONTRAST 207 6.1.2 TOPOGRAPHIC
CONTRAST IN THE SE MODE 208 6.1.3 MATERIAL CONTRAST IN THE SE MODE 214
6.1.4 DETECTOR STRATEGIES FOR THE SE MODE 217 6.2 BACKSCATTERED ELECTRON
IMAGING MODES 222 XII CONTENTS 6.2.1 TOPOGRAPHIC AND MATERIAL CONTRAST
IN THE BSE MODE . 222 6.2.2 CHANNELLING OR CRYSTAL ORIENTATION CONTRAST
225 6.2.3 CONTRAST OF BSE USING MULTIPLE DETECTOR SYSTEMS 227 6.2.4
QUANTITATIVE INFORMATION FROM THE BSE SIGNAL 228 6.2.5 ENERGY-FILTERING
OF BACKSCATTERED ELECTRONS 231 6.2.6 THE SPECIMEN-CURRENT MODE 233 6.3
RESOLUTION AND CONTRAST IN THE SE AND BSE MODES 234 6.3.1
SECONDARY-ELECTRON MODE 234 6.3.2 BACKSCATTERED ELECTRON MODE 235 6.4
IMAGE RECORDING AND PROCESSING 237 6.4.1 OBSERVATION AND RECORDING ON
CATHODE-RAY TUBES . 237 6.4.2 ANALOGUE SIGNAL-PROCESSING METHODS 240
6.4.3 DIGITAL IMAGE ACQUISITION 244 6.4.4 DIGITAL IMAGE PROCESSING 245
6.4.5 STEREOGRAMMETRY 250 7. ELECTRON-BEAM-INDUCED CURRENT AND
CATHODOLUMINESCENCE 253 7.1 ELECTRON-BEAM-INDUCED CURRENT (EBIC) MODE
253 7.1.1 EBIC MODES AND SPECIMEN GEOMETRY 253 7.1.2 CHARGE CARRIER
GENERATION, DIFFUSION AND COLLECTION . 256 7.1.3 QUANTITATIVE
MEASUREMENT OF SEMICONDUCTOR PARAMETERS 261 7.1.4 EBIC IMAGING OF
DEPLETION LAYERS 264 7.1.5 EBIC IMAGING AND DEFECT ANALYSIS 266 7.1.6
SCANNING DEEP-LEVEL TRANSIENT SPECTROSCOPY (SDLTS) 268 7.1.7 RADIATION
DAMAGE EFFECTS IN SEMICONDUCTOR DEVICES . 269 7.1.8 EBIC AND EBIV
WITHOUT ANY DEPLETION LAYER AND IN SUPERCONDUCTORS 270 7.2
CATHODOLUMINESCENCE 273 7.2.1 BASIC MECHANISMS OF CATHODOLUMINESCENCE
273 7.2.2 DETECTION AND SPECTROMETRY OF LIGHT QUANTA 276 7.2.3
QUANTITATIVE CATHODOLUMINESCENCE OF SEMICONDUCTORS . 280 7.2.4
CATHODOLUMINESCENCE IMAGING MODE 284 7.2.5 CATHODOLUMINESCENCE OF
ORGANIC SPECIMENS 287 8. SPECIAL TECHNIQUES IN SEM 289 8.1 IMAGING AND
MEASUREMENT OF MAGNETIC FIELDS 289 8.1.1 TYPE-1 MAGNETIC CONTRAST 290
8.1.2 TYPE-2 MAGNETIC CONTRAST 293 8.1.3 DEFLECTION OF PRIMARY ELECTRONS
BY MAGNETIC FIELDS . 296 8.1.4 IMAGING OF SURFACE MAGNETIZATION BY
POLARIZED ELECTRONS 298 8.2 VOLTAGE CONTRAST 299 8.2.1 QUALITATIVE
VOLTAGE CONTRAST 299 CONTENTS XIII 8.2.2 VOLTAGE CONTRAST ON
FERROELECTRICS AND PIEZOELECTRICS. 301 8.2.3 QUANTITATIVE MEASUREMENT
OF SURFACE POTENTIAL 303 8.2.4 STROBOSCOPIC MEASUREMENT OF VOLTAGES 306
8.2.5 CAPACITIVE-COUPLING VOLTAGE CONTRAST 307 8.2.6 CAPACITIVELY
INDUCED CHARGING IN AN EXTERNAL ELECTRODE 308 8.3 LOW-ENERGY
SPECTROSCOPIES 308 8.3.1 THRESHOLD SPECTROSCOPIES 308 8.3.2 ELECTRON
TRAP SPECTROSCOPY AND MICROSCOPY 309 8.4 TRANSMITTED ELECTRON MODE 312
8.5 SCANNING ELECTRON MIRROR MICROSCOPY 314 8.6 ENVIRONMENTAL SCANNING
ELECTRON MICROSCOPY (ESEM) 316 8.7 SCANNING ELECTRON ACOUSTIC MICROSCOPY
321 8.8 ELECTRON-BEAM LITHOGRAPHY AND METROLOGY 324 8.9 COMBINATION OF
SEM AND STM 328 9. CRYSTAL STRUCTURE ANALYSIS BY DIFFRACTION 329 9.1
THEORY OF ELECTRON DIFFRACTION 329 9.1.1 KINEMATICAL THEORY AND BRAGG
CONDITION 329 9.1.2 KOSSEL CONES AND KOSSEL MAPS 334 9.1.3 DYNAMICAL
THEORY OF ELECTRON DIFFRACTION AND BLOCH WAVES 338 9.1.4 ORIENTATION
ANISOTROPY OF ELECTRON BACKSCATTERING. 349 9.1.5 ANGULAR ANISOTROPY
OF ELECTRON BACKSCATTERING 354 9.1.6 TRANSMISSION AND REFLECTION
ELECTRON DIFFRACTION PATTERNS 356 9.2 ELECTRON CHANNELLING PATTERNS
(ECP-) 359 9.2.1 ELECTRON-OPTICAL PARAMETERS FOR THE RECORDING OF ECP
359 9.2.2 THE STANDARD AND TILT METHOD OF GENERATING ECP . 361 9.2.3
SMALL-AREA METHODS FOR ECP 363 9.2.4 RECORDING OF ELECTRON CHANNELLING
PATTERNS 365 9.2.5 INFORMATION IN ELECTRON CHANNELLING PATTERNS 366 9.3
ELECTRON BACKSCATTERING PATTERNS (EBSP) 368 9.3.1 RECORDING OF EBSP 368
9.3.2 ADVANTAGES OF EBSP OVER ECP 370 9.3.3 THE RECIPROCITY THEOREM
BETWEEN ECP AND EBSP . 371 9.3.4 DETERMINATION OF CRYSTAL STRUCTURE
AND ORIENTATION . . 373 9.4 X-RAY KOSSEL PATTERNS 374 9.4.1 GENERATION
AND RECORDING OF X-RAY KOSSEL PATTERNS . 374 9.4.2 INFORMATION FROM
X-RAY KOSSEL PATTERNS 375 XIV CONTENTS 10. ELEMENTAL ANALYSIS AND
IMAGING WITH X-RAYS 379 10.1 X-RAY AND AUGER ELECTRON EMISSION 380
10.1.1 X-RAY SPECTRA 380 10.1.2 THE X-RAY CONTINUUM 381 10.1.3 THE
CHARACTERISTIC X-RAY SPECTRUM 385 10.1.4 ABSORPTION OF X-RAYS 390 10.1.5
AUGER ELECTRON EMISSION 393 10.2 X-RAY SPECTROMETERS 396 10.2.1
WAVELENGTH-DISPERSIVE X-RAY SPECTROMETERS 396 10.2.2 ENERGY-DISPERSIVE
X-RAY SPECTROMETERS 399 10.2.3 ELECTRONIC CIRCUIT OF AN
ENERGY-DISPERSIVE SPECTROMETER 403 10.2.4 COMPARISON OF WAVELENGTH- AND
ENERGY-DISPERSIVE SPECTROMETERS 406 10.3 CORRECTION METHODS FOR X-RAY
MICROANALYSIS 407 10.3.1 PROBLEMS OF QUANTITATIVE ANALYSIS 407 10.3.2
X-RAY EXCITATION AND ATOMIC NUMBER CORRECTION . 410 10.3.3 DEPTH
DISTRIBUTION OF X-RAY PRODUCTION AND THE ABSORPTION CORRECTION 416
10.3.4 FLUORESCENCE CORRECTION 420 10.3.5 REFINED METHODS AND
STANDARDLESS X-RAY MICROANALYSIS 425 10.3.6 X-RAY MICROANALYSIS OF
NONCONDUCTING SPECIMENS . 426 10.4 X-RAY MICROANALYSIS FOR SPECIAL
GEOMETRIES 427 10.4.1 TILTED SPECIMENS 427 10.4.2 PERPENDICULAR
INTERFACES AND SPATIAL DISTRIBUTION OF X-RAY EMISSION .'. 429 10.4.3
THIN FILMS ON SUBSTRATES 430 10.4.4 FREE-SUPPORTING FILMS AND PARTICLES
432 10.4.5 X-RAY MICROANALYSIS OF BIOLOGICAL SPECIMENS 433 10.5 DATA
PROCESSING AND SENSITIVITY IN X-RAY AND AUGER ELECTRON ANALYSIS 436
10.5.1 BACKGROUND AND PEAK-OVERLAP CORRECTION 436 10.5.2 COUNTING
STATISTICS AND SENSITIVITY 436 10.5.3 X-RAY FLUORESCENCE SPECTROSCOPY IN
SEM 438 10.5.4 AUGER ELECTRON AND X-RAY PHOTOELECTRON SPECTROSCOPY 439
10.6 IMAGING METHODS WITH X-RAYS 441 10.6.1 X-RAY MAPPING AND LINESCANS
441 10.6.2 TOTAL RATE IMAGING WITH X-RAYS (TRIX) 444 10.6.3 X-RAY
PROJECTION MICROSCOPY AND TOMOGRAPHY 444 REFERENCES 449 INDEX 515 |
| any_adam_object | 1 |
| author | Reimer, Ludwig 1928- |
| author_GND | (DE-588)13230130X |
| author_facet | Reimer, Ludwig 1928- |
| author_role | aut |
| author_sort | Reimer, Ludwig 1928- |
| author_variant | l r lr |
| building | Verbundindex |
| bvnumber | BV012102570 |
| callnumber-first | Q - Science |
| callnumber-label | QH212 |
| callnumber-raw | QH212.S3 |
| callnumber-search | QH212.S3 |
| callnumber-sort | QH 3212 S3 |
| callnumber-subject | QH - Natural History and Biology |
| classification_rvk | UH 5090 UH 5100 UH 6310 |
| classification_tum | PHY 135f |
| ctrlnum | (OCoLC)845107452 (DE-599)BVBBV012102570 |
| dewey-full | 502/.8/25 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 502 - Miscellany |
| dewey-raw | 502/.8/25 |
| dewey-search | 502/.8/25 |
| dewey-sort | 3502 18 225 |
| dewey-tens | 500 - Natural sciences and mathematics |
| discipline | Allgemeine Naturwissenschaft Physik |
| edition | 2., completely rev. and updated ed. |
| format | Book |
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| id | DE-604.BV012102570 |
| illustrated | Illustrated |
| indexdate | 2024-07-20T04:38:49Z |
| institution | BVB |
| isbn | 3540639764 9783540639763 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008194847 |
| oclc_num | 845107452 |
| open_access_boolean | |
| owner | DE-703 DE-92 DE-29T DE-91 DE-BY-TUM DE-20 DE-19 DE-BY-UBM DE-1046 DE-706 DE-522 DE-634 DE-83 DE-11 DE-188 DE-384 |
| owner_facet | DE-703 DE-92 DE-29T DE-91 DE-BY-TUM DE-20 DE-19 DE-BY-UBM DE-1046 DE-706 DE-522 DE-634 DE-83 DE-11 DE-188 DE-384 |
| physical | XIV, 527 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Springer |
| record_format | marc |
| series | Springer series in optical sciences |
| series2 | Springer series in optical sciences |
| spelling | Reimer, Ludwig 1928- Verfasser (DE-588)13230130X aut Scanning electron microscopy physics of image formation and microanalysis Ludwig Reimer 2., completely rev. and updated ed. Berlin [u.a.] Springer 1998 XIV, 527 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer series in optical sciences 45 Elektronenmicroscopie gtt Kristalstructuur gtt Verstrooiing gtt Scanning electron microscopy Rasterelektronenmikroskopie (DE-588)4048455-5 gnd rswk-swf Rasterelektronenmikroskopie (DE-588)4048455-5 s DE-604 Erscheint auch als Online-Ausgabe 978-3-540-38967-5 Springer series in optical sciences 45 (DE-604)BV000000237 45 HEBIS Datenaustausch Darmstadt application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008194847&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Reimer, Ludwig 1928- Scanning electron microscopy physics of image formation and microanalysis Springer series in optical sciences Elektronenmicroscopie gtt Kristalstructuur gtt Verstrooiing gtt Scanning electron microscopy Rasterelektronenmikroskopie (DE-588)4048455-5 gnd |
| subject_GND | (DE-588)4048455-5 |
| title | Scanning electron microscopy physics of image formation and microanalysis |
| title_auth | Scanning electron microscopy physics of image formation and microanalysis |
| title_exact_search | Scanning electron microscopy physics of image formation and microanalysis |
| title_full | Scanning electron microscopy physics of image formation and microanalysis Ludwig Reimer |
| title_fullStr | Scanning electron microscopy physics of image formation and microanalysis Ludwig Reimer |
| title_full_unstemmed | Scanning electron microscopy physics of image formation and microanalysis Ludwig Reimer |
| title_short | Scanning electron microscopy |
| title_sort | scanning electron microscopy physics of image formation and microanalysis |
| title_sub | physics of image formation and microanalysis |
| topic | Elektronenmicroscopie gtt Kristalstructuur gtt Verstrooiing gtt Scanning electron microscopy Rasterelektronenmikroskopie (DE-588)4048455-5 gnd |
| topic_facet | Elektronenmicroscopie Kristalstructuur Verstrooiing Scanning electron microscopy Rasterelektronenmikroskopie |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008194847&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV000000237 |
| work_keys_str_mv | AT reimerludwig scanningelectronmicroscopyphysicsofimageformationandmicroanalysis |